JPH03120032U - - Google Patents

Info

Publication number
JPH03120032U
JPH03120032U JP2872990U JP2872990U JPH03120032U JP H03120032 U JPH03120032 U JP H03120032U JP 2872990 U JP2872990 U JP 2872990U JP 2872990 U JP2872990 U JP 2872990U JP H03120032 U JPH03120032 U JP H03120032U
Authority
JP
Japan
Prior art keywords
cassette
wafer
end point
detection mechanism
point detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2872990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2872990U priority Critical patent/JPH03120032U/ja
Publication of JPH03120032U publication Critical patent/JPH03120032U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP2872990U 1990-03-20 1990-03-20 Pending JPH03120032U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2872990U JPH03120032U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-20 1990-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2872990U JPH03120032U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-20 1990-03-20

Publications (1)

Publication Number Publication Date
JPH03120032U true JPH03120032U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-10

Family

ID=31531518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2872990U Pending JPH03120032U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-20 1990-03-20

Country Status (1)

Country Link
JP (1) JPH03120032U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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