JPH03146411A - Metal melting graphite material - Google Patents
Metal melting graphite materialInfo
- Publication number
- JPH03146411A JPH03146411A JP1284796A JP28479689A JPH03146411A JP H03146411 A JPH03146411 A JP H03146411A JP 1284796 A JP1284796 A JP 1284796A JP 28479689 A JP28479689 A JP 28479689A JP H03146411 A JPH03146411 A JP H03146411A
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- molten metal
- metal
- glassy carbon
- purity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 38
- 239000002184 metal Substances 0.000 title claims abstract description 38
- 239000007770 graphite material Substances 0.000 title claims abstract description 15
- 238000002844 melting Methods 0.000 title claims abstract description 11
- 230000008018 melting Effects 0.000 title claims abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 31
- 239000010439 graphite Substances 0.000 claims abstract description 31
- 229910021397 glassy carbon Inorganic materials 0.000 claims abstract description 28
- 238000000576 coating method Methods 0.000 claims abstract description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 6
- 230000008021 deposition Effects 0.000 abstract description 3
- 230000001668 ameliorated effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000010304 firing Methods 0.000 description 5
- 239000007833 carbon precursor Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229920000915 polyvinyl chloride Polymers 0.000 description 3
- 239000004800 polyvinyl chloride Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000002336 sorption--desorption measurement Methods 0.000 description 2
- 238000004438 BET method Methods 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000009749 continuous casting Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- -1 etc. Chemical compound 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000009991 scouring Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は金属溶融に使用する黒鉛材料に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to graphite materials used in metal melting.
（従来の技術）
高温で溶融金属を処理する際に用いられる溶融金属用黒
鉛材料としては、従来より、反応性、熱伝導性、熱膨張
性、熱衝撃性等のバランスの良さから、高純度黒鉛をル
ツボ、ボート、ダイス、鋳型等の各形状に加工したもの
、もしくはそれらにガラス状炭素を被覆したものが知ら
れている。(Prior art) Graphite materials for molten metals used when processing molten metals at high temperatures have traditionally been made of high-purity materials due to their well-balanced properties such as reactivity, thermal conductivity, thermal expansion properties, and thermal shock resistance. It is known that graphite is processed into various shapes such as crucibles, boats, dies, molds, etc., or those that are coated with glassy carbon.
これらの溶融金属用黒鉛材料は、様々な用途並びに形態
で使われている。即ち、ガス分析用ルツボ、ウラン溶融
用ルツボ、ゲルマニウム、アルミニウム、銅等を精製す
る時に使用される高純度金属精練用ボート、酸化タング
ステンあるいは酸化モリブデンを水素雰囲気中で加熱還
元してタングステンあるいはモリブデンを製造する場合
に使用される黒鉛ボート、アルミニウム蒸着用ルツボ、
鉄、銅、アルミニウム等を溶融金属の状態から直接連続
的にロンド、パイプ、プレート等の形に製造する際に使
用される連続鋳造用ダイス、及びＣａＡｓ５ＧａＰ ｓ
ＩｎＰ等のＩ、ＰＥ用ボート、スライダー、ルツボな
とである。These graphite materials for molten metal are used in various applications and forms. In other words, crucibles for gas analysis, crucibles for uranium melting, high-purity metal scouring boats used for refining germanium, aluminum, copper, etc., tungsten oxide or molybdenum oxide are thermally reduced in a hydrogen atmosphere to produce tungsten or molybdenum. Graphite boats used in manufacturing, crucibles for aluminum deposition,
Continuous casting dies used to directly and continuously manufacture iron, copper, aluminum, etc. from molten metal into shapes such as ronds, pipes, plates, etc., and CaAs5GaP s.
These include I such as InP, boats for PE, sliders, and crucibles.
