JPH03118986A - Laser beam marking apparatus - Google Patents

Abstract

PURPOSE:To enable imprint of the desired pattern to the desired position by selecting the optional pattern with a rotary mask and the optional reflecting angle with a rotary mirror and radiating beam. CONSTITUTION:The rotary mask 4 and rotary mirror 5 are rotated and when the optional mask 11 and the mirror 12 of the optional reflecting angle come to the irradiating position of beam 3, each mask 11 and mirror 12 are stopped with a controller 6. As the other way, the combination is preset and both may be rotated while corresponding with each other. At the time of projecting the beam 3 from a generator 1, the beam 3 through a reflecting mirror 2 for relaying passes through the optional mask 11 and is reflected with the optional mirror 12 and the desired pattern is imprinted to the desired position through a focus lens 7. Then, for difference of beam reflecting condition by the mirror of different reflecting angle, the beam is shifted in the wide range by changing the reflecting angle only a little. By this method, setting of the imprinting position is optionally executed and flexible imprint can be executed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the structure of an optical system unit of a laser marking device, and particularly to the structure of a mirror that reflects a beam.

[Summary of the Invention] The present invention is a laser marking device using a rotary mask, in which a rotary mirror equipped with a plurality of mirrors with different reflection angles is installed behind the rotary mask, and when a beam is shot, an arbitrary mask and an arbitrary reflection By combining angular mirrors using a controller, it is possible to stamp any pattern at any marking position [Prior art] Conventionally, this type of laser marking device was implemented as shown in Fig. 2 (α). As an example, a rotary mask 4 in which a plurality of masks 11 are arranged on the circumference is rotated, and when any mask 11 comes to the irradiation position of the beam 3, the laser oscillator 1 emits the beam 6, and the rotary mask 4 is fixed. Alternatively, the beam is reflected by IJ near movable mirrors 12 (2 to 4 mirrors) as shown in FIG. 2'(b), and stamped via a focus lens 7.

[Problems to be Solved by the Invention] However, although the conventional laser marking device described above can select and mark any marking pattern using a rotary mask, it is almost impossible to arbitrarily select the marking position (up to 4 positions). The disadvantage is that you can only select

SUMMARY OF THE INVENTION The present invention is intended to solve these problems, and an object of the present invention is to provide an optical system unit that can print an arbitrary seal pattern at an arbitrary position.

[Means for Solving the Problems] The laser marking device of the present invention includes a laser oscillator, a reflecting mirror that relays a beam from the laser oscillator, a mask on which a marking pattern is formed, and a rotary plate (combined with the mask) on which the mask is attached. A laser marking device M consists of a rotary mask (called a rotary mask), a controller, a mirror that reflects the beam that has passed through the mask, and a focus lens.
In this process, mirrors that reflect the beam after passing through the mask are mounted on a rotary plate at different reflection angles, and a controller is used to match the timing with the mask to imprint arbitrary characters at arbitrary reflection positions on the marking surface of semiconductor devices, etc. The present invention is characterized by having a rotary mirror for a laser marking device optical system unit.

[Function] According to the above configuration of the present invention, an arbitrary pattern can be imprinted on an arbitrary position by selecting an arbitrary pattern using a rotary mask, selecting an arbitrary reflection angle using a rotary mirror, and irradiating a beam.

[Embodiment] In the laser marking device of the present invention, an embodiment of the present invention is shown in FIG. ．． Rotary mask 4. Rotary mirror 5. It is configured to reach the focus lens 7 and the printed object 8 such as a semiconductor device in this order.

First, the rotary mask 4 and the rotary mirror 5 are rotated, and when an arbitrary mask 11 and a mirror 12 having an arbitrary reflection angle come to the irradiation position of the beam 3, the mask 11 and the mirror 12 are respectively stopped by the controller B. At this time, if the combination of the mask 11 and the mirror 12 is determined in advance and made to correspond as shown in FIG. 1(C), the rotation can be continued continuously without stopping. Next, when the beam 3 is emitted from the oscillator 1, the beam 5 passes through the relay reflecting mirror 2, passes through an arbitrary mass 11, is reflected by an arbitrary mirror 12, passes through the focus lens 7, and forms a desired pattern. Stamp it in the desired position. In the case of continuous rotation, if the timing is set and the beam 3 is emitted when any mask 11 and mirror 12 come to the irradiation position, a similar imprint can be made.

The difference in the beam reflection state depending on the mirror angle of reflection is as shown in Fig. 1<b>, and by just slightly changing the reflection angle, the beam can be spread over a wide range.

In addition to semiconductor devices, the marking material can be applied to all parts that can be laser processed, such as mechanical parts and electronic parts.

[Effects of the Invention] As described above, according to the present invention, by reflecting a laser beam in an arbitrary direction by a rotary mirror,
It has the following effects.

1) Since any reflection angle can be selected using the rotary mirror, the marking position can be set arbitrarily, allowing for flexible marking.

2) Since the beam can be swung over a wide range while keeping the object fixed, it is possible to imprint a wide area even when the object is positioned.

3) There is another method that uses a galvanometer mirror to spread the beam over a wide range, but the present invention has a simple structure and can be used at any angle by combining two mirrors like a galvanometer mirror. (Since there is a 1:1 correspondence between each mirror and the marking position, adjustment is easy and the device cost is low.

[Brief explanation of drawings]

FIG. 1(α) is an explanatory diagram showing an embodiment of the laser marking device of the present invention, FIG. 1(b) is a detailed diagram of the state of beam reflection by mirrors with different reflection angles in the embodiment of the present invention, Figure 1 (C) is a combination diagram of the rotary mask and rotary mirror according to the present invention, and Figures 2 (α) and (b)
FIG. 2 is an explanatory diagram showing a conventional example. In addition, in the figure (1... Laser oscillator 2... Relay reflection mirror 5...
...Laser beam 4...Rotary mask 5...Rotary mirror 6...Rotary mask controller 7... ...Focus lens 8...
...Printed item 9...Motor 10...Mirror 11...Mask 12...Mirror rotary for color

Claims (1)

[Claims] A laser oscillator, a reflecting mirror that relays the beam, a mask with a marking pattern formed on it, and a rotary plate on which the mask is attached (together with the mask, it is called a rotary mask).
In a laser marking device that consists of a controller, a mirror that reflects the beam that has passed through the mask, and a focus lens, multiple mirrors that reflect the beam that has passed through the mask are mounted on a rotary plate at different reflection angles, and the mask and timing are adjusted by the controller. Additionally, a laser marking device is characterized in that it stamps arbitrary characters at arbitrary reflection positions on a stamping surface of a semiconductor device or the like.