JPH03136205A - Glass-sealed type thermistor - Google Patents
Glass-sealed type thermistorInfo
- Publication number
- JPH03136205A JPH03136205A JP27414589A JP27414589A JPH03136205A JP H03136205 A JPH03136205 A JP H03136205A JP 27414589 A JP27414589 A JP 27414589A JP 27414589 A JP27414589 A JP 27414589A JP H03136205 A JPH03136205 A JP H03136205A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- thermistor
- lead wire
- sealed
- kovar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims abstract description 39
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910000833 kovar Inorganic materials 0.000 claims abstract description 15
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 13
- 239000010937 tungsten Substances 0.000 claims abstract description 13
- 238000003466 welding Methods 0.000 claims abstract description 13
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 9
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 9
- 238000002844 melting Methods 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 2
- 238000007747 plating Methods 0.000 abstract description 2
- 230000002159 abnormal effect Effects 0.000 abstract 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高温での温度検知などに使用されるガラス封止
型サーミスタに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a glass-sealed thermistor used for temperature detection at high temperatures.
従来の技術
ｉに来、この種のサーミスタは、第３図に示すような構
成であった。この図に示すように、従来のサーミスタは
両面に電極２，３が形成された素子本体１と、この各電
極２．３から引き出すリード線としてコバール又はタン
グステン線４と、これらをガラス内に封止するためのガ
ラス封止材７からなる。In the prior art, this type of thermistor had a configuration as shown in FIG. As shown in this figure, a conventional thermistor has an element body 1 with electrodes 2 and 3 formed on both sides, a Kovar or tungsten wire 4 as a lead wire drawn out from each electrode 2, and these are sealed in glass. It consists of a glass sealing material 7 for sealing.
製造にあたっては、素子の電極２，３にコバール又はタ
ングステン線４をパラレルギャップ溶接で溶接したのち
、ガラス管内に挿入し、このガラスを加熱溶融すること
によりガラス管内に封止していた。In manufacturing, a Kovar or tungsten wire 4 was welded to the electrodes 2 and 3 of the element by parallel gap welding, and then inserted into a glass tube, and the glass was heated and melted to seal it within the glass tube.
発明が解決しようとする課題
このような従来の構成では、大気中でガラスを加熱溶融
しガラス管内に封止する際に、８００〜９００℃の高温
まで温度を上げるため封着用リード線（例えば、コバー
ル、タングステンなど）の表面が極端に酸化し、ガラス
とリード線が完全に封着しないという問題があった。又
、封着時のリード線酸化により、リード線から出るガス
が、サーミスタの抵抗値を変化させるという問題があっ
た。一方、還元雰囲気又は中性雰囲気でガラス封着を行
なう場合、リード線は酸化しないので封着はできるが、
酸化物半導体セラミックであるサーミスタは、封着時に
その抵抗値が大きく変化してしまうという問題があった
。Problems to be Solved by the Invention In such a conventional configuration, when glass is heated and melted in the atmosphere and sealed in a glass tube, the temperature is raised to a high temperature of 800 to 900°C, so a sealing lead wire (for example, There was a problem that the surface of the glass (Kovar, tungsten, etc.) was extremely oxidized, and the glass and lead wire were not completely sealed. Further, there is a problem in that gas emitted from the lead wire due to oxidation of the lead wire during sealing changes the resistance value of the thermistor. On the other hand, when performing glass sealing in a reducing atmosphere or neutral atmosphere, the lead wires do not oxidize and can be sealed, but
Thermistors, which are oxide semiconductor ceramics, have a problem in that their resistance value changes significantly during sealing.
本発明はこのような間層を解決するもので、コバール又
はタングステンの表面にＰｔまたはＰｄを１０μｍ以上
の厚みに被覆したリード線を用いて、素子の両面の電極
にパラレルギャップ溶接で溶接し、これをガラス管内に
挿入し、このガラスを加熱溶融することによりガラス内
に封止したサーミスタを作成する際に、ガラスとリード
線間の封着異常及びサーミスタの極端な抵抗値変化など
を起こさず、作業性、信頼性に優れたガラス封止型サー
ミスタを提供することを目的とするものである。The present invention solves such an interlayer problem, and uses a lead wire whose surface is coated with Pt or Pd to a thickness of 10 μm or more on the surface of Kovar or tungsten, and welds it to electrodes on both sides of the element by parallel gap welding. When this is inserted into a glass tube and the glass is heated and melted to create a thermistor sealed within the glass, there will be no abnormality in the sealing between the glass and the lead wire, or extreme changes in the resistance value of the thermistor. The purpose of the present invention is to provide a glass-sealed thermistor with excellent workability and reliability.
