JPH0312886A - Sliding member for recording and reproduction - Google Patents
Sliding member for recording and reproductionInfo
- Publication number
- JPH0312886A JPH0312886A JP1145310A JP14531089A JPH0312886A JP H0312886 A JPH0312886 A JP H0312886A JP 1145310 A JP1145310 A JP 1145310A JP 14531089 A JP14531089 A JP 14531089A JP H0312886 A JPH0312886 A JP H0312886A
- Authority
- JP
- Japan
- Prior art keywords
- recording
- sliding member
- reproducing
- magnetic
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 16
- 229930195733 hydrocarbon Natural products 0.000 claims description 12
- 150000002430 hydrocarbons Chemical class 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 8
- 239000004215 Carbon black (E152) Substances 0.000 claims description 7
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 24
- 239000010408 film Substances 0.000 description 19
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 17
- 150000002500 ions Chemical class 0.000 description 13
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- -1 ethylene, propylene Chemical group 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229930182556 Polyacetal Natural products 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 101150000971 SUS3 gene Proteins 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000010954 inorganic particle Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001868 water Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
【発明の詳細な説明】
(技術分野)
本発明は、磁気又は光記録再生用媒体を装着するための
部材及び記録再生装置における摺動部材の改良に関する
。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to an improvement in a member for mounting a magnetic or optical recording/reproducing medium and a sliding member in a recording/reproducing apparatus.
さらに詳しくは、本発明は磁気テープカセットにおける
テープガイド、ガイトローラ等のテープ案内部材媒体と
接触するハーフケース部材、スプリングでリールを固定
するためのセンターホス、磁気ヘッド、光又は磁気ディ
スクの回転ハブ、その他磁気テープや他の部分と摺動す
る部分の耐摩擦性で耐摩耗性の摺動部材に関する。More specifically, the present invention relates to a tape guide in a magnetic tape cassette, a tape guide member such as a guide roller, a half case member that contacts the medium, a center host for fixing the reel with a spring, a magnetic head, a rotating hub for an optical or magnetic disk, It also relates to friction-resistant and abrasion-resistant sliding members for parts that slide on magnetic tapes and other parts.
(従来技術)
オーディオテープカセット、ビデオテープカセット等の
カセットテープには磁気テープの走行を適正に案内して
走行安定性を確保するために案内部材が設けられている
。例えばカセット前面の両端に固定テープガイドが設け
られている。第1図は従来のビデオテープカセットケー
スの分解図で、理解を容易にするためにテープガイド部
分のみを詳しく示しである。(Prior Art) Cassette tapes such as audio tape cassettes and video tape cassettes are provided with guide members to properly guide the running of the magnetic tape and ensure running stability. For example, fixed tape guides are provided at both ends of the front surface of the cassette. FIG. 1 is an exploded view of a conventional video tape cassette case, with only the tape guide portion shown in detail for ease of understanding.
図において2は下ハーフ、1は上ハーフであり、下ハー
フ2には磁気テープ繰り出し側から磁気テープ走行路に
そって順に、プラスチックガイドビン3、プラスチック
支持ビン4に支持された金属製の半円筒形または円筒形
固定テープガイド5、プラスチック支持ビン6に支持さ
れた金属製半円筒形または円筒形固定テープガイド7、
およびプラスチックビン8に支持された金属ガイドロー
ラ9が設けられている。これらのガイド部材のなかでも
、特に重要なものはテープガイド5.7である。これら
のガイドは、ビデオ用としてはステンレス鋼(SUS3
04等)、黄銅又はアルミニウムの下地にめっき、ポリ
アセタール等の硬質樹脂、またオーディオ用としてはス
テンレス鋼、ポリスチレン等の樹脂、などが使用されて
いる。In the figure, 2 is a lower half, 1 is an upper half, and the lower half 2 has metal halves supported by a plastic guide bin 3 and a plastic support bin 4 in order from the magnetic tape feeding side along the magnetic tape running path. a cylindrical or cylindrical fixing tape guide 5; a metal semi-cylindrical or cylindrical fixing tape guide 7 supported in a plastic support bin 6;
and a metal guide roller 9 supported by a plastic bin 8. Among these guide members, the tape guide 5.7 is particularly important. These guides are made of stainless steel (SUS3) for video use.
04, etc.), plating on a brass or aluminum base, hard resins such as polyacetal, and for audio applications, stainless steel, resins such as polystyrene, etc. are used.
