JPS63119236U - - Google Patents
Info
- Publication number
- JPS63119236U JPS63119236U JP989287U JP989287U JPS63119236U JP S63119236 U JPS63119236 U JP S63119236U JP 989287 U JP989287 U JP 989287U JP 989287 U JP989287 U JP 989287U JP S63119236 U JPS63119236 U JP S63119236U
- Authority
- JP
- Japan
- Prior art keywords
- insert
- cleaning hole
- brush
- claw
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 210000000078 claw Anatomy 0.000 claims description 2
Landscapes
- Cleaning In General (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP989287U JPS63119236U (enExample) | 1987-01-28 | 1987-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP989287U JPS63119236U (enExample) | 1987-01-28 | 1987-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63119236U true JPS63119236U (enExample) | 1988-08-02 |
Family
ID=30795638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP989287U Pending JPS63119236U (enExample) | 1987-01-28 | 1987-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63119236U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0547724A (ja) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | ウエーハのブラシ洗浄装置 |
-
1987
- 1987-01-28 JP JP989287U patent/JPS63119236U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0547724A (ja) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | ウエーハのブラシ洗浄装置 |