JPH03118778A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPH03118778A JPH03118778A JP1255707A JP25570789A JPH03118778A JP H03118778 A JPH03118778 A JP H03118778A JP 1255707 A JP1255707 A JP 1255707A JP 25570789 A JP25570789 A JP 25570789A JP H03118778 A JPH03118778 A JP H03118778A
- Authority
- JP
- Japan
- Prior art keywords
- sliding member
- rotor
- vibration
- ultrasonic motor
- longitudinal vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 claims abstract description 29
- 239000000835 fiber Substances 0.000 claims abstract description 28
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000000203 mixture Substances 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 239000011368 organic material Substances 0.000 claims abstract description 8
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 16
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 16
- 229920005989 resin Polymers 0.000 claims description 13
- 239000011347 resin Substances 0.000 claims description 13
- 239000005011 phenolic resin Substances 0.000 claims description 11
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 10
- 229920001568 phenolic resin Polymers 0.000 claims description 10
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 9
- 230000003746 surface roughness Effects 0.000 claims description 8
- CPSYWNLKRDURMG-UHFFFAOYSA-L hydron;manganese(2+);phosphate Chemical compound [Mn+2].OP([O-])([O-])=O CPSYWNLKRDURMG-UHFFFAOYSA-L 0.000 claims description 6
- ITRNXVSDJBHYNJ-UHFFFAOYSA-N tungsten disulfide Chemical compound S=[W]=S ITRNXVSDJBHYNJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000003822 epoxy resin Substances 0.000 claims description 5
- 229920000647 polyepoxide Polymers 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 4
- 239000004677 Nylon Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000010000 carbonizing Methods 0.000 claims description 3
- 229920001778 nylon Polymers 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims 2
- 238000005299 abrasion Methods 0.000 abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052799 carbon Inorganic materials 0.000 abstract description 7
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 230000002349 favourable effect Effects 0.000 abstract 1
- 238000005461 lubrication Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000001050 lubricating effect Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000000314 lubricant Substances 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- 229920006332 epoxy adhesive Polymers 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 229920002302 Nylon 6,6 Polymers 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- 244000292604 Salvia columbariae Species 0.000 description 2
- 235000012377 Salvia columbariae var. columbariae Nutrition 0.000 description 2
- 235000001498 Salvia hispanica Nutrition 0.000 description 2
- 229910001315 Tool steel Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 235000014167 chia Nutrition 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、定在波型の超音波振動を利用し、楕円運動に
より回転力を得る超音波モータに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ultrasonic motor that uses standing wave type ultrasonic vibration to obtain rotational force through elliptical motion.
［従来の技術］
一般に、超音波モータにおいては、第３図に示すように
、圧電体１に接着固定された金属体２と動体３との間に
、摺動部材（スライド材）３が設けられている。[Prior Art] Generally, in an ultrasonic motor, as shown in FIG. 3, a sliding member 3 is provided between a metal body 2 adhesively fixed to a piezoelectric body 1 and a moving body 3. It is being
従来、摺動部材３としては、例えば特開昭６２−２３３
７９号公報に開示されるように、有機高分子繊維よりな
るフェルトに熱硬化性樹脂を用いたものや、例えば特開
昭６２−５８８８７号公報に開示されるように、炭素繊
維と樹脂との複合材を用いたものが知られている。そし
て、前記有機高分子繊維としては、ポリアミド線維やフ
ェノール繊維やせラミック系の短繊維等の多種のものが
用いられている。また、摺動部材３として、ゴムや潤滑
油を用いることも提案されている。Conventionally, as the sliding member 3, for example, Japanese Patent Application Laid-Open No. 62-233
As disclosed in Japanese Patent Publication No. 79, there are felts made of organic polymer fibers using thermosetting resins, and as disclosed in Japanese Patent Application Laid-Open No. 62-58887, carbon fibers and resins are used. Those using composite materials are known. Various types of organic polymer fibers are used, such as polyamide fibers, phenol fibers, thin ramic short fibers, and the like. It has also been proposed to use rubber or lubricating oil as the sliding member 3.
［発明が解決しようとする課題］
しかし、従来の超音波モータでは、摺動部材３として完
璧なものを用いたものはなく、時間がある程度経過する
と、摩耗粉を発生する現象が起こっていた。これを防止
する手段として、強靭な繊維を含有させて耐摩耗性を向
上させたり、摺動性を助長させる微粉末を含有させたり
している。ところが、超音波モータで生じる摩耗形態は
複雑であり、単純な滑り摩擦で有効な摺動部材では役に
立たない。よって、強靭な繊維を含有させれば強度は向
上するが、決して摩耗に強（なるわけではない。同様に
、セラミックスにより摺動部材を形成した場合、強度が
上がりすぎて相手の部材を逆に摩耗させてしまっていた
。[Problems to be Solved by the Invention] However, none of the conventional ultrasonic motors uses a perfect sliding member 3, and after a certain period of time, abrasion powder is generated. As a means to prevent this, tough fibers are added to improve wear resistance, and fine powders are added to improve sliding properties. However, the form of wear that occurs in ultrasonic motors is complex, and a sliding member that is effective with simple sliding friction is useless. Therefore, if strong fibers are included, the strength will improve, but it will never become resistant to wear.Similarly, if a sliding member is made of ceramics, the strength will increase so much that it will cause the opposing member to reverse. I had worn it out.
