JPH0312172U

JPH0312172U -

Info

Publication number: JPH0312172U
Application number: JP7427889U
Authority: JP
Priority date: 1989-06-22
Filing date: 1989-06-22
Publication date: 1991-02-07
Anticipated expiration: 2004-06-22
Also published as: JPH0645259Y2

Description

[Brief explanation of the drawing]

第１図イ，ロはそれぞれ本考案の実施例１に適
用されるプローブを示す断面図及び平面図、第２
図は第１図のプローブをカード基板に取付けた状
態を示す斜視図、第３図は可動板の形状を示す斜
視図、第４図は調整ネジと可動板との接触状態を
示す説明図、第５図イ，ロはそれぞれ本考案の実
施例２に適用されるプローブを示す側面図及び平
面図、第６図は可動板の形状を示す斜視図、第７
図は偏心カムの外観図、第８図イ，ロはそれぞれ
本考案の実施例２に適用されるプローブを示す側
面図及び平面図、第９図イ，ロはそれぞれ可動板
の形状を示す側面図及び平面図、第１０図は雌螺
子部及び前後調整ネジとの螺合状態の外観を示す
説明図、第１１図はプローブカードの使用状態を
示す斜視図である。図中、１…プローブ、２…カード基板、４…触
針、９…固定台、１０…可動板、１１，１１′…
調整ネジ、１２…上アーム、１３…下アーム、１
４…垂直片、１６…スプリング、１８…切欠き溝
、１９…長円孔、２０…テーパー部、２８，２８
′…偏心調整カム、２９…丸穴、３１…左右調整
偏心カム、３２…前後調整ネジ。 1A and 1B are a sectional view and a plan view respectively showing a probe applied to Embodiment 1 of the present invention, and 2.
The figure is a perspective view showing the state in which the probe shown in Fig. 1 is attached to the card board, Fig. 3 is a perspective view showing the shape of the movable plate, and Fig. 4 is an explanatory view showing the state of contact between the adjustment screw and the movable plate. 5A and 5B are a side view and a plan view respectively showing the probe applied to the second embodiment of the present invention, FIG. 6 is a perspective view showing the shape of the movable plate, and FIG.
The figure is an external view of the eccentric cam, Figure 8 A and B are a side view and plan view, respectively, showing the probe applied to the second embodiment of the present invention, and Figure 9 A, B are side views showing the shape of the movable plate, respectively. FIG. 10 is an explanatory view showing the external appearance of the female threaded portion and the state in which it is screwed together with the longitudinal adjustment screw, and FIG. 11 is a perspective view showing the state in which the probe card is used. In the figure, 1...probe, 2...card board, 4...stylus, 9...fixed base, 10...movable plate, 11, 11'...
Adjustment screw, 12...upper arm, 13...lower arm, 1
4... Vertical piece, 16... Spring, 18... Notch groove, 19... Oval hole, 20... Taper part, 28, 28
'...Eccentric adjustment cam, 29...Round hole, 31...Right and left adjustment eccentric cam, 32...Back and forth adjustment screw.

Claims

[Scope of Claim for Utility Model Registration] 1. A card board equipped with a connector that can be attached to and detached from the tester, and a stylus at the tip held by the card board that protrudes from the card board so as to be able to contact a measurement terminal of an object to be measured. A probe card including at least one probe electrically connected to a connector on a board, wherein the probe includes a fixing base having a U-shaped cross section including an upper arm and a lower arm;
It is interposed between the lower arms and a stylus is attached to the tip.
The movable plate has tapered portions at appropriate locations and is resiliently biased toward one side in the longitudinal direction of the arm, and the peripheral edge of the tip can press the tapered portion of the movable plate within a plane parallel to the card board. and an adjustment screw attached to the upper arm, and the movable plate can be finely adjusted in a plane parallel to the card board by rotating the adjustment screw. 2. The probe is interposed between a fixed base having a U-shaped cross section including an upper arm and a lower arm, and a stylus attached to the tip, and an oblong hole and a base approximately in the center. It has a movable plate with a circular hole at its end and a protrusion near the periphery of the bottom, and the protrusion is loosely inserted into the oblong hole and the circular hole of the movable plate, respectively. 2. The probe card according to claim 1, further comprising an eccentric adjustment cam attached to said upper arm so that the movable plate can be moved in a plane parallel to the card board by eccentric movement. 3. The probe includes a fixing base having a U-shaped cross section, including an upper arm, a lower arm, and a vertical piece connecting the arms at their base ends, and a stylus interposed between the upper and lower arms, and a stylus attached to the tip. It has a movable plate with an oblong hole in its center and a protrusion near the periphery of the bottom, and the protrusion is inserted into the oval hole with a loose fit, and its eccentric movement causes so that the movable plate can be moved left and right in a plane parallel to the card board, the left-right adjustment eccentric cam attached to the upper arm is screwed into a female screw portion pivotally attached to the base end of the movable plate, and the female screw 2. The probe card according to claim 1, further comprising a longitudinal adjustment screw attached to said vertical piece so as to be movable back and forth in a plane parallel to the card board.