JPS63119236U - - Google Patents
Info
- Publication number
- JPS63119236U JPS63119236U JP989287U JP989287U JPS63119236U JP S63119236 U JPS63119236 U JP S63119236U JP 989287 U JP989287 U JP 989287U JP 989287 U JP989287 U JP 989287U JP S63119236 U JPS63119236 U JP S63119236U
- Authority
- JP
- Japan
- Prior art keywords
- insert
- cleaning hole
- brush
- claw
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 210000000078 claw Anatomy 0.000 claims description 2
Landscapes
- Cleaning In General (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
第１図は本考案に係る両面洗浄装置の一実施例
の一部を切欠いた正面図、第２図は要部斜視図、
第３図は従来装置の断面図である。
１……被洗浄物、１５……支持盤、１６……洗
浄孔、１７……つめ、１８……支持部材、１９…
…歯車部、２０……歯車、２１……モータ、２２
，２３……ブラシ、２４，２５……ブラシ。
FIG. 1 is a partially cutaway front view of an embodiment of the double-sided cleaning device according to the present invention, and FIG. 2 is a perspective view of the main parts.
FIG. 3 is a sectional view of a conventional device. DESCRIPTION OF SYMBOLS 1...Object to be cleaned, 15...Support plate, 16...Cleaning hole, 17...Claw, 18...Support member, 19...
... Gear part, 20 ... Gear, 21 ... Motor, 22
, 23... Brush, 24, 25... Brush.
Claims (1)
、洗浄孔１６の内周に被洗浄物１を支持する複数
個のつめ１７，１７，…を間隔をおいて突設し、
洗浄孔１６部分に、被洗浄物１の上下に加圧当接
するブラシ２２，２３を反つめ１７側のブラシ２
２側を加圧力大に設けたことを特徴とする両面洗
浄装置。 A cleaning hole 16 is provided in the center of the rotating support plate 15, and a plurality of claws 17, 17, .
Insert the brushes 22 and 23 that pressurize the top and bottom of the object 1 into the cleaning hole 16 part, and insert the brush 2 on the anti-claw 17 side.
A double-sided cleaning device characterized by having a large pressurizing force on the second side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP989287U JPS63119236U (en) | 1987-01-28 | 1987-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP989287U JPS63119236U (en) | 1987-01-28 | 1987-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63119236U true JPS63119236U (en) | 1988-08-02 |
Family
ID=30795638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP989287U Pending JPS63119236U (en) | 1987-01-28 | 1987-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63119236U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0547724A (en) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | Brush-cleaning apparatus for wafer |
-
1987
- 1987-01-28 JP JP989287U patent/JPS63119236U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0547724A (en) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | Brush-cleaning apparatus for wafer |