ステンレス鋼はビデオテープカセットをしては磁気テー
プのバックコートの添加材である無機材粒子により削ら
れることがあり、ドロップアウトの原因と成り、またオ
ーディオ用としては申し分ないが非常にコストが高くな
る。黄銅又はアルミニウムの下地にめっきではコストが
高くなり、表面粗さが小さくなるため摩擦係数が高くな
り、走行性の悪化が見れられる。ポリアセタール等の樹
脂は削れ易く、粉落ちのため記録媒体の面に付着してド
ロップアウトの原因と成り、また摩擦係数が大きいため
に走行不良を生じ易い。Stainless steel can be worn away by the inorganic particles added to the magnetic tape backcoat when making videotape cassettes, causing dropouts, and while it is perfect for audio applications, it is very expensive. Become. Plating on a brass or aluminum base increases cost, reduces surface roughness, increases friction coefficient, and deteriorates running performance. Resin such as polyacetal is easily scraped, and due to powder falling off, it adheres to the surface of the recording medium, causing dropouts, and also tends to cause poor running due to its large coefficient of friction.
一方、光ディスクや磁気ディスクでは記録媒体を環状に
構成しこれを支持して駆動するためにその中央孔に金属
製の回転ハブを嵌合固定する。回転ハブは装置側からス
ピンドルビンを受けるための中央孔と偏心位置にある駆
動ビンを受けるための軸はずれの孔とを有し、駆動ビン
はディスクを記録再生装置に装着すれば自動的にハブの
面を、摺動して軸はずれの孔に嵌合する。このときハブ
の表面には摩耗、擦り傷、粉落ちが発生する。On the other hand, in the case of an optical disk or a magnetic disk, the recording medium is formed into an annular shape, and a metal rotating hub is fitted and fixed in the central hole of the disk in order to support and drive the recording medium. The rotating hub has a central hole for receiving the spindle bin from the device side and an off-axis hole for receiving the drive bin located at an eccentric position. slide the surface into the off-axis hole. At this time, wear, scratches, and dust particles occur on the surface of the hub.
第2図は磁気ディスク装置の分解構造の概要を示し、上
ケース11、下ケース120間に、回転ハブ13を中央
孔に嵌合固定した磁気ディスク14、およびその両側の
ライナーシート15.16を収納して成る。回転ハブ1
3は再生装置側の中心スピンドルビン(図示せず)を受
は入れるための四角形中央孔17と偏心位置にある駆動
ビン(図示せず)を受は入れる軸はずれの四角形の孔1
8を有する。ディスク装置を記録再生装置に装着すれば
自動的にスピンドルビンおよび駆動ビンはこれらの孔に
侵入しようとするがこれらのビンは必ずしも孔17.1
8と正しく整列していないから、駆動ビンはハブ13の
面を摺動しながら回転して孔の位置を探して嵌合するに
至る。回転ハブ13は通常ステンレス鋼(SUS430
)又はそれにめっき(例えば硬質クロムめっき)をほど
こしたものなどが使用されているが、駆動ビンやスビン
ドルビンと接触する部分が何度も使用している間に次第
に摩耗して粉落ちを生じ、これがディスク面に付着する
と擬記録やドロップアウトを生じ、情報の記録読み取り
における誤動作を生じることに成る。シャッター等も使
用毎に摺動するため耐久性にしないと上述の問題を発生
する。FIG. 2 shows an outline of the disassembled structure of a magnetic disk device, in which a magnetic disk 14 with a rotating hub 13 fitted and fixed in a central hole, and liner sheets 15 and 16 on both sides thereof are placed between an upper case 11 and a lower case 120. Consists of storage. Rotating hub 1
3 is a rectangular central hole 17 for receiving a central spindle bin (not shown) on the playback device side, and an off-axis rectangular hole 1 for receiving a drive bottle (not shown) located at an eccentric position.
It has 8. When a disk device is installed in a recording/reproducing device, the spindle bin and drive bin automatically try to enter these holes, but these bins do not necessarily fit into the hole 17.1.
8, the drive pin rotates while sliding on the surface of the hub 13 to locate and fit into the hole. The rotating hub 13 is usually made of stainless steel (SUS430
) or coated with plating (e.g. hard chrome plating), but the parts that come into contact with the drive bottle and spindle bin gradually wear out and cause powder to fall off during repeated use. If it adheres to the disk surface, false recording or dropouts may occur, resulting in malfunctions when recording and reading information. Shutters and the like also slide each time they are used, so unless they are made durable, the above-mentioned problems will occur.