（発明が解決しようとする課題）
しかしながら、土間従来の高純度黒鉛を単に機械加工し
てなる黒鉛材料にあって−は、黒鉛材料表面の黒鉛微粒
子が離型剤の働きをするために溶融金属の付着は起こら
なかったが、溶融金属中に黒鉛微粒子が取り込まれる、
黒鉛が多孔質であるために不純物ガスを吸着してしまい
使用中にその不純物ガスが脱離し溶融金属中にそれが混
入する、ＬＰＥボートとして使用する際にはスライダー
の摺動によって発生するダストの溶融金属内及び工ピタ
キシャル形成膜内への取り込みが生しる等の欠点があっ
た。一方、溶融金属用ガラス状炭素被覆黒鉛材料にあっ
ては、黒鉛微粒子の取り込み、不純物ガス吸脱着の問題
は起こらないが表面の正反射率が１％を超えているため
に、溶融金属が容器に付着してしまい取扱いに手間が掛
かる等の問題があった。(Problems to be Solved by the Invention) However, in the case of graphite materials made by simply machining conventional high-purity graphite, the graphite particles on the surface of the graphite material act as a mold release agent, so that the molten metal Although no adhesion occurred, fine graphite particles were incorporated into the molten metal.
Since graphite is porous, it adsorbs impurity gases, and during use, the impurity gases are desorbed and mixed into the molten metal.When used as an LPE boat, dust generated by the sliding of the slider is removed. There were drawbacks such as incorporation into the molten metal and into the pittaxially formed film. On the other hand, with glassy carbon-coated graphite materials for molten metal, problems such as incorporation of graphite particles and adsorption/desorption of impurity gas do not occur, but since the specular reflectance of the surface exceeds 1%, the molten metal is There was a problem that it adhered to the surface and required time and effort to handle.
本発明は、高純度黒鉛を単に機械加工してなる黒鉛材料
及びガラス状炭素被覆材料における上記従来の問題点を
解消することを目的とするものである。The object of the present invention is to solve the above-mentioned conventional problems in graphite materials and glassy carbon coating materials made by simply machining high-purity graphite.
（課題を解決するための手段）
即ち、本発明は、ガラス状炭素被覆が黒鉛基材全面に施
こされてなり、少なくとも溶融金属と接する部分の３０
ｄｅｇ入射光の正反射率を０．５〜１％としてなること
を特徴とする金属溶融用黒鉛材料である。(Means for Solving the Problems) That is, in the present invention, a glassy carbon coating is applied to the entire surface of a graphite base material, and at least 30% of the portion in contact with molten metal is coated with glassy carbon.
The graphite material for metal melting is characterized by having a specular reflectance of deg incident light of 0.5 to 1%.
以下、さらに詳しく本発明について説明する。The present invention will be explained in more detail below.
本発明は、金属溶融用黒鉛容器を従来通り加工して準備
し、その全面にガラス状炭素被覆を施こしてなるもので
あるが、とくに容器内面などの溶融金属と接する部分は
３０ｄｅｇ入射光の正反射率が０．５〜１％になるまで
十分にガラス状炭素で被覆してなるものである。In the present invention, a graphite container for metal melting is processed and prepared in the conventional manner, and the entire surface of the container is coated with glassy carbon. Particularly, the inner surface of the container and other parts in contact with the molten metal are coated with 30 degrees of incident light. It is sufficiently coated with glassy carbon until the specular reflectance is 0.5 to 1%.
本発明において、基材黒鉛容器の形状としては、円筒容
器が一般的であるが、何等それに限られることはなく例
えば、ＬＰＥ用ボート、ＬＰＥ用スライダー、船型、パ
イプ状等であってもよい。この時点における基材容器の
正反射率は、通常、０．１〜０．３％となっている。こ
の基材容器の溶融金属との接触部分即ち容器内面以外の
面をサンドペーパーや工業用パッドなどの研磨材を用い
て表面研磨する。In the present invention, the shape of the base graphite container is generally a cylindrical container, but the shape is not limited thereto, and may be, for example, an LPE boat, an LPE slider, a ship shape, a pipe shape, etc. The regular reflectance of the base container at this point is usually 0.1 to 0.3%. The surface of the base container that is in contact with the molten metal, that is, the surface other than the inner surface of the container, is polished using an abrasive material such as sandpaper or an industrial pad.
このようにして得られた基材容器の表面を例えば特公昭
５２−３９６８４号公報記載の方法を用いてガラス状炭
素で被覆する。以下その被覆方法について簡単に説明す
る。The surface of the base container thus obtained is coated with glassy carbon using, for example, the method described in Japanese Patent Publication No. 52-39684. The coating method will be briefly explained below.
