JPH03142190A - Transfer device for work - Google Patents

Abstract

PURPOSE:To transfer a work with correct positional accuracy by providing a turning mechanism for turning a suction pipe with the axial direction as the center and a positioning mechanism for performing the three-dimensional positioning control of the suction pipe. CONSTITUTION:The position of a work 12 adsorbed by abutting the work 12 on a detection bar 14 is detected by providing the detection bar 14 on the suction pipe 11 for adsorbing a work(blank) 12 and turning the suction pipe 11 by a turning mechanism 13 with the axial direction as the center. This suction pipe 11 is then positioned three-dimensionally by the positioning mechanism 15 to transfer the work 12 adsorbed to the suction pipe 11.

Description

DETAILED DESCRIPTION OF THE INVENTION (Technical Field of the Invention) The present invention relates to a workpiece transfer device that attracts and holds small pieces of workpieces such as piezoelectric pieces, and transports and arranges them at predetermined positions.

(Technical background of the invention and its problems) Conventionally, for example, in the manufacturing process of crystal resonators, a plurality of blanks, each of which is formed by cutting a rough stone at a predetermined angle to the crystal axis and forming it into a plate shape, are aligned in the axial direction. They are arranged on a tray, moved between processes, transferred to a deposition frame, and inserted into a vacuum evaporator to deposit electrodes.

However, when transferring such workpieces, the blanks are thin and fragile, so they are prone to cracking and chipping, so they must be handled extremely carefully. Accurate positioning is required.

The moving mechanism 2 performs positioning control, and first the blank 3 is sucked and held at the tip of the suction pipe 1, moved to a predetermined position, and the suction force is deenergized to release the blank 3, thereby moving the parts feeder 4 and the tray 5. The blank 3 is transferred between the directional aligner 6 and the direction aligner 6, etc.

The parts feeder 4 vibrates and spirally conveys the inserted disk-shaped blanks 3, and sequentially moves them to a holding position.

Further, the tray 5 is used for arranging a plurality of blanks 3 in a rectangular array and for moving between processes.

Furthermore, when performing vapor deposition of electrodes for a crystal resonator, for example, the direction aligner 6 makes a mark in advance in a predetermined crystal axis direction of the blank 3 in order to regulate the drawing direction of the electrode with respect to the crystal axis. The blank 3 placed on the aligner 6 is rotated to optically detect its position, held in a fixed direction, and then transferred to align the crystal axes uniformly.

By the way, if such a moving mechanism uses a pulse motor to control positioning with high precision, the speed will be reduced to 1/1.
The suction pipe 1 can be positioned with an accuracy of about 0.00 mm.

However, when picking up workpieces with a suction pipe, the position at which each workpiece is picked up tends to shift, and in particular, the wind pressure when picking up the workpiece causes positional shifts in the sucking parts, so the accuracy is comparable to that of a moving mechanism. is extremely difficult to maintain.

However, if such a device is transferred with misalignment, for example, the position of the electrode deposited on the blank will shift from blank to blank, and the completed crystal resonator will not have the desired electrical characteristics. This may lead to problems such as not being able to do so.

(Object of the Invention) The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a workpiece transfer device that can transfer a workpiece with high positional accuracy.

(Summary of the Invention) The present invention is an apparatus for holding and transferring small pieces of workpieces, in which a detection bar is installed on a suction pipe that adsorbs the workpieces, and the suction pipe is moved along the axial direction of the suction pipe. The position is detected by rotating the suction pipe with the rotation mechanism and bringing it into contact, and the positioning mechanism rotates the suction pipe into three
The feature is that the transfer is carried out by dimensional positioning.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to a perspective view of main parts shown in FIG.

In the figure, reference numeral 11 denotes a suction pipe whose base end is connected to a depressurizing mechanism (not shown), and the blank 12 is suctioned at the distal end of the suction pipe, and the suction pipe is configured to be rotatable by a rotation mechanism 13 with the axial direction as the rotation axis.

Furthermore, a detection bar 1 is rotatably attached to the base end of the suction pipe 11.
4 is provided, the detection bar 14 is lowered from the holding position to the detection position, and the blank 12 whose tip end is adsorbed to the suction pipe 11 is rotated so as to come into contact with the periphery of the blank 12, thereby creating a pressure sensor. The position is detected by the displacement of the detection bar 14 itself.

When picking up the blank 12 with the suction pipe 11, in order to prevent the blank 12 from coming into contact with the detection bar 14 and being damaged, it is raised to the holding position, and after sucking the blank 12, lowered to the detection position to remove the blank. The suction pipe 11 holding the suction pipe 12 is rotated so that its peripheral edge comes into contact with the detection bar 14.

The suction pipe 11 is positioned and controlled by a positioning mechanism 15 capable of three-dimensional positioning to transfer the workpiece.

With such a configuration, it is possible to move from the first position to the second position.
When transferring the blank 12 to the position, the suction pipe 11
The positioning mechanism 15 holds the detection bar 14 in the holding position.
The blank 12 at the first position is approached and adsorbed. After this, the suction pipe 11 moves to the second position and rotates while holding the blank 12, and the blank 1
When the peripheral edge of 2 comes into contact with the detection bar 14, the rotation is stopped.

After the blank 12 is driven to the second position, the suction force of the suction pad and eve 11 is turned off, the blank 12 is released, and the blank 12 is transferred to the second position.

Therefore, the blank 12 can always be held at a constant relative position with respect to the suction pipe 11, and the positional accuracy when holding and transferring the blank 12 with the suction pipe 11 can be significantly improved. There is an advantage that the time required for transfer and loading for positioning during movement from the first position to the second position does not increase significantly by increasing the positional accuracy.

Thus, for example, when depositing electrodes on the blank 12, the electrodes can be formed in precise positions, thereby providing good electrical properties.

Note that the present invention is not limited to the above-mentioned embodiments; for example, in the above-mentioned embodiments, a case where a crystal resonator is transferred as a workpiece is explained, and k is a workpiece that requires careful handling such as a semiconductor chip. It goes without saying that this method can be applied to items that are transferred with positional accuracy.

(Effects of the Invention) As described in detail above, according to the present invention, it is possible to provide a workpiece transfer device that can transfer a workpiece with accurate positional accuracy and has a simple structure.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the structure of a suction pipe according to an embodiment of the present invention, and FIG. 2 is a schematic configuration diagram illustrating an example of a conventional vacuum holder. 11 ・ 12 ◆ ] 3 ・ l 4 ◆ l 5 ・ Adsorption pipe blank (1 node) Rotating mechanism detection bar positioning mechanism

Claims (1)

[Claims] An apparatus for holding and transferring a small piece of workpiece, comprising: a suction pipe that adsorbs the workpiece; and a suction pipe provided on the suction pipe that detects the position by coming into contact with the workpiece adsorbed by the suction pipe. a detection bar that rotates the suction pipe; a rotation mechanism that rotates the suction pipe around an axial direction; and a positioning mechanism that performs three-dimensional positioning control of the suction pipe. loading equipment.