そのほか磁気テープとの接触による磁゛気ヘッドの摩擦
及び摩耗とその粉落ちによる同様な問題もある。一般に
、磁気記録再生装置、光デイスク記録再生装置等におけ
る摺動部材では、それが記録媒体に近接した位置にある
場合には摺動部材の摩耗による粉落ちで情報の記録又は
再生に誤差が生じる問題があり、出来るだけ耐摩耗性の
摺動部材が望まれれ、実際摺動部材の素材を工夫するこ
とにより相当に耐摩耗性の良いものが得られているが、
費用の点で簡便に製造できることが更に望ましい。In addition, there are similar problems due to friction and wear of the magnetic head due to contact with the magnetic tape and powder falling off. In general, when sliding members in magnetic recording and reproducing devices, optical disk recording and reproducing devices, etc. are located close to the recording medium, errors occur in recording or reproducing information due to powder falling off due to wear of the sliding members. However, it is desirable to have a sliding member that is as wear resistant as possible, and in fact, by devising the material of the sliding member, one with considerably good wear resistance has been obtained.
It is further desirable that it can be manufactured easily in terms of cost.
(発明の目的)
従って、本発明の目的は、磁気テープカセット、光又は
磁気ディスク、磁気ヘット等の磁気又は光記録再生装置
における、テープ案内部材、磁気ヘッド、光又は磁気デ
ィスクの回転ハブ、その他磁気テープや他の部分と摺動
する部分の摺動部材の摩擦を低下し又耐摩耗性を向上す
る安価な手段を提供することにある。(Object of the Invention) Therefore, the object of the present invention is to provide a tape guide member, a magnetic head, a rotating hub of an optical or magnetic disk, etc. in a magnetic or optical recording/reproducing device such as a magnetic tape cassette, an optical or magnetic disk, or a magnetic head. The object of the present invention is to provide an inexpensive means for reducing the friction and improving the abrasion resistance of a sliding member in a portion that slides on a magnetic tape or other portions.
(発明の構成の概要)
本発明は、記録再生用媒体を装着するための部材及び記
録再生装置に使用する摺動部材において、前記摺動部材
の表面部分が金属とその表面に形成されたダイヤモンド
様被覆とより成ることを特徴とする記録再生用の耐摩擦
性、耐摩耗性摺動部材を提供する。(Summary of Structure of the Invention) The present invention provides a sliding member for use in a member for mounting a recording/reproducing medium and a recording/reproducing device, in which a surface portion of the sliding member is made of metal and a diamond formed on the surface thereof. The present invention provides a friction-resistant and wear-resistant sliding member for recording and reproducing, which is characterized by comprising a similar coating.
本発明の摺動部材は磁気テープカセットの磁気テープ案
内部材、媒体収納ハーフケース、リールを固定するため
のセンターボス、媒体に接触する磁気ヘット面、光ディ
スク又は磁気ディスク装置のディスクを支持する回転ハ
ブ等に適用できる。The sliding member of the present invention is a magnetic tape guide member of a magnetic tape cassette, a medium storage half case, a center boss for fixing a reel, a magnetic head surface that contacts the medium, and a rotating hub that supports an optical disk or a disk of a magnetic disk device. It can be applied to etc.
上記の構成によると、記録再生装置に使用する摺動部材
は、生産性良く、安価に低摩擦性及び耐摩耗性の良いダ
イヤモンド様膜で被覆することができる。According to the above configuration, a sliding member used in a recording/reproducing device can be coated with a diamond-like film having low friction and good wear resistance with good productivity and at low cost.
本発明に適するダイヤモンド様膜は種々の方法で成膜す
ることが出来るが、好ましくはイオン化蒸着法が好適に
使用できる。すなわち、真空中に炭化水素原料ガス又は
分解又は反応により炭化水素を生成し得る原料ガスを導
入し、これをイオン化させ、これを摺動部材の表面部分
中幕体となる金属の面に導いてそこに析出させてダイヤ
モンド様薄膜を形成させる方法により、摺動部材を構成
出来る。この方法は低温度で実施でき、且つ結晶性の良
い膜を生成できる点及び量産がしやすい点で、他の方法
よりも好ましい。Although the diamond-like film suitable for the present invention can be formed by various methods, ionized vapor deposition is preferably used. That is, a hydrocarbon raw material gas or a raw material gas that can generate hydrocarbons through decomposition or reaction is introduced into a vacuum, ionized, and guided to the surface of the sliding member and to the surface of the metal that will become the middle curtain. A sliding member can be constructed by depositing thereon to form a diamond-like thin film. This method is preferable to other methods because it can be carried out at low temperatures, can produce a film with good crystallinity, and can be easily mass-produced.