課題を解決するための手段
この課題を解決するために本発明は、コバールまたはタ
ングステンの表面にＰｔまたはＰｄを１０μｍ以上の厚
みに被覆したリード線を用いて、サーミスタ素子の両面
の電極にパラレルギャップ溶接で溶接し、これをガラス
管内に挿入し、このガラスを加熱溶接することによりガ
ラス内に封止したものである。Means for Solving the Problem In order to solve this problem, the present invention uses a lead wire whose surface is coated with Pt or Pd to a thickness of 10 μm or more on the surface of Kovar or tungsten, and creates a parallel gap between the electrodes on both sides of the thermistor element. It is welded, inserted into a glass tube, and sealed within the glass by heating and welding the glass.
作用
この構成によりコバールまたはタングステンの表面には
ＰｔまたはＰｄが１０μｍ以上の厚みに被覆されている
ため、ガラスとリード線を加熱溶融し封着する際に、リ
ード線の酸化が抑えられガラスとリード線は完全に気密
封着されると共に、ノード線からガスも発生しないため
、サーミスタも大きな抵抗値変化を起こさず信頼性に優
れたガラス打止型サーミスタを提供することができる。Effect With this structure, the surface of Kovar or tungsten is coated with Pt or Pd to a thickness of 10 μm or more, so when the glass and lead wire are heated and melted and sealed, oxidation of the lead wire is suppressed and the glass and lead wire are sealed. Since the wires are completely hermetically sealed and no gas is generated from the node wires, the thermistor does not experience a large change in resistance value, making it possible to provide a glass-molded thermistor with excellent reliability.
実施例
以下、本発明の一実施例について図面を参照しながら説
明する。第１図は本発明の一実施例によるガラス封止サ
ーミスタの断面図である。第１図において、素子本体ｌ
の両面に電極２，３が形成された素子と、この素子の電
極からの引き出し線であるコバール又はタングステン４
の表面にＰｔまたはＰｄ５，６を１０μｍ以上の厚みに
被覆したリード線とこれらをガラスで封着したガラス材
７からなる。EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a glass-sealed thermistor according to an embodiment of the present invention. In Figure 1, the element body l
An element in which electrodes 2 and 3 are formed on both sides of the element, and Kovar or tungsten 4 which is a lead wire from the electrode of this element.
It consists of a lead wire whose surface is coated with Pt or Pd5,6 to a thickness of 10 μm or more, and a glass material 7 in which these are sealed with glass.
サーミスタ素子本体（素体）１は、酸化マンガン、酸化
ニッケル、酸化クロムなどの金属酸化物で構成されてお
り、厚みが０ 、２ ｆｆ１ｍ程度でその両面に電極と
して白金ペースト又は銀−パラジウムペーストが塗布、
焼付され、これを所定の寸法のチップに切断したもので
ある。一方、リード線としては、コバール又はタングス
テンの表面にＰｔまたはＰｄ５．６をメツキ等の手段に
より１０μｍ以上の厚みに被覆したものを使用し、前記
サーミスタ素子の両面の電極に、第２図に示すようにパ
ラレル溶接機の電極８をあててパラレルギャップ溶接法
で溶接した後、ガラス管内に挿入し、８００〜９００℃
の大気中で加熱溶融することによりガラス内に封止する
。第１表に、ｐｔおよびＰｄの被覆厚みを変えた場合の
リード線の酸化状態およびガラスとの封着状態を示す。The thermistor element body (element body) 1 is composed of metal oxides such as manganese oxide, nickel oxide, and chromium oxide, and has a thickness of about 0.2 mm and platinum paste or silver-palladium paste as electrodes on both sides. coating,
This is baked and cut into chips of predetermined dimensions. On the other hand, as a lead wire, a Kovar or tungsten surface coated with Pt or Pd5.6 to a thickness of 10 μm or more by plating or other means is used, and the lead wire is attached to the electrodes on both sides of the thermistor element as shown in FIG. After applying the electrode 8 of a parallel welding machine and welding using the parallel gap welding method, insert it into a glass tube and heat it to 800 to 900°C.
It is sealed in glass by heating and melting it in the atmosphere. Table 1 shows the oxidation state of the lead wire and the sealing state with glass when the coating thickness of PT and Pd was changed.
（以 下 余 白 ）
第１表に示すように、本実施例によれば、コバール又は
タングステンの表面にＰｔまたはＰｄを１０μｍ以上の
厚みに被覆したリード線を用いることにより、高温大気
中でのガラス加熱溶融時に、リード線の極端な酸化を抑
え良好な封着状態を確保するとともに、ガスの発生によ
るサーミスタの大きな抵抗変化も起こさず信頼性の高い
素子を供給することができる。(Left below) As shown in Table 1, according to this example, by using a lead wire whose surface is coated with Kovar or tungsten with Pt or Pd to a thickness of 10 μm or more, it can be used in a high-temperature atmosphere. When heating and melting glass, it is possible to suppress extreme oxidation of lead wires and ensure a good sealing state, and also to provide a highly reliable element without causing large resistance changes in the thermistor due to gas generation.