ガラス状炭素の原料であるポリ塩化ビニルを不活性化雰
囲気中において３５０〜４５０ ’Ｃで熱分解しピッチ
状の炭素前駆体をトリクレンなどの有機溶剤に溶解し容
器表面に塗布し真空中もしくは不活性化雰囲気中におい
て１０００℃以上の高温で焼成する。この塗布−焼成工
程をガラス状炭素被覆黒鉛容器の溶融金属接触面の３０
ｄｅｇの正反射率が０．５〜１％の範囲となるまで繰り
返し行う。Polyvinyl chloride, which is the raw material for glassy carbon, is thermally decomposed at 350 to 450'C in an inert atmosphere, and the pitch-like carbon precursor is dissolved in an organic solvent such as trichlene and applied to the surface of a container. Firing is performed at a high temperature of 1000° C. or higher in an activating atmosphere. This coating-firing process is applied to the molten metal contact surface of the glassy carbon-coated graphite container.
The process is repeated until the deg specular reflectance falls within the range of 0.5 to 1%.
正反射率が０．５％未満であると、黒鉛ダストの発生防
止、吸脱着ガスの防止等のガラス状炭素被覆効果を充分
に得ることができず、一方、１％を超えると溶融金属が
付着する。不純物ガスの吸脱着の影響を少なくするには
比表面積が小さい方が好ましく、比表面積を小さくする
には、黒鉛基材の表面に光沢を出しく正反射率を高くす
る〉た方がよいことは経験的に知られているので、溶融
金属が接する部分のみの正反射率は１％以下であるのが
望ましい。If the specular reflectance is less than 0.5%, it will not be possible to obtain sufficient glassy carbon coating effects such as preventing the generation of graphite dust and adsorption/desorption of gases, while if it exceeds 1%, the molten metal will adhere to. In order to reduce the effects of adsorption and desorption of impurity gases, it is preferable to have a small specific surface area, and in order to reduce the specific surface area, it is better to increase the specular reflectance to make the surface of the graphite base material glossy. is known from experience, it is desirable that the specular reflectance of only the portion in contact with the molten metal be 1% or less.
高純度が要求される用途に対しては、炭素前駆体を塗布
する前に、例えば１６００℃以上で塩素、フッ素等のハ
ロゲンガスを混入することで高純度の黒鉛材料を得、こ
の黒鉛材料に灰分２０ｐｐｍ以下のガラス状炭素を被覆
することにより高純度のガラス状炭素被覆黒鉛材料が得
られる。このような灰分２０ｐｐｍ以下のガラス状炭素
で被覆することにより、ＬＰＥ法によって成長させたエ
ピタキシャル膜の特性を著しく向上させることができる
という利点がある。なお、灰分２０ｐｐｍ以下のガラス
状炭素は高純度のポリ塩化ビニルを原料とすることによ
り得ることができる。For applications that require high purity, a high-purity graphite material can be obtained by mixing halogen gas such as chlorine or fluorine at a temperature of 1,600°C or higher before applying the carbon precursor. By coating with glassy carbon having an ash content of 20 ppm or less, a highly purified glassy carbon-coated graphite material can be obtained. By coating with such glassy carbon having an ash content of 20 ppm or less, there is an advantage that the characteristics of the epitaxial film grown by the LPE method can be significantly improved. Note that glassy carbon having an ash content of 20 ppm or less can be obtained by using high-purity polyvinyl chloride as a raw material.
（実施例）
以下、実施例と比較例をあげてさらに具体的に本発明を
説明する。(Example) Hereinafter, the present invention will be explained in more detail by giving Examples and Comparative Examples.
実施例１
黒鉛ルツボ（直径１０Ｍ×高さ１０ｍｍ厚さ２ｍｍ）を
表面積度で機械加工した。このとき表面の正反射率は０
．２％であった。この黒鉛ルツボを２０００°Ｃで塩素
処理を施こしたところ、黒鉛ルツボの純度は灰分て２０
ｐｐｍ以下であった。Example 1 A graphite crucible (diameter 10M x height 10mm x thickness 2mm) was machined according to its surface area. At this time, the regular reflectance of the surface is 0
．． It was 2%. When this graphite crucible was subjected to chlorine treatment at 2000°C, the purity of the graphite crucible was 20% in terms of ash content.