また、従来から、摩耗粉の発生について、多種の摺動部
材の効果が提示されているが、どれも時間が経過すると
必ず摩耗粉が発生し、その粉の影響により摩耗が促進さ
れる現象が発生している。In addition, the effects of various types of sliding members on the generation of wear particles have been proposed, but all of them inevitably generate wear particles over time, and the phenomenon that wear is accelerated by the influence of this powder is a phenomenon. It has occurred.
すなわち、摩耗粉の発生の有無が超音波モータの寿命に
大きな影響を与えていた。In other words, the presence or absence of wear powder has a great influence on the life of the ultrasonic motor.
本発明は、かかる従来の問題点に鑑みてなされたもので
、長寿命で実用的な超音波モータを提供することを目的
とする。The present invention has been made in view of such conventional problems, and an object of the present invention is to provide a practical ultrasonic motor with a long life.
［課題を解決するための手段］
上記目的を達成するために、本発明は、縦振動を発生す
る圧電素子と、この縦振動を伝達する共振器と、伝達さ
れた縦振動を楕円運動に変換する振動片と、その楕円運
動により回転する回転子と、回転子と振動片との間の摩
耗を防ぐ摺動部材とを具備した超音波モータにおいて、
前記摺動部材を第１の摺動部材と第２の摺動部材とから
構成するとともに、振動片側に設けた第１の摺動部材を
、二硫化タングステンの微粉末を１８〜２２重量％およ
びフェノール樹脂の微粉末を１８〜２２重量％含有した
エポキシ樹脂を含浸させてなる厚さ５００μ−以下のア
ルミナ短繊維のペーパーにより形成し、回転子側に設け
た第２の摺動部材を、単一組成の有機材料を炭化処理し
てなる厚さ３００μｍ以下で表面粗さＲａ＝０．１μ歳
以下の非結晶のカーボン膜により形成した。[Means for Solving the Problems] In order to achieve the above object, the present invention includes a piezoelectric element that generates longitudinal vibration, a resonator that transmits the longitudinal vibration, and a piezoelectric element that converts the transmitted longitudinal vibration into elliptical motion. In an ultrasonic motor equipped with a vibrating piece that rotates, a rotor that rotates due to its elliptical motion, and a sliding member that prevents wear between the rotor and the vibrating piece,
The sliding member is composed of a first sliding member and a second sliding member, and the first sliding member provided on one side of the vibration is made of 18 to 22% by weight of fine powder of tungsten disulfide and The second sliding member, which is made of short alumina fiber paper with a thickness of 500 μm or less impregnated with epoxy resin containing 18 to 22% by weight of fine powder of phenolic resin, and provided on the rotor side, is An amorphous carbon film having a thickness of 300 μm or less and a surface roughness Ra of 0.1 μm or less was formed by carbonizing an organic material of one composition.
また、本発明は、超音波モータにおいて、摺動部材を第
１の摺動部材と第２の摺動部材とから構成するとともに
、振動片側に設けた第１の摺動部材を、二硫化モリブデ
ンの微粉末を１８〜２２重量％およびフェノール樹脂の
微粉末を１８〜２２重量％含有したナイロン樹脂を含浸
させてなる厚さ５００μ剛以下のアルミナ短繊維のペー
パーにより形成し、回転子側に設けた第２の摺動部材を
、回転子の端面をリン酸マンガン処理して二硫化モリブ
デンを漫積して形成した。Further, the present invention provides an ultrasonic motor in which the sliding member is composed of a first sliding member and a second sliding member, and the first sliding member provided on one side of the vibration is made of molybdenum disulfide. The paper is made of short alumina fibers with a thickness of 500μ or less, impregnated with nylon resin containing 18 to 22% by weight of fine powder of The second sliding member was formed by treating the end face of the rotor with manganese phosphate and depositing molybdenum disulfide.
