JPH03131376A - Carrier cleaning machine - Google Patents

Abstract

PURPOSE:To make a carrier cleaning machine lightweight and simplify the structure of the machine by installing a carrier holding machine, a brush driving means, and a carrier holding machine moving means. CONSTITUTION:A carrier 14 is inset in and held by a carrier holding machine 12 and the carrier holding machine 12 is moved up and down by a cylinder 16. A brush 20 is installed inside of a cleaning tub 18 and a gear 24 fixed in a rotary shaft 22 of the brush is connected with a gear 26 and the gear 26 is further connected with a gear 30. At the time of cleaning a carrier, the carrier holding machine 12 is moved upward so as to inset the carrier 14 in it and hold the carrier and the carrier holding machine 12 is moved downward by the cylinder 16 so as to position it. At that position, the inside of the carrier 14 is brought into contact with the brush 20 and cleaned. In this way, the structure of the cleaning machine is simplified and pollution of the cleaning tub is prevented.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention provides a carrier for cleaning a carrier for storing a wafer, which is the basis of a semiconductor integrated circuit, in an empty state with no wafer stored therein. Regarding washing machines.

[Prior Art] Conventionally, no equipment has been proposed that specializes in cleaning carriers.

[Prior Art] In response to this problem, the inventor separately developed a carrier cleaning machine as shown in FIG.

In FIG. 3, a carrier 1 is placed in a cleaning tank 2, and a brush 3 is moved to the inside of the carrier 1 to perform cleaning. This brush 3 is driven by an electric motor 6 via a gear train 4 and a transmission mechanism 5.
The gear train 4, the windings constitute a transmission mechanism 5, and the electric motor 6 constitute a brush rotation mechanism. Note that carrier 1 is the fourth
It has a side cross-sectional shape as shown in the figure.

The structure 7 that holds this brush rotation mechanism is fixed to a rack 8, and the rack 8 is engaged with a pinion of a motor 9 with an electromagnetic brake, and by rotating the motor 9,
The brush 3, the brush rotation mechanism (4, 5, 6), and the structure 7 move up and down.

When cleaning, put the carrier 1- into the cleaning tank 2,
Drive the motor 9 with an electromagnetic brake to lower the brush 3,
Further, the electric motor 6 is driven to rotate the brush 3 and clean it for a predetermined period of time. When cleaning is completed, the brush 3 is raised by the electromagnetic brake motor 9, and the electric motor 6 is stopped to stop the rotation of the brush 3.

[Problems to be Solved by the Invention] However, during cleaning work, the brush 3, the brush rotation mechanism (4, 5, 6), and the structure 7 must be moved up and down, so the weight of the entire member to be moved down is reduced. There is a problem in that it becomes large and it becomes difficult to control its vertical movement.

Further, in the prior art shown in FIG. 3, the vertical movement of brushes and the like is performed by the rack 8 and the pinion of the electromagnetic brake motor 9, but there is also the problem that it is difficult to lubricate the engaging portions.

Here, it is also possible to move the brush 3 etc. up and down using a piston-cylinder mechanism, but as mentioned above, since the weight of the entire member that needs to be moved up and down is large, it is difficult to control the up and down movement, and it is difficult to do so. Appropriate.

Furthermore, there is a problem in that the carrier 1 in the cleaning tank 2 must be held down by a separate mechanism, which complicates the entire mechanism.

In addition, the brush 3, gear train 4, transmission mechanism 5, electric motor 6, rack 8, pinion of the electromagnetic brake motor 9, etc. are located directly above the cleaning tank 2, so their vertical movement generates dust. There was a problem in that this caused the cleaning tank 2 to be contaminated.

The present invention was proposed in view of the problems of the prior art described in 1. The present invention allows for accurate and easy control of the movement of a brush for cleaning, allows for light weight, and has a simple mechanism. The purpose is to provide a carrier cleaning machine.

[Means for Solving the Problems] A carrier cleaning machine of the present invention includes a cleaning tank and cleans a carrier for storing wafers in the cleaning tank, wherein the carrier is placed and held. The carrier holder includes a carrier holder, a brush installed in a cleaning tank, a driving means for rotating the brush, and a moving means for moving the carrier holder.

Here, as a moving means for moving the carrier holder, for example, a piston-cylinder mechanism is desirable.

