JPH031297U - - Google Patents
Info
- Publication number
- JPH031297U JPH031297U JP6272989U JP6272989U JPH031297U JP H031297 U JPH031297 U JP H031297U JP 6272989 U JP6272989 U JP 6272989U JP 6272989 U JP6272989 U JP 6272989U JP H031297 U JPH031297 U JP H031297U
- Authority
- JP
- Japan
- Prior art keywords
- blade
- rotor
- rotor blade
- stator
- notch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/16—Sealings between pressure and suction sides
- F04D29/161—Sealings between pressure and suction sides especially adapted for elastic fluid pumps
- F04D29/164—Sealings between pressure and suction sides especially adapted for elastic fluid pumps of an axial flow wheel
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6272989U JPH031297U (US08188275-20120529-C00054.png) | 1989-05-30 | 1989-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6272989U JPH031297U (US08188275-20120529-C00054.png) | 1989-05-30 | 1989-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031297U true JPH031297U (US08188275-20120529-C00054.png) | 1991-01-09 |
Family
ID=31592144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6272989U Pending JPH031297U (US08188275-20120529-C00054.png) | 1989-05-30 | 1989-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031297U (US08188275-20120529-C00054.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50132312U (US08188275-20120529-C00054.png) * | 1974-04-16 | 1975-10-30 | ||
| JP2002526720A (ja) * | 1998-10-07 | 2002-08-20 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | ステータとロータを有する摩擦真空ポンプ |
| JP2006348765A (ja) * | 2005-06-13 | 2006-12-28 | Shimadzu Corp | ターボ分子ポンプ |
| WO2007004542A1 (ja) * | 2005-07-01 | 2007-01-11 | Boc Edwards Japan Limited | ターボ分子ポンプ |
-
1989
- 1989-05-30 JP JP6272989U patent/JPH031297U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50132312U (US08188275-20120529-C00054.png) * | 1974-04-16 | 1975-10-30 | ||
| JP2002526720A (ja) * | 1998-10-07 | 2002-08-20 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | ステータとロータを有する摩擦真空ポンプ |
| JP2006348765A (ja) * | 2005-06-13 | 2006-12-28 | Shimadzu Corp | ターボ分子ポンプ |
| JP4661378B2 (ja) * | 2005-06-13 | 2011-03-30 | 株式会社島津製作所 | ターボ分子ポンプ |
| WO2007004542A1 (ja) * | 2005-07-01 | 2007-01-11 | Boc Edwards Japan Limited | ターボ分子ポンプ |