さらに、本発明は、超音波モータにおいて、摺動部材を
第１の摺動部材と第２の摺動部材とから構成するととも
に、振動片側に設けた第１の摺動部材を、二硫化モリブ
デンの微粉末を１８〜２２重量％およびフェノール樹脂
の微粉末を１８〜２２重量％含有したフェノール樹脂を
含浸させてなる厚さ５００μ−以下のアルミナ短繊維の
ペーパーにより形成し、回転子側に設けた第２の摺動部
材を１回転子の端面をリン酸マンガン処理して二硫化モ
リブデンを浸種して形成した。Furthermore, the present invention provides an ultrasonic motor in which the sliding member is composed of a first sliding member and a second sliding member, and the first sliding member provided on one side of the vibration is made of molybdenum disulfide. The paper is made of short alumina fibers with a thickness of 500μ or less impregnated with a phenolic resin containing 18 to 22% by weight of fine powder of The second sliding member was formed by treating the end face of the first rotor with manganese phosphate and seeding with molybdenum disulfide.
また、超音波モータにおいて、摺動部材を第１の摺動部
材と第２の摺動部材とから構成するとともに、振動片側
に設けた第１の摺動部材を、セラミック系の短繊維を含
有してなるアルミニウムのコンポジット材により形成し
、回転子側に設けた第２の摺動部材を、単一組成の有機
材料を炭化処理してなる厚さ３００μ−以下で表面粗さ
Ｒａ＝０．１μ−以下の非結晶のカーボン膜により形成
した。In addition, in the ultrasonic motor, the sliding member is composed of a first sliding member and a second sliding member, and the first sliding member provided on one side of the vibration contains ceramic short fibers. The second sliding member provided on the rotor side is made of an aluminum composite material made of carbonized organic material of a single composition, has a thickness of 300 μm or less, and has a surface roughness Ra of 0. It was formed from an amorphous carbon film of 1 μm or less.
なお、本発明において、二硫化タングステン。In addition, in the present invention, tungsten disulfide.
二硫化モリブデンおよびフェノール樹脂の各微粉末の重
量比を１８〜２２重量％としたのは、１８％より少なく
すると、駆動中に温度が上昇して音が発生し、その後の
回転が不安定になって停止してしまうからである。また
、２２％より多くすると、アルミナ短繊維のペーパーの
強度が低下し、駆動（縦横の振動）に伴って破損を生じ
、これにより回転が不安定になって停止してしまうから
である。The reason why the weight ratio of each fine powder of molybdenum disulfide and phenolic resin is set to 18 to 22% by weight is because if it is less than 18%, the temperature will rise during operation, producing noise, and the subsequent rotation will become unstable. This is because it will stop. On the other hand, if it exceeds 22%, the strength of the alumina short fiber paper decreases, causing damage during driving (vertical and horizontal vibrations), which causes the rotation to become unstable and stop.
また、振動片側のアルミナ短繊維のペーパーの厚さや回
転子側のカーボン膜の厚さをそれぞれ限定したのは、こ
れらの厚さが厚いと、振動片から回転子へ振動が伝わる
うちに、振動が減衰してしまい、トルクの伝達が少なく
なってしまうからである。In addition, the reason why we limited the thickness of the alumina short fiber paper on one side of the vibration and the thickness of the carbon film on the rotor side is that if these thicknesses are thick, the vibration will be This is because the torque is attenuated, resulting in less torque transmission.
第１図は、本発明に係る超音波モータの概念図で、二つ
の共振器５の間には、電極板６と圧電素子７とが交互に
積層配置されている。また、一方の共振器５には、振動
片８が積層されており、この振動片８には１回転子９が
積層されている。そして、これら各構成部材は、固定ボ
ルト１０により締め付は固定されている。さらに、振動
片８と回転子９との間には、振動片８側に第１の摺動部
材１）が設けられ１回転子１２側に第２の摺動部材１２
が設けられている。ここに、摺動部材１）および１２は
、上述のような組み合わせで構成されている。FIG. 1 is a conceptual diagram of an ultrasonic motor according to the present invention. Between two resonators 5, electrode plates 6 and piezoelectric elements 7 are alternately stacked. Furthermore, a vibrating piece 8 is laminated on one of the resonators 5, and a single rotor 9 is laminated on this vibrating piece 8. Each of these constituent members is tightened and fixed by fixing bolts 10. Further, between the vibrating piece 8 and the rotor 9, a first sliding member 1) is provided on the vibrating piece 8 side, and a second sliding member 12 is provided on the first rotor 12 side.
is provided. Here, the sliding members 1) and 12 are constructed in the above-mentioned combination.
［作 用］
上記構成の本発明の超音波モータによれば、摩耗粉の発
生が極端に少ない。このため、摩耗粉による摩耗の促進
は起こらない。樹脂だけを摺動部材として用いた場合に
比べて、初期摩耗後、振動片８側の樹脂の接触面は光沢
状に光り、摩擦による潤滑境界層が形成される。潤滑境
界層が形成されると、摩耗粉の発生が止まり安定状態に
なる。[Function] According to the ultrasonic motor of the present invention having the above configuration, generation of wear powder is extremely small. Therefore, acceleration of wear due to wear particles does not occur. Compared to the case where only resin is used as a sliding member, after initial wear, the resin contact surface on the vibrating element 8 side becomes shiny and a lubricating boundary layer is formed due to friction. Once a lubricating boundary layer is formed, wear particles stop being generated and a stable state is reached.