[Function] According to the carrier cleaning machine of the present invention having the above-described configuration, the carrier holder on which the carrier is placed is moved up and down by the moving means, and the carrier is brought into contact with the brush to perform cleaning. It has become. Therefore, the only member that moves up and down is the carrier holder on which the carrier is placed, and the weight of the member that moves up and down is reduced compared to the prior art. Therefore, the mechanism for vertical movement can also be simplified, and for example, a cylinder mechanism can be used.

Further, since the carrier is placed and held by the carrier holder, a special holding mechanism is unnecessary, and the mechanism can be simplified accordingly.

Furthermore, since the only rotating members installed inside the cleaning tank are the brush and its rotating shaft, and there is no need to install a rotational drive member above the cleaning tank, dust is generated due to the vertical movement of the upper member, and the cleaning tank is damaged. There is no chance of contamination.

[Example] Hereinafter, an example of the present invention will be described with reference to FIGS. 1 and 2.

In FIG. 1, the carrier cleaning machine of the present invention, designated as a whole by the reference numeral JO, has a carrier holder 1.2, into which a carrier 14 is fitted and held. This carrier holder 12 is moved up and down by a cylinder 16.

On the other hand, the carrier cleaning machine 10 includes a cleaning tank 18,
A brush 20 is installed inside the cleaning tank 18. A gear 24 fixed to the rotating shaft 22 of this brush 20 is engaged with a gear 26, and the gear 26 is engaged with a gear 30 fixed to a shaft 28. And gear 24.26.30
constitutes a gear train 32. This shaft 28 is the cleaning tank 18
extending through the wall of the oil seal;
It is sealed with a packing, mechanical seal, etc.

A pulley 34 is attached to the other end of the shaft 28, and the pulley 34 is connected via a belt 36 to a pulley 40 attached to the output shaft of an electric motor 38. Here, the pulleys 34, 40 and the belt 36 constitute a transmission mechanism 42. In the embodiment shown in FIG. 1, a transmission mechanism is used for the winding, but it is also possible to directly connect the shaft 28 and the output shaft of the electric motor 38.

When cleaning the carrier, first, as shown by the solid line in FIG. 1, the carrier holder 12 is raised to fit and support the carrier 14. Then, the carrier holder 1.2 is lowered by the cylinder 16 and positioned as shown by the two-dot chain line in FIG. Here, as is clear from FIG. 2, the carrier holder 12 is formed of two link-like members, and does not close the opening 15 of the carrier 14.

Therefore, at the position shown by the two-dot chain line in FIG. 1, the interior 1.4 I of the carrier 14 comes into contact with the brush 20. When the electric motor 38 is driven, the rotation of the winding is transmitted to the brush 20 via the transmission mechanism 42, the shaft 28, and the gear train 32, and the carrier 14 is cleaned.

After cleaning with the brush 20 is completed for a certain period of time, the carrier holder] 2 is raised again to the position shown by the solid line in FIG. 1 by the cylinder 16, the cleaned carrier 14 is removed, and another carrier mate. below,
Repeat the above operations.

[Effect of the invention] The effects of the present invention are listed below.

(1) Since the member that moves up and down is a carrier holder that holds the carrier, weight reduction is achieved.

(2) (Related to the fact that the weight of the member that moves up and down is reduced) The mechanism for moving up and down can be simplified; for example, a cylinder mechanism can be adopted.

(3) Since the carrier is placed and held by the carrier holder, a special holding mechanism is unnecessary, and the mechanism can be simplified accordingly.

(4) Since there is no need to provide a rotary drive member above the cleaning tank, there is no possibility that dust will be generated due to the vertical movement and rotation of the one member and contaminate the cleaning tank.

[Brief explanation of the drawing]

FIG. 1 is a front sectional view showing one embodiment of the present invention, FIG. 2 is a sectional view taken along line A-A in FIG. 1, FIG. 3 is a front sectional view showing the prior art, and FIG. It is a sectional view taken along the line B-B in the figure.

Claims (1)

[Claims] A carrier cleaning machine that includes a cleaning tank and cleans carriers for storing wafers in the cleaning tank, comprising: a carrier holder on which the carrier is placed and holds the carrier; a brush installed in the cleaning tank; A carrier cleaning machine comprising: a drive means for rotating a brush; and a moving means for moving the carrier holder.