It was less than ppm.
一方、ポリ塩化ビニル（電気化学工業社製商品名ｒｓｓ
ｔ ｔ ０−３Ｊ ＞を窒素中３９０ ’Ｃで熱分解
しタール状のピンチ炭素前駆体を得、トリクレンにこの
炭素前駆体を溶解しく１５重量％）、この溶液をルツボ
表面に塗布し、真空雰囲気中、１２ｏｏ’ｃで焼成した
。この塗布−焼成工程を４回繰り返してガラス状炭素を
ルツボ表面に被覆した。このガラス状炭素被覆膜の純度
を測定したところ灰分は２０ｐｐｍ以下であった。ガラ
ス状炭素被覆後の全表面の正反射率は０．７％であった
。On the other hand, polyvinyl chloride (product name: rss manufactured by Denki Kagaku Kogyo Co., Ltd.)
t t 0-3J> in nitrogen at 390'C to obtain a tar-like pinch carbon precursor, dissolve this carbon precursor in trichlene (15% by weight), apply this solution to the crucible surface, and vacuum It was fired in an atmosphere at 12 oo'c. This coating-firing process was repeated four times to coat the surface of the crucible with glassy carbon. When the purity of this glassy carbon coating was measured, the ash content was 20 ppm or less. The specular reflectance of the entire surface after coating with glassy carbon was 0.7%.
実施例２
実施例１で用いた黒鉛ルツボのルツボ内面以外の面を工
業用パッド（スコッチプライト７４４８）で鏡面に仕上
げた。このときの表面の正反射率は１０．１％であった
。この黒鉛ルツボを実施例１と同様に純化処理を施こし
た後、灰分２０ｐｐｍ以下のガラス状炭素を実施例１と
同様に被覆した。この黒鉛ルツボ内面以外の面の正反射
率は１７．３％であった。Example 2 The surfaces of the graphite crucible used in Example 1 other than the crucible inner surface were mirror-finished with an industrial pad (Scotchprite 7448). The regular reflectance of the surface at this time was 10.1%. This graphite crucible was purified in the same manner as in Example 1, and then coated with glassy carbon having an ash content of 20 ppm or less in the same manner as in Example 1. The specular reflectance of surfaces other than the inner surface of this graphite crucible was 17.3%.
比較例１
実施例１で用いた黒鉛ルツボを実施例１と同様に純化処
理を施こした後、塗布−焼成工程を２回繰り返してガラ
ス状炭素をルツボ表面に被覆した。Comparative Example 1 The graphite crucible used in Example 1 was purified in the same manner as in Example 1, and then the coating-firing process was repeated twice to coat the surface of the crucible with glassy carbon.
ガラス状炭素被覆後の全表面の正反射率は０．３％であ
った。The specular reflectance of the entire surface after coating with glassy carbon was 0.3%.
比較例２
実施例１で用いた黒鉛ルツボを実施例１と同様に純化処
理を施こした後、塗布−焼成工程を６回繰り返してガラ
ス状炭素をルツボ表面に被覆した。Comparative Example 2 The graphite crucible used in Example 1 was purified in the same manner as in Example 1, and then the coating-firing process was repeated six times to coat the surface of the crucible with glassy carbon.
ガラス状炭素被覆後の全表面の正反射率は１．８％であ
った。The specular reflectance of the entire surface after coating with glassy carbon was 1.8%.
比較例３
実施例１で用いた黒鉛ルツボにガラス状炭素被覆を施こ
していない金属溶融用黒鉛ルツボを得た。Comparative Example 3 A graphite crucible for metal melting, which was the same as the graphite crucible used in Example 1 but not coated with glassy carbon, was obtained.
このときのルツボ内面の正反射率は０．２％であった。At this time, the regular reflectance of the inner surface of the crucible was 0.2%.