(発明の詳細な説明)
上に簡単に述べたように、本発明は記録再生装置用の摺
動部材の表面にダイヤモンド様膜を形成することを特徴
とする。成膜方法は特にイオン化蒸着法によるダイヤモ
ンド様膜生成法が好適である。(Detailed Description of the Invention) As briefly mentioned above, the present invention is characterized in that a diamond-like film is formed on the surface of a sliding member for a recording/reproducing device. As the film forming method, a diamond-like film forming method using ionized vapor deposition is particularly suitable.
イオン化蒸着法は炭化水素原料ガス又は分解又は反応に
より炭化水素を生成し得る原料ガス(ここに炭化水素と
はメタン、エタン、プロパン等の飽和炭化水素、エチレ
ン、プロピレン、アセチレン等の不飽和炭化水素等があ
り、分解して炭化水素を生成し得る原料ガスはメチルア
ルコール、エチルアルコール等のアルコール類、アセト
ン、メチルエチルケトン等のケトン類なとがあり、又反
応して炭化水素ガスを生成する原料ガスには一酸化炭素
、二酸化炭素と水素との混合ガス等がある。また前記原
料にはヘリウム、ネオン、アルゴン等の希ガスあるいは
水素、酸素、窒素、水、酸化炭素、二酸化炭素、等の少
なくとも一種を含ませることができる)を陰極一対陰極
間のアーク放電、陰極熱フィラメント一対陰極間の熱電
子放出によるイオン化等の手段でイオン化してイオン流
とし、この流れを電場で加速して基板に差し向けること
によりダイヤモンド様薄膜を製膜する方法であり、特開
昭58−174507号、特願昭63−59376号、
同63−59377号等に記載されている通り、イオン
化蒸着法は基体温度として従来のような700 ℃以上
の高温度を用いる必要がなく(例えば「表面化学」第5
巻第108号(1984年)第108−115頁の各種
の方法参照)、製膜能率も良く、製膜されたダイヤモン
ド様膜が良好な表面性、高硬度、高熱伝導性、高屈折率
を有し、仕上表面処理が不要である等、優れた方法であ
る。The ionization vapor deposition method is a hydrocarbon raw material gas or a raw material gas that can generate hydrocarbons by decomposition or reaction (here, hydrocarbons include saturated hydrocarbons such as methane, ethane, and propane, and unsaturated hydrocarbons such as ethylene, propylene, and acetylene). Raw material gases that can be decomposed to produce hydrocarbons include alcohols such as methyl alcohol and ethyl alcohol, ketones such as acetone and methyl ethyl ketone, and raw material gases that can react to produce hydrocarbon gases. There are carbon monoxide, a mixed gas of carbon dioxide and hydrogen, etc.The raw materials include rare gases such as helium, neon, and argon, and at least one of hydrogen, oxygen, nitrogen, water, carbon oxide, carbon dioxide, etc. ) is ionized into an ion flow by means such as arc discharge between a pair of cathodes or ionization by thermionic emission between a cathode hot filament and a pair of cathodes, and this flow is accelerated by an electric field to cause it to flow onto the substrate. This is a method of forming a diamond-like thin film by directing the film, and is disclosed in Japanese Patent Application Laid-Open No. 58-174507, Japanese Patent Application No. 63-59376,
As described in No. 63-59377, etc., the ionization vapor deposition method does not require the use of a high temperature of 700 °C or more as the substrate temperature (for example, "Surface Chemistry" No. 5).
Vol. 108 (1984), pp. 108-115), the film forming efficiency is good, and the formed diamond-like film has good surface properties, high hardness, high thermal conductivity, and high refractive index. This is an excellent method as it does not require surface treatment.
なおイオンビームを固定し基板を移動するか、逆に基板
を固定しイオン化された炭化水素のプラズマ状のイオン
ビームを元の方向に対してほぼ直角な方向に偏向走査す
ることにより広い基板に対してダイヤモンド様薄膜の成
膜を実施できる。このような偏向磁界は、イオン流の加
速方向にたいして交差する方向の磁界を生じる永久磁石
又は電磁石を用いることにより形成することができる。The ion beam can be fixed and the substrate moved, or conversely, the substrate can be fixed and the ionized hydrocarbon plasma-like ion beam deflected and scanned in a direction almost perpendicular to the original direction. can form a diamond-like thin film. Such a deflection magnetic field can be created by using a permanent magnet or an electromagnet that generates a magnetic field in a direction perpendicular to the acceleration direction of the ion stream.