また、含有されている摺動助長剤（二硫化タングステン
、二硫化モリブデン、フェノール）により、音の発生は
抑制される。本発明は、定在波の超音波振動を用いた超
音波モータのうち、特に回転子９に対する振動片８の接
触面積が非常に小さい場合に効果がある。Furthermore, the contained sliding promoters (tungsten disulfide, molybdenum disulfide, phenol) suppress the generation of noise. The present invention is particularly effective in ultrasonic motors that use ultrasonic vibrations of standing waves, especially when the contact area of the vibrating piece 8 with the rotor 9 is very small.
［実施例〕 （第１実施例） （構成） 本実施例の超音波モータにおける要部を第３図に示す。[Example〕 (First example) (composition) FIG. 3 shows the main parts of the ultrasonic motor of this embodiment.
振動片８側には、第１の摺動部材１）として、二硫化タ
ングステンの微粉末を２０重量％およびフェノール樹脂
の微粉末を２０重量％含有したエボキシ樹脂系接着剤を
含浸してなる、アルミナとシリカのセラミック微粉末を
含有したアルミナ短繊維のペーパーにチアス製、ファイ
ンフレックスペーパー）が接触部に接着形成され、熱硬
化後、研磨により厚さが５００μｍとなるように構成さ
れている。使用する接着剤は脱泡処理を行っており、摺
動部材ｌｌ内には空気の層が存在しない。The vibrating element 8 side is impregnated with an epoxy resin adhesive containing 20% by weight of fine tungsten disulfide powder and 20% by weight of fine powder of phenol resin as the first sliding member 1). A paper made of alumina short fibers containing fine ceramic powders of alumina and silica is bonded to the contact area with Chias (Fine Flex Paper), and after being heat-cured, it is polished to a thickness of 500 μm. The adhesive used has been subjected to a defoaming treatment, and there is no air layer within the sliding member 11.
一方、回転子９側には、第２の摺動部材１２として、単
一組成の有機材料を炭化処理した可撓性を有する厚さ３
００μｍ、表面粗さＲａ＝０．１μ閣の非結晶のカーボ
ン膜（日清紡製、アモルフヤス・カーボン）が低粘度の
エポキシ系接着剤により接触部に接着され、熱硬化され
ている。On the other hand, on the rotor 9 side, a second sliding member 12 is provided with a flexible thickness 3 made of carbonized organic material of a single composition.
An amorphous carbon film (Amorphous Carbon, manufactured by Nisshinbo Co., Ltd.) with a surface roughness Ra of 0.00 μm and a surface roughness Ra of 0.1 μm is adhered to the contact portion using a low-viscosity epoxy adhesive and is thermoset.
（作用）
振動片８側の第１の摺動部材１）において、樹脂を含浸
したアルミナ短繊維のペーパーに含まれている二硫化タ
ングステンの微粉末は、摺動を助長する役目をし、また
、フェノール樹脂の微粉末をエポキシ樹脂に対して２０
重量％含有したものは、音の発生を防止する働きがある
。摺動部材１）自身の強度は、アルミナ短繊維によって
保持され、初期摩耗後、接触面に光沢状の潤滑境界層が
形成される。さらに、アルミナ短繊維のペーパー中のア
ルミナとシリカのセラミック微粉末は、粒径が５０μ調
程度であり、樹脂に比べて減耗量が非常に少ない。初期
摩耗後、接触面に露出すると振動片８側の摺動部材１）
の減耗量は、セラミック微粉末の減耗量に規制されるた
め、耐摩耗性が向上する。(Function) In the first sliding member 1) on the vibrating element 8 side, the fine tungsten disulfide powder contained in the resin-impregnated alumina short fiber paper serves to promote sliding, and also , 20% fine powder of phenolic resin to epoxy resin
Those containing % by weight have the function of preventing the generation of sound. The strength of the sliding member 1) is maintained by short alumina fibers, and after initial wear, a glossy lubricating boundary layer is formed on the contact surface. Furthermore, the ceramic fine powder of alumina and silica in the alumina short fiber paper has a particle size of about 50 μm, and the amount of wastage is very small compared to resin. After initial wear, when exposed to the contact surface, the sliding member 1) on the vibrating element 8 side
Since the amount of wear is regulated by the amount of wear of the ceramic fine powder, the wear resistance is improved.