発明の効果
以上のように本発明によれば、コバール又はタングステ
ンの表面にＰｔまたはＰｄを１０１．１ｍ以上の厚みに
被覆したリード線を用い、サーミスタ素子の両面の電極
にパラレルギャップ溶接で溶接し、これをガラス管内に
挿入し、このガラスを加熱溶融する。従って、ガラス封
着する際に、高温大気中にさらされてもリード線表面に
耐熱電極を被覆しているため、リード線表面が極端に酸
化せず、ガラスとリード線との封着がスムーズにでき、
信頼性の高い封着を得ることができる。Effects of the Invention As described above, according to the present invention, a lead wire whose surface is coated with Pt or Pd to a thickness of 101.1 m or more is used on the surface of Kovar or tungsten, and is welded to the electrodes on both sides of the thermistor element by parallel gap welding. , this is inserted into a glass tube, and the glass is heated and melted. Therefore, even if the lead wire is exposed to high-temperature air during glass sealing, the lead wire surface is covered with a heat-resistant electrode, so the lead wire surface will not be excessively oxidized and the glass and lead wire will be sealed smoothly. can be done,
Highly reliable sealing can be obtained.
また、リード線表面から発生するガスもないことから、
サーミスタ素子のガラス封着時の抵抗値変化も少なく、
安定した抵抗値を確保することができる。Also, since there is no gas generated from the lead wire surface,
There is little change in resistance value when the thermistor element is sealed with glass,
A stable resistance value can be ensured.
第１図は本発明の一実施例によるガラス封止サーミスタ
の断面図、第２図はパラレルギャップ溶接の工法説明図
、第３図は従来のガラス封止サーミスタの断面図である
。
１・・・・・・サーミスタ素体、２，３・・・・・・電
極、４・・・・・・コバールまたはタングステン、５，
６・・・・・・ＰｔまたはＰｄ、７・・・・・・ガラス
封止材、８・・・・・・パラレルギャップ溶接機の電極
。FIG. 1 is a sectional view of a glass-sealed thermistor according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of a parallel gap welding method, and FIG. 3 is a sectional view of a conventional glass-sealed thermistor. 1... Thermistor element body, 2, 3... Electrode, 4... Kovar or tungsten, 5,
6... Pt or Pd, 7... Glass sealing material, 8... Electrode of parallel gap welding machine.
Claims (1)
１０μｍ以上の厚みに被覆したリード線を、サーミスタ
素子の両面に設けた電極にパラレルギャップ溶接で溶接
し、前記サーミスタ素子および溶接部をガラス管内に挿
入し、このガラスを加熱溶融することによりガラス内に
封止させたガラス封止型サーミスタ。A lead wire coated with Pt or Pd to a thickness of 10 μm or more on the surface of Kovar or tungsten is welded to electrodes provided on both sides of the thermistor element by parallel gap welding, and the thermistor element and the welded part are inserted into a glass tube. , a glass-sealed thermistor that is sealed in glass by heating and melting this glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27414589A JPH03136205A (en) | 1989-10-20 | 1989-10-20 | Glass-sealed type thermistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27414589A JPH03136205A (en) | 1989-10-20 | 1989-10-20 | Glass-sealed type thermistor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03136205A true JPH03136205A (en) | 1991-06-11 |
Family
ID=17537653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27414589A Pending JPH03136205A (en) | 1989-10-20 | 1989-10-20 | Glass-sealed type thermistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03136205A (en) |
-
1989
- 1989-10-20 JP JP27414589A patent/JPH03136205A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH03136205A (en) | Glass-sealed type thermistor | |
| JPH03136203A (en) | Glass sealed type thermistor | |
| JPH1183641A (en) | Glass sealed thermistor | |
| JPH07318435A (en) | Manufacture of glass sealing type thermistor element | |
| JPH02270303A (en) | Manufacture of glass-sealed type thermistor | |
| JPH02124456A (en) | Connecting structure of solid-state electrolyte element | |
| JPH03136207A (en) | Glass sealed type thermistor | |
| JPH0656544A (en) | Method for joining zro2 ceramics | |
| JP3844843B2 (en) | Glass-sealed thermistor and manufacturing method thereof | |
| JPS6236603B2 (en) | ||
| JPH01235304A (en) | Manufacture of glass-sealed thermistor | |
| JPH0236501A (en) | Manufacture of semiconductor device | |
| JPH05258909A (en) | Glass-sealed thermistor | |
| JPH05190306A (en) | Thermistor and its production | |
| JPH07167715A (en) | Composite thermistor temperature sensor | |
| JPH0287030A (en) | Platinum temperature sensor | |
| JPH01293504A (en) | Manufacture of glass-sealed thermistor | |
| JPS6333282B2 (en) | ||
| JPH08236816A (en) | Thermoelectric element | |
| JPH02263402A (en) | Thermistor sealed up in glass | |
| JPH01176283A (en) | Method for electrically joining ceramics | |
| JPS622683B2 (en) | ||
| JPH0315321B2 (en) | ||
| JPH0125503Y2 (en) | ||
| JPH06224004A (en) | Glass-sealed thermistor and manufacture thereof |