本発明の基本技術であるイオン化蒸着法は、特願昭63
−59377号及び同63−59376号等に記載され
ており、本発明の実施例ではこれらに記載された装置を
基本とした方法及び装置を用いる。The ionization vapor deposition method, which is the basic technology of the present invention, is
-59377 and No. 63-59376, etc., and the embodiments of the present invention use methods and devices based on the devices described in these documents.
製に皿Jdl要
第3図に製膜装置の好ましい例を示す。図中30は真空
容器、31はチャンバーであり、排気系38に接続され
て10””Torr程度までの高真空に引かれる。32
は適当な駆動手段により一定方向に送られる基板Sの裏
面に設けられた電極であり、この場合電圧Vaが与えら
れている。Figure 3 shows a preferred example of the film forming apparatus. In the figure, 30 is a vacuum container, and 31 is a chamber, which is connected to an exhaust system 38 and drawn to a high vacuum of about 10'' Torr. 32
is an electrode provided on the back surface of the substrate S that is fed in a fixed direction by a suitable driving means, and in this case, a voltage Va is applied thereto.
33はグリッドでイオンの加速を行なうのに使用される
。34は熱陰極フィラメントであり、交流電源Ifによ
って加熱されて熱電子を発生し、また負電位に維持され
ている。35は原料である炭化水素ガスの供給口である
。また、フィラメント34を取囲んで対電極36が配置
され、フィラメントとの間に電圧Vdを与える。フィラ
メント34、対電極36及び供給口35の周りを取り囲
んでイオン化ガスの閉じ込め用の磁界を発生する電磁コ
イル39が配置されている。従ってVd、Va及びコイ
ルの電流を調整することにより膜質を変えることができ
る。33 is used to accelerate ions with a grid. 34 is a hot cathode filament, which is heated by the AC power source If to generate thermoelectrons, and is maintained at a negative potential. 35 is a supply port for hydrocarbon gas, which is a raw material. Further, a counter electrode 36 is disposed surrounding the filament 34, and a voltage Vd is applied between the counter electrode 36 and the filament. An electromagnetic coil 39 is disposed surrounding the filament 34, the counter electrode 36, and the supply port 35 to generate a magnetic field for confining the ionized gas. Therefore, the film quality can be changed by adjusting Vd, Va, and the coil current.
なお第3図においては、炭化水素ガスの原料導入通路3
7にプラズマ励起室36が設けられており、これにより
イオン化装置の効率を高めている。プラズマ励起は例え
ばマイクロ波、高周波(RF波)、放射線、紫外線など
が利用できる。In addition, in FIG. 3, the hydrocarbon gas raw material introduction passage 3
A plasma excitation chamber 36 is provided at 7, thereby increasing the efficiency of the ionization device. For example, microwaves, radio frequency (RF waves), radiation, ultraviolet rays, etc. can be used for plasma excitation.
また、第4図に示したように第3図の構成の一部を変更
して固定又は可変強度の磁石40をフィラメント34の
上部に配置してプラズマ状のイオンビームの偏向用に用
いても良い。磁石40の磁界強度は固定又は可変にし、
磁石の磁界はイオン流の走行方向にたいして交差する方
向にする。このようにしてCH3、CH4+イオン等の
所望するイオンに対して偏向角度θを得る。固定の場合
1
一方、質量がこれらのイオンと大きく異なるイオン例え
ば水素イオンはさらに大きく曲げられ、また中性粒子や
重質の多量体イオンは直進する。従って、直進方向にマ
スクを配置すれば結晶性の高いイオンのみが基板Sに付
着する。Alternatively, as shown in FIG. 4, a part of the configuration shown in FIG. 3 may be modified to place a fixed or variable strength magnet 40 above the filament 34 for use in deflecting a plasma-like ion beam. good. The magnetic field strength of the magnet 40 is fixed or variable,
The magnetic field of the magnet is set in a direction that intersects the traveling direction of the ion flow. In this way, the deflection angle θ is obtained for desired ions such as CH3 and CH4+ ions. Fixed Case 1 On the other hand, ions whose mass is significantly different from these ions, such as hydrogen ions, are bent even more, and neutral particles and heavy multimer ions travel straight. Therefore, if the mask is placed in the straight direction, only highly crystalline ions will adhere to the substrate S.