回転子９側の摺動部材１２である非結晶のカーボン膜は
、単一組成の有機材料を炭化処理して構成されており、
非常に強靭で、組織が緻密である。 また、ある程度の
可撓性を有するため、振動片８の形状に沿って変形し、
回転力を受けやすくする。さらに、カーボンであるため
、摺動性は良好で、耐摩耗性に優れている。The amorphous carbon film that is the sliding member 12 on the rotor 9 side is constructed by carbonizing an organic material of a single composition.
It is extremely strong and has a dense structure. In addition, since it has a certain degree of flexibility, it deforms along the shape of the vibrating piece 8,
Make it easier to receive rotational force. Furthermore, since it is made of carbon, it has good sliding properties and excellent wear resistance.
（効果）
樹脂だけの摺動部材に対して、非結晶のカーボン膜との
併用を行うと、初期摩耗後の耐摩耗性を向上させること
ができる。接触表面の表面粗さは非常に小さいため、摩
耗進行の原因となる摩耗粉の発生は抑えられ、音の発生
も皆無にすることが可能である。また、摺動部材１）お
よび１２は硬度が高いため、潤滑剤によるトルクの減少
を最小限に抑えることが可能である。(Effects) When a non-crystalline carbon film is used in conjunction with a sliding member made only of resin, the wear resistance after initial wear can be improved. Since the surface roughness of the contact surface is extremely small, the generation of abrasion powder that causes wear to progress is suppressed, and it is possible to completely eliminate the generation of noise. Furthermore, since the sliding members 1) and 12 have high hardness, it is possible to minimize the reduction in torque caused by the lubricant.
なお、本実施例の第２の摺動部材１２に代えて、回転子
９の接触面を鏡面に加工した後、窒化クロム処理を行っ
たものでも、本実施例と同様に、樹脂を含浸したアルミ
ナ短繊維のペーパーの接触面に潤滑境界層が形成され、
摩耗を防止することができる。Note that instead of the second sliding member 12 of this embodiment, the contact surface of the rotor 9 may be processed into a mirror surface and then treated with chromium nitride, but the second sliding member 12 may be impregnated with resin in the same manner as in this embodiment. A lubricating boundary layer is formed on the contact surface of the alumina short fiber paper,
Abrasion can be prevented.
（第２実施例）
（構成）
振動片８側には、第１の摺動部材１）として、二硫化モ
リブデンの微粉末を２０重量％およびフェノール樹脂の
微粉末を２０重量％含有したナイロン６６樹脂を含浸し
てなる、アルミナとシリカのセラミック微粉末を含有し
たアルミナ短繊維のペーパーにチアス製、ファインフレ
ックスペーパー）が接触部にエポキシ接着剤により接着
形成され、熱硬化後、研磨により厚さが５００μｍとな
るように構成されている。使用する接着剤は脱泡処理を
行っており、摺動部材ｌｌ内には空気の層が存在しない
。(Second Example) (Structure) On the vibrating element 8 side, as the first sliding member 1), nylon 66 containing 20% by weight of fine powder of molybdenum disulfide and 20% by weight of fine powder of phenolic resin is used. A short alumina fiber paper containing ceramic powder of alumina and silica impregnated with resin (made by Chias, Fine Flex Paper) is bonded to the contact area with epoxy adhesive, and after heat curing, the thickness is adjusted by polishing. is 500 μm. The adhesive used has been subjected to a defoaming treatment, and there is no air layer within the sliding member 11.
一方、回転子９は、合金工具鋼鋼材を熱処理した硬度１
（ｖ６５０以上の材質で形成され、接触部を鏡面に加工
した後、リン酸マンガン処理を深さ１０μｍ行い、二硫
化モリブデンを漫積して、第２の摺動部材１２が形成さ
れている。On the other hand, the rotor 9 is made of alloy tool steel with a hardness of 1
(The second sliding member 12 is formed of a material of V650 or higher, and after processing the contact portion to a mirror surface, a manganese phosphate treatment is performed to a depth of 10 μm, and molybdenum disulfide is deposited.
（作用）
第１実施例と同様に、樹脂を含浸したアルミナ短繊維の
ペーパーの接触面には、光沢状の潤滑境界層が形成され
る。また、回転子９に漫積されている二硫化モリブデン
により、摺動性がさらに助長される。(Function) As in the first embodiment, a glossy lubricating boundary layer is formed on the contact surface of the resin-impregnated alumina short fiber paper. Furthermore, the molybdenum disulfide deposited on the rotor 9 further promotes sliding properties.
