JPH031297U - - Google Patents

Info

Publication number
JPH031297U
JPH031297U JP6272989U JP6272989U JPH031297U JP H031297 U JPH031297 U JP H031297U JP 6272989 U JP6272989 U JP 6272989U JP 6272989 U JP6272989 U JP 6272989U JP H031297 U JPH031297 U JP H031297U
Authority
JP
Japan
Prior art keywords
blade
rotor
rotor blade
stator
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6272989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6272989U priority Critical patent/JPH031297U/ja
Publication of JPH031297U publication Critical patent/JPH031297U/ja
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/08Sealings
    • F04D29/16Sealings between pressure and suction sides
    • F04D29/161Sealings between pressure and suction sides especially adapted for elastic fluid pumps
    • F04D29/164Sealings between pressure and suction sides especially adapted for elastic fluid pumps of an axial flow wheel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP6272989U 1989-05-30 1989-05-30 Pending JPH031297U (un)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6272989U JPH031297U (un) 1989-05-30 1989-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6272989U JPH031297U (un) 1989-05-30 1989-05-30

Publications (1)

Publication Number Publication Date
JPH031297U true JPH031297U (un) 1991-01-09

Family

ID=31592144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6272989U Pending JPH031297U (un) 1989-05-30 1989-05-30

Country Status (1)

Country Link
JP (1) JPH031297U (un)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50132312U (un) * 1974-04-16 1975-10-30
JP2002526720A (ja) * 1998-10-07 2002-08-20 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング ステータとロータを有する摩擦真空ポンプ
JP2006348765A (ja) * 2005-06-13 2006-12-28 Shimadzu Corp ターボ分子ポンプ
WO2007004542A1 (ja) * 2005-07-01 2007-01-11 Boc Edwards Japan Limited ターボ分子ポンプ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50132312U (un) * 1974-04-16 1975-10-30
JP2002526720A (ja) * 1998-10-07 2002-08-20 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング ステータとロータを有する摩擦真空ポンプ
JP2006348765A (ja) * 2005-06-13 2006-12-28 Shimadzu Corp ターボ分子ポンプ
JP4661378B2 (ja) * 2005-06-13 2011-03-30 株式会社島津製作所 ターボ分子ポンプ
WO2007004542A1 (ja) * 2005-07-01 2007-01-11 Boc Edwards Japan Limited ターボ分子ポンプ

Similar Documents

Publication Publication Date Title
JPH031297U (un)
JPH023098U (un)
JPS6241802U (un)
JPH0323696U (un)
JPS6077795U (ja) タ−ボ分子ポンプ
JPH0337298U (un)
JPH0214496U (un)
JPH02114796U (un)
JPH0444496U (un)
JPH03119593U (un)
JPS60134893U (ja) タ−ボ分子ポンプにおけるステ−タ翼の固定構造
JPH0246093U (un)
JPS6314894U (un)
JPS63132896U (un)
JPS6314893U (un)
JPS63162990U (un)
JPH041694U (un)
JPH0261198U (un)
JPS6247796U (un)
JPH02112997U (un)
JPS63140196U (un)
JPH0195595U (un)
JPS63123794U (un)
JPH0252996U (un)
JPS60155799U (ja) 送風機