1鼠方迭
第3図の装置によって製膜方法を詳しく説明する。先ず
、チャンバー31内を10″6Torrまで高真空とし
、ガス供給通路37のバルブを操作して所定流量のメタ
ンガス、それと水素との混合ガス、或いはそれとAr、
He、Ne等のキャリアガス等を各供給口35から導入
しながら排気系38を調整して所定のガス圧例えば1゜
Torrとする。一方、複数の熱陰極フィラメント34
には交流電流Ifを流して加熱し、フィラメント34と
対陰極36の間には電位差Vdを印加して放電を形成す
る。供給口35から供給されたメタンガスは熱分解され
るとともにフィラメントからの熱電子と衝突してプラス
のイオンと電子を生じる。この電子は別の熱分解粒子と
衝突す2
る。電磁コイルの磁界による閉じ込め作用の下に、この
ような現象を繰り返すことによりメタンガスは熱分解物
質のプラスイオンと成る。1. The film forming method will be explained in detail using the apparatus shown in FIG. First, the inside of the chamber 31 is brought to a high vacuum of 10"6 Torr, and the valve of the gas supply passage 37 is operated to supply a predetermined flow rate of methane gas, a mixed gas of methane gas and hydrogen, or a mixture of methane gas and hydrogen, or methane gas and Ar gas.
While introducing a carrier gas such as He or Ne from each supply port 35, the exhaust system 38 is adjusted to a predetermined gas pressure of 1° Torr, for example. On the other hand, a plurality of hot cathode filaments 34
An alternating current If is passed through the filament 34 to heat it, and a potential difference Vd is applied between the filament 34 and the anticathode 36 to form a discharge. Methane gas supplied from the supply port 35 is thermally decomposed and collides with thermoelectrons from the filament to generate positive ions and electrons. This electron collides with another pyrolysis particle2. By repeating this phenomenon under the confinement effect of the magnetic field of the electromagnetic coil, methane gas becomes positive ions of thermally decomposed substances.
プラスイオンは電極32、グリッド36に印加された負
電位Vaにより引き寄せられ、ゆっくりと移動している
基体Sの方へ向けて加速され、基板に衝突して製膜反応
を行ない、ダイヤモンド様薄膜を形成する。所望により
、上に述べた固定磁石を利用して更に品質の良い薄膜を
得ることができる。The positive ions are attracted by the negative potential Va applied to the electrode 32 and the grid 36, are accelerated toward the slowly moving substrate S, and collide with the substrate to perform a film-forming reaction and form a diamond-like thin film. Form. If desired, even better quality thin films can be obtained using the fixed magnets described above.
なお、各部の電位、電流、温度等の条件については先に
引用した特許出願や特許公報のほか公知の資料を参照さ
れたい。For conditions such as potential, current, temperature, etc. of each part, please refer to the previously cited patent applications and patent publications as well as publicly known materials.
形成する膜の厚さは好ましくは100〜10.000人
であり、厚さが上記の範囲よりも薄いと耐摩耗性が減じ
又厚すぎても効果が増大せず製造時間が長くなる。The thickness of the film to be formed is preferably from 100 to 10,000. If the thickness is thinner than the above range, the abrasion resistance will be reduced, and if it is too thick, the effect will not be increased and the production time will be increased.
また、予め有機溶剤による超音波洗浄等によりダイヤモ
ンド様膜を形成する基体を清浄化しても良い。Further, the substrate on which the diamond-like film is to be formed may be cleaned in advance by ultrasonic cleaning using an organic solvent or the like.
次に本発明の詳細な説明する。Next, the present invention will be explained in detail.
11 テープガイド)
第1図に示したテープガイドを製作した。先ずテープガ
イドの基体Sとしてステンレス鋼により直径3mmの円
筒体を製作し、この基体を第3図に示し上に説明した製
膜装置に装入し、真空容器10内を1O−6Torrに
排気してからメタンガスを導入しガス圧を10−’To
rrとして熱陰極フィラメントに放電を起こさせた。電
磁コイル19の磁束密度は400ガウス、基板電圧30
0V、基板温度200℃とした。またフィラメント14
には電流25Aを流した。11 Tape Guide) The tape guide shown in Figure 1 was manufactured. First, a cylindrical body with a diameter of 3 mm was manufactured from stainless steel as the base body S of the tape guide, and this base body was loaded into the film forming apparatus shown in FIG. Then introduce methane gas and increase the gas pressure to 10-'To
A discharge was caused in the hot cathode filament as rr. The magnetic flux density of the electromagnetic coil 19 is 400 Gauss, and the substrate voltage is 30
The voltage was 0V and the substrate temperature was 200°C. Also filament 14
A current of 25 A was applied to the tube.
フィラメントはコイル状としその幅3mm、その周りを
取り囲む電極との隙間8mmとし、送り速度40 m
m / h rとした。The filament was coiled, its width was 3 mm, the gap between it and the surrounding electrode was 8 mm, and the feed rate was 40 m.
m/hr.