（効果）
二硫化モリブデンの摺動性とともに、接触面は鏡面状態
に近いため、摩耗による傷が発生せず、摩耗粉の発生が
防止できる。エポキシ樹脂と同様に、ナイロン樹脂も接
触面に潤滑境界層が形成され、初期摩耗後は耐摩耗性が
向上し、摩耗がほとんど起こらな（なる。音の発生は二
硫化モリブデンによって抑えられ、安定した回転が得ら
れる。(Effects) In addition to the slidability of molybdenum disulfide, the contact surface is almost mirror-like, so scratches due to abrasion do not occur and generation of abrasion powder can be prevented. Similar to epoxy resin, nylon resin also forms a lubricating boundary layer on the contact surface, and after the initial wear, wear resistance improves and wear becomes almost non-existent.The generation of noise is suppressed by molybdenum disulfide, making it stable. rotation is obtained.
また、回転子９は接着作業がなく、比較的容易に製作す
ることできる。よって、大量生産に適し、コストも低く
することが可能である。Furthermore, the rotor 9 does not require any adhesive work and can be manufactured relatively easily. Therefore, it is suitable for mass production and can reduce costs.
なお、本実施例におけるナイロン６６樹脂の代わりに、
ナイロン６樹脂や熱硬化樹脂のフェノール樹脂を用いて
も、同様の効果を得ることができる。Note that instead of the nylon 66 resin in this example,
Similar effects can be obtained by using nylon 6 resin or a thermosetting phenolic resin.
（第３実施例）
（構成）
振動片８側には、アルミナの短繊維を含有したアルミニ
ウムのコンポジット材がろう付けにより接触部に形成さ
れ、その後研磨により、接触面を鏡面にするとともに、
厚さを５００μ閣にして第１の摺動部材１）が形成され
ている。(Third Example) (Structure) On the vibrating element 8 side, an aluminum composite material containing short alumina fibers is formed at the contact part by brazing, and then polished to make the contact surface mirror-finished.
The first sliding member 1) is formed with a thickness of 500 μm.
一方、回転子９側には、第２の摺動部材１２として、単
一組成の有機材料を炭化処理した可撓性を有する厚さ３
００μｌ、表面粗さＲａ＝０．１μｍの非結晶のカーボ
ン膜（日清紡製、アモルファス・カーボン）が低粘度の
エポキシ系接着剤により接触部に接着され、熱硬化され
ている。On the other hand, on the rotor 9 side, a second sliding member 12 is provided with a flexible thickness 3 made of carbonized organic material of a single composition.
An amorphous carbon film (manufactured by Nisshinbo Co., Ltd., Amorphous Carbon) having a volume of 0.00 μl and a surface roughness Ra of 0.1 μm was adhered to the contact portion using a low-viscosity epoxy adhesive and was thermoset.
（作用）
振動片８側の摺動部材１）は、振動片８と同材質であり
、接着ではなく、ろう付けによって結合されるため、振
動片８の先端の楕円振動を減衰させに（い。また、アル
ミナ短繊維によって摺動部材１）の強度は保持され、摩
耗しにくい。さらに、第１実施例と同様にカーボン膜を
使用するため、摺動性が向上する。(Function) The sliding member 1) on the vibrating piece 8 side is made of the same material as the vibrating piece 8, and is connected by brazing rather than gluing. Furthermore, the strength of the sliding member 1) is maintained by the alumina short fibers, making it less likely to wear out. Furthermore, since a carbon film is used as in the first embodiment, sliding properties are improved.
（効果）
楕円振動は強い状態を維持できるため、トルクの高い回
転を得ることができる。音の発生はカーボンによって減
少し、回転を安定にすることができる。(Effect) Since the elliptical vibration can maintain a strong state, rotation with high torque can be obtained. Carbon reduces noise generation and stabilizes rotation.
なお、カーボン膜の代わりに、合金工具鋼鋼材を熱処理
して硬度）１ｖ６５０以上の材質の接触部を鏡面に加工
した後、リン酸マンガン処理を深さ１０μ閣行い、二硫
化モリブデンを浸種したものを用いても、同様に耐摩耗
性が優れ、摺動性を良好にすることができる。In addition, instead of the carbon film, after heat-treating the alloy tool steel material and processing the contact part of the material with a hardness of 1v650 or more to a mirror surface, the manganese phosphate treatment was performed to a depth of 10 μm, and the material was soaked with molybdenum disulfide. Even if it is used, the abrasion resistance is similarly excellent and the slidability can be improved.
〔発明の効果］
本発明によれば、振動片と回転子との間の摺動部材の組
み合せを適切に配し、接触面に潤滑境界層を形成したり
、接触面を鏡面状態の潤滑面にすることで、初期摩耗後
の耐摩耗性を向上させることができ、摩耗粉の発生を極
力防止することで、摩耗の進行を抑えることができる。[Effects of the Invention] According to the present invention, the combination of sliding members between the vibrating element and the rotor is appropriately arranged to form a lubricant boundary layer on the contact surface, and to form a mirror-like lubricant surface on the contact surface. By doing so, the wear resistance after initial wear can be improved, and by preventing the generation of wear particles as much as possible, the progress of wear can be suppressed.