且ＪｔｉｔＬ値
上記実施例１〜２及び比較例１〜３の金属溶融用ルツボ
を用いて、ルツボ内に金属インジウムを入れ水素雰囲気
中、８５０℃に加熱−冷却したときの金属インジウムの
付着状態及び黒鉛ダストの取り込み量を測定した。その
結果と上記５例の金属溶融用ルツボの比表面積の測定結
果を表１に示す。And JtitL value Using the crucibles for metal melting of Examples 1 to 2 and Comparative Examples 1 to 3 above, the adhesion state of metallic indium and The amount of graphite dust taken in was measured. Table 1 shows the results and the measurement results of the specific surface area of the metal melting crucibles of the five examples above.
なお、表１に記載した物性値の測定は次の方法によって
行った。Note that the physical property values listed in Table 1 were measured by the following method.
（１）正反射率（％）
光沢針ＧＭ−０６０（ミノルタカメラ社製）を用いて３
０ｄｅｇ入射光の正反射率を測定した。なお、屈折率ｎ
＝１．５６７のガラスの３０ｄｅｇ入射光の正反射率を
１０％として計算した。(1) Specular reflectance (%) 3 using glossy needle GM-060 (manufactured by Minolta Camera Co., Ltd.)
The regular reflectance of 0 degree incident light was measured. Note that the refractive index n
Calculation was made assuming that the specular reflectance of 30 deg incident light of the glass with =1.567 was 10%.
（２）黒鉛ダスト取り込み量（個／ ｃｄ）走査型電子
顕微鏡を用いて観察した。(2) Graphite dust intake amount (pieces/cd) Observed using a scanning electron microscope.
（３）比表面積（ポ／ｇ） 流通式ＢＥＴ法を用いて測定した。(3) Specific surface area (po/g) It was measured using the flow BET method.
表 １
（発明の効果）
金属溶融用黒鉛材料として、本発明の黒鉛材料を使用す
ることにより溶融金属が黒鉛容器に付着しなくなるので
、溶融金属を高純度にしかも操作性よく取り扱うことが
でき、精練金属の純度の向上、蒸着膜の特性向上、エピ
タキシャル成長膜の特性向上などの効果がある。また、
灰分２０ｐｐｍ以下のガラス状炭素で被覆すればエピタ
キシャル成長膜の特性をさらに向上させることができる
。Table 1 (Effects of the invention) By using the graphite material of the present invention as a graphite material for metal melting, the molten metal will not adhere to the graphite container, so the molten metal can be handled with high purity and with good operability. It has effects such as improving the purity of refined metals, improving the properties of deposited films, and improving the properties of epitaxially grown films. Also,
The properties of the epitaxially grown film can be further improved by coating with glassy carbon having an ash content of 20 ppm or less.
Claims (1)
、少なくとも溶融金属と接する部分の３０ｄｅｇ入射光
の正反射率を０．５〜１％としてなることを特徴とする
金属溶融用黒鉛材料。1. A graphite material for metal melting, characterized in that a glassy carbon coating is applied to the entire surface of a graphite base material, and the specular reflectance of 30 degree incident light at least in the portion in contact with the molten metal is 0.5 to 1%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1284796A JPH0725524B2 (en) | 1989-11-02 | 1989-11-02 | Graphite material for melting metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1284796A JPH0725524B2 (en) | 1989-11-02 | 1989-11-02 | Graphite material for melting metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03146411A true JPH03146411A (en) | 1991-06-21 |
| JPH0725524B2 JPH0725524B2 (en) | 1995-03-22 |
Family
ID=17683132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1284796A Expired - Lifetime JPH0725524B2 (en) | 1989-11-02 | 1989-11-02 | Graphite material for melting metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725524B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0733524A (en) * | 1992-02-18 | 1995-02-03 | Denki Kagaku Kogyo Kk | Material coated with glassy carbon |
-
1989
- 1989-11-02 JP JP1284796A patent/JPH0725524B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0733524A (en) * | 1992-02-18 | 1995-02-03 | Denki Kagaku Kogyo Kk | Material coated with glassy carbon |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0725524B2 (en) | 1995-03-22 |
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