I f=175A、Va=30V、Vd=−30Vの条
件で、膜厚0.8μmのダイヤモンド様膜を有するテー
プガイドを得た。A tape guide having a diamond-like film with a thickness of 0.8 μm was obtained under the conditions of If=175A, Va=30V, and Vd=−30V.
上記のテープガイドのトルク、ドロップアウト、ビッカ
ース硬度を測定したところ表1の通りてあった。ただし
ビッカース硬度は加重Logでマイクロビッカース計で
測定した。トルク及びドロップアウトの測定は次の方法
により行なった。The torque, dropout, and Vickers hardness of the above tape guide were measured and were as shown in Table 1. However, the Vickers hardness was measured using a micro-Vickers meter using a weighted Log. Torque and dropout were measured by the following method.
1)トルクの測定
VHSテープで、高速で走行させ徐々に走行を低下させ
て、走行に必要な最低のトルクをトルクメーターにて測
定した。1) Measurement of Torque A VHS tape was run at high speed, the running speed was gradually reduced, and the minimum torque required for running was measured using a torque meter.
2)ドロップアウトの測定
VHSテープで実機にて録画6分、再生5分を実施し、
接続されたり、0.測定機で、幅15μsec、深さ1
6dB以上のり、O,信号を測定し、1分当りの平均で
個数として表わした。2) Measurement of dropout We recorded 6 minutes of VHS tape and played it for 5 minutes on the actual device.
Connected or 0. Width 15μsec, depth 1 with measuring machine
The signal at 6 dB or more was measured and expressed as the number of signals per minute on average.
5
表 1
6
ツキングトルクの振れ幅である。表面傷深さは1万回着
脱試験を行なった後の値を示す。ビッカース硬度は加重
10gで測定した。5 Table 1 6 This is the fluctuation range of the pulling torque. The surface flaw depth is the value after performing the attachment/detachment test 10,000 times. Vickers hardness was measured under a load of 10 g.
表2
第3図に示した装置を使用し第2図に示したディスクハ
ブを製作した。先ずディスクハブの形の基体をステンレ
ス鋼から製作し、この基体を第3図に示し上に説明した
製膜装置に装入し、実施例1と同一の条件で基体の表面
にダイヤモンド様薄膜を製膜した約0.5μmの膜厚に
成るまで行なった。緒特性の測定結果を表2に示す。Table 2 The disk hub shown in Fig. 2 was manufactured using the apparatus shown in Fig. 3. First, a disk hub-shaped substrate was manufactured from stainless steel, and this substrate was loaded into the film forming apparatus shown in FIG. 3 and explained above, and a diamond-like thin film was formed on the surface of the substrate under the same conditions as in Example 1. The process was continued until a film thickness of approximately 0.5 μm was obtained. Table 2 shows the measurement results of the mechanical characteristics.
なお、チャッキングトルクはディスク駆動ビンとの摺動
時に摩擦によって生じるトルクで1万回着脱試験を行な
った後の値を示す。振れ幅はチャ(作用効果)
本発明の摺動部材は磁気テープカセットの磁気テープ案
内部材、接触する磁気ヘッド面、光ディスク又は磁気デ
ィスク装置のディスクを支持する回転ハブ等に適用した
とき、摺動部材は、生産性良く、安価に耐摩擦性及び耐
摩耗性の良いダイヤモント様膜で被覆することができる
。Note that the chucking torque is the torque generated by friction when sliding with the disk drive bottle, and indicates the value after conducting an attachment/detachment test 10,000 times. The sliding member of the present invention has a sliding effect when applied to a magnetic tape guide member of a magnetic tape cassette, a contacting magnetic head surface, a rotating hub that supports an optical disk or a disk of a magnetic disk device, etc. The member can be coated with a diamond-like film having good abrasion and abrasion resistance at low cost and with good productivity.
第1図は、従来のテープガイドを具備した磁気テープカ
セットの分解斜視図、第2図は従来のディスクハブを備
えた磁気ディスクケースの分解斜視図、第3図は本発明
のダイヤモンド様薄膜の製造装置の一例を示す断面図、
及び第4図はダイヤモンド様薄膜の製造装置の他の例を
示す断面図である。FIG. 1 is an exploded perspective view of a magnetic tape cassette equipped with a conventional tape guide, FIG. 2 is an exploded perspective view of a magnetic disk case equipped with a conventional disk hub, and FIG. 3 is an exploded perspective view of a magnetic tape cassette equipped with a conventional tape guide. A sectional view showing an example of a manufacturing device,
and FIG. 4 is a sectional view showing another example of the apparatus for producing a diamond-like thin film.