音の発生は潤滑剤によって防止され、安定した回転を維
持でき、長寿命を達成することができ、長寿命で実用的
な超音波モータとすることができる。The generation of sound is prevented by the lubricant, stable rotation can be maintained, and a long life can be achieved, making it possible to make a practical ultrasonic motor with a long life.
第１図は本発明に係る超音波モータの概略構成図、第２
図は本発明の第１実施例の超音波モータにおける要部を
示す斜視図、第３図は従来の超音波モータの要部を示す
縦断面図である。
５・・・共振器
６・・・電極板
７・・・圧電素子
８・・・振動片
９・・・回転子
１０・・・固定ボルト
１）・・・第１の摺動部材
１２・・・第２の摺動部材FIG. 1 is a schematic configuration diagram of an ultrasonic motor according to the present invention, and FIG.
The figure is a perspective view showing the main parts of the ultrasonic motor according to the first embodiment of the present invention, and FIG. 3 is a longitudinal sectional view showing the main parts of the conventional ultrasonic motor. 5... Resonator 6... Electrode plate 7... Piezoelectric element 8... Vibration piece 9... Rotor 10... Fixing bolt 1)... First sliding member 12...・Second sliding member
Claims (3)
する共振器と、伝達された縦振動を楕円運動に変換する
振動片と、その楕円運動により回転する回転子と、回転
子と振動片との間の摩耗を防ぐ摺動部材とを具備した超
音波モータにおいて、前記摺動部材を第１の摺動部材と
第２の摺動部材とから構成するとともに、振動片側に設
けた第１の摺動部材を、二硫化タングステンの微粉末を
１８〜２２重量％およびフェノール樹脂の微粉末を１８
〜２２重量％含有したエポキシ樹脂を含浸させてなる厚
さ５００μｍ以下のアルミナ短繊維のペーパーにより形
成し、回転子側に設けた第２の摺動部材を、単一組成の
有機材料を炭化処理してなる厚さ３００μｍ以下で表面
粗さＲａ＝０．１μｍ以下の非結晶のカーボン膜により
形成したことを特徴とする超音波モータ。(1) A piezoelectric element that generates longitudinal vibration, a resonator that transmits this longitudinal vibration, a vibrating piece that converts the transmitted longitudinal vibration into elliptical motion, a rotor that rotates due to the elliptic motion, and a rotor. In an ultrasonic motor equipped with a sliding member that prevents wear between the vibration piece and the vibration piece, the sliding member is composed of a first sliding member and a second sliding member, and the sliding member is provided on one side of the vibration. The first sliding member was made of 18 to 22% by weight of fine tungsten disulfide powder and 18% by weight of fine powder of phenolic resin.
The second sliding member, which is made of alumina short fiber paper with a thickness of 500 μm or less impregnated with epoxy resin containing ~22% by weight, and installed on the rotor side, is made of a single-composition organic material that is carbonized. An ultrasonic motor characterized in that it is formed of an amorphous carbon film having a thickness of 300 μm or less and a surface roughness Ra of 0.1 μm or less.
する共振器と、伝達された縦振動を楕円運動に変換する
振動片と、その楕円運動により回転する回転子と、回転
子と振動片との間の摩耗を防ぐ摺動部材とを具備した超
音波モータにおいて、前記摺動部材を第１の摺動部材と
第２の摺動部材とから構成するとともに、振動片側に設
けた第１の摺動部材を、二硫化モリブデンの微粉末を１
８〜２２重量％およびフェノール樹脂の微粉末を１８〜
２２重量％含有したナイロン樹脂を含浸させてなる厚さ
５００μｍ以下のアルミナ短繊維のペーパーにより形成
し、回転子側に設けた第２の摺動部材を、回転子の端面
をリン酸マンガン処理して二硫化モリブデンを浸積して
形成したことを特徴とする超音波モータ。(2) A piezoelectric element that generates longitudinal vibration, a resonator that transmits this longitudinal vibration, a vibrating piece that converts the transmitted longitudinal vibration into elliptical motion, a rotor that rotates due to the elliptical motion, and a rotor. In an ultrasonic motor equipped with a sliding member that prevents wear between the vibration piece and the vibration piece, the sliding member is composed of a first sliding member and a second sliding member, and the sliding member is provided on one side of the vibration. The first sliding member was coated with 1 portion of fine powder of molybdenum disulfide.
8-22% by weight and 18-22% fine powder of phenolic resin
The second sliding member is made of short alumina fiber paper impregnated with nylon resin containing 22% by weight and has a thickness of 500 μm or less, and is provided on the rotor side.The end face of the rotor is treated with manganese phosphate. An ultrasonic motor characterized in that it is formed by soaking molybdenum disulfide.
