JPH03123582U - - Google Patents
Info
- Publication number
- JPH03123582U JPH03123582U JP3288090U JP3288090U JPH03123582U JP H03123582 U JPH03123582 U JP H03123582U JP 3288090 U JP3288090 U JP 3288090U JP 3288090 U JP3288090 U JP 3288090U JP H03123582 U JPH03123582 U JP H03123582U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- hole
- cleaning hole
- rotating support
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 210000000078 claw Anatomy 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3288090U JPH03123582U (enExample) | 1990-03-30 | 1990-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3288090U JPH03123582U (enExample) | 1990-03-30 | 1990-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03123582U true JPH03123582U (enExample) | 1991-12-16 |
Family
ID=31536124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3288090U Pending JPH03123582U (enExample) | 1990-03-30 | 1990-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03123582U (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5573234A (en) * | 1978-11-30 | 1980-06-02 | Shinwa Elec Works | Washing machine of frying pan*etc* |
| JPS62259447A (ja) * | 1986-05-02 | 1987-11-11 | Nec Kyushu Ltd | ブラシスクラバ−装置 |
| JPS63193529A (ja) * | 1987-02-06 | 1988-08-10 | Toshiba Corp | 半導体ウエハの洗浄乾燥装置 |
| JPH01238122A (ja) * | 1988-03-18 | 1989-09-22 | Nec Corp | 半導体製造装置 |
-
1990
- 1990-03-30 JP JP3288090U patent/JPH03123582U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5573234A (en) * | 1978-11-30 | 1980-06-02 | Shinwa Elec Works | Washing machine of frying pan*etc* |
| JPS62259447A (ja) * | 1986-05-02 | 1987-11-11 | Nec Kyushu Ltd | ブラシスクラバ−装置 |
| JPS63193529A (ja) * | 1987-02-06 | 1988-08-10 | Toshiba Corp | 半導体ウエハの洗浄乾燥装置 |
| JPH01238122A (ja) * | 1988-03-18 | 1989-09-22 | Nec Corp | 半導体製造装置 |