Claims (6)
生装置に使用する摺動部材において、前記摺動部材の表
面部分が金属と、その表面に形成されたダイヤモンド様
被覆とより成ることを特徴とする記録再生用の摺動部材
。(1) In a member for mounting a recording/reproducing medium or a sliding member used in a recording/reproducing device, the surface portion of the sliding member is made of metal and a diamond-like coating formed on the surface. A sliding member for recording and playback.
プカセットであり、摺動部材が磁気テープ案内部材であ
る前記第1項記載の記録再生用の摺動部材。(2) The recording and reproducing sliding member according to item 1, wherein the member for mounting the recording and reproducing medium is a magnetic tape cassette, and the sliding member is a magnetic tape guide member.
材が磁気記録媒体と接触する磁気ヘッドの表面部である
前記第1項記載の記録再生用の摺動部材。(3) The sliding member for recording and reproducing according to the above item 1, wherein the recording and reproducing device is a magnetic recording and reproducing device, and the sliding member is a surface portion of a magnetic head that comes into contact with a magnetic recording medium.
ク又は磁気ディスクを収納したケースであり、摺動部材
が前記ディスクを支持する回転ハブである、前記第1項
記載の記録再生用の摺動部材。(4) The recording and reproducing slide according to item 1, wherein the member for mounting the recording and reproducing medium is a case housing an optical disk or a magnetic disk, and the sliding member is a rotating hub that supports the disk. moving parts.
り炭化水素を生成し得る原料ガスを導入し、これを熱及
び電界によりイオン化させてイオンビームを形成し、こ
れを摺動部材の表面部分の金属基体又はプラスチック基
体上に析出させてダイヤモンド様薄膜を形成させること
を特徴とする第1項記載の摺動部材の製造方法。(5) Introduce a hydrocarbon raw material gas or a raw material gas that can generate hydrocarbons through decomposition or reaction into a vacuum, ionize it using heat and an electric field to form an ion beam, and apply it to the surface of the sliding member. 2. The method for manufacturing a sliding member according to claim 1, characterized in that a diamond-like thin film is formed by depositing on a metal substrate or a plastic substrate.
の方向に対して直角な方向に偏向されることを特徴とす
る前記第5項記載の摺動部材の製造方法。(6) The method for manufacturing a sliding member according to item 5, wherein the ion beam is deflected by a deflecting magnetic field in a direction perpendicular to the original direction of the ion beam.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1145310A JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
JP10236602A JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1145310A JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10236602A Division JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0312886A true JPH0312886A (en) | 1991-01-21 |
JP2915001B2 JP2915001B2 (en) | 1999-07-05 |
Family
ID=15382198
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1145310A Expired - Fee Related JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
JP10236602A Pending JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10236602A Pending JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Country Status (1)
Country | Link |
---|---|
JP (2) | JP2915001B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0618573A1 (en) * | 1993-03-31 | 1994-10-05 | Daewoo Electronics Co., Ltd | Video cassette recorder with an improved head drum |
EP0700033A2 (en) * | 1994-08-26 | 1996-03-06 | Aiwa Co., Ltd. | Side-mounted thin film magnetic head and method of fabrication thereof |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004310943A (en) | 2003-04-09 | 2004-11-04 | Nitto Denko Corp | Sliding member |
JP6048829B2 (en) * | 2013-09-09 | 2016-12-21 | 日新イオン機器株式会社 | Ion source |
-
1989
- 1989-06-09 JP JP1145310A patent/JP2915001B2/en not_active Expired - Fee Related
-
1998
- 1998-08-10 JP JP10236602A patent/JPH11134838A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0618573A1 (en) * | 1993-03-31 | 1994-10-05 | Daewoo Electronics Co., Ltd | Video cassette recorder with an improved head drum |
EP0700033A2 (en) * | 1994-08-26 | 1996-03-06 | Aiwa Co., Ltd. | Side-mounted thin film magnetic head and method of fabrication thereof |
EP0700033A3 (en) * | 1994-08-26 | 1996-05-22 | Aiwa Co | Side-mounted thin film magnetic head and method of fabrication thereof |
US5777824A (en) * | 1994-08-26 | 1998-07-07 | Aiwa Research And Development, Inc. | Side-disposed thin film magnetic head and method of fabrication thereof |
Also Published As
Publication number | Publication date |
---|---|
JP2915001B2 (en) | 1999-07-05 |
JPH11134838A (en) | 1999-05-21 |
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