する共振器と、伝達された縦振動を楕円運動に変換する
振動片と、その楕円運動により回転する回転子と、回転
子と振動片との間の摩耗を防ぐ摺動部材とを具備した超
音波モータにおいて、前記摺動部材を第１の摺動部材と
第２の摺動部材とから構成するとともに、振動片側に設
けた第１の摺動部材を、二硫化モリブデンの微粉末を１
８〜２２重量％およびフェノール樹脂の微粉末を１８〜
２２重量％含有したフェノール樹脂を含浸させてなる厚
さ５００μｍ以下のアルミナ短繊維のペーパーにより形
成し、回転子側に設けた第２の摺動部材を、回転子の端
面をリン酸マンガン処理して二硫化モリブデンを浸積し
て形成したことを特徴とする超音波モータ。（４）縦振
動を発生する圧電素子と、この縦振動を伝達する共振器
と、伝達された縦振動を楕円運動に変換する振動片と、
その楕円運動により回転する回転子と、回転子と振動片
との間の摩耗を防ぐ摺動部材とを具備した超音波モータ
において、前記摺動部材を第１の摺動部材と第２の摺動
部材とから構成するとともに、振動片側に設けた第１の
摺動部材を、セラミック系の短繊維を含有してなるアル
ミニウムのコンポジット材により形成し、回転子側に設
けた第２の摺動部材を、単一組成の有機材料を炭化処理
してなる厚さ３００μｍ以下で表面粗さＲａ＝０．１μ
ｍ以下の非結晶のカーボン膜により形成したことを特徴
とする超音波モータ。(3) A piezoelectric element that generates longitudinal vibration, a resonator that transmits this longitudinal vibration, a vibrating piece that converts the transmitted longitudinal vibration into elliptical motion, a rotor that rotates by the elliptical motion, and a rotor. In an ultrasonic motor equipped with a sliding member that prevents wear between the vibration piece and the vibration piece, the sliding member is composed of a first sliding member and a second sliding member, and the sliding member is provided on one side of the vibration. The first sliding member was coated with 1 portion of fine powder of molybdenum disulfide.
8-22% by weight and 18-22% fine powder of phenolic resin
The second sliding member is made of short alumina fiber paper impregnated with phenolic resin containing 22% by weight and has a thickness of 500 μm or less, and is provided on the rotor side.The end face of the rotor is treated with manganese phosphate. An ultrasonic motor characterized in that it is formed by soaking molybdenum disulfide. (4) a piezoelectric element that generates longitudinal vibration, a resonator that transmits this longitudinal vibration, and a vibrating piece that converts the transmitted longitudinal vibration into elliptical motion;
In an ultrasonic motor equipped with a rotor that rotates by its elliptical motion and a sliding member that prevents wear between the rotor and the vibrating element, the sliding member is connected to a first sliding member and a second sliding member. A first sliding member provided on one side of the vibration is made of an aluminum composite material containing short ceramic fibers, and a second sliding member provided on the rotor side. The member is made by carbonizing an organic material of a single composition and has a thickness of 300 μm or less and a surface roughness Ra = 0.1 μm.
An ultrasonic motor characterized in that it is formed of an amorphous carbon film with a diameter of less than m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1255707A JP2774613B2 (en) | 1989-09-30 | 1989-09-30 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1255707A JP2774613B2 (en) | 1989-09-30 | 1989-09-30 | Ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03118778A true JPH03118778A (en) | 1991-05-21 |
| JP2774613B2 JP2774613B2 (en) | 1998-07-09 |
Family
ID=17282522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1255707A Expired - Lifetime JP2774613B2 (en) | 1989-09-30 | 1989-09-30 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2774613B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005269770A (en) * | 2004-03-18 | 2005-09-29 | Nikon Corp | Vibration wave motor and method for manufacturing the same |
| JP2008035685A (en) * | 2006-02-13 | 2008-02-14 | Nikon Corp | Motor, lens barrel, camera system, and manufacturing method of motor |
| JP2012191846A (en) * | 2012-04-25 | 2012-10-04 | Canon Inc | Friction member and vibration type drive device |
-
1989
- 1989-09-30 JP JP1255707A patent/JP2774613B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005269770A (en) * | 2004-03-18 | 2005-09-29 | Nikon Corp | Vibration wave motor and method for manufacturing the same |
| JP2008035685A (en) * | 2006-02-13 | 2008-02-14 | Nikon Corp | Motor, lens barrel, camera system, and manufacturing method of motor |
| JP2012191846A (en) * | 2012-04-25 | 2012-10-04 | Canon Inc | Friction member and vibration type drive device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2774613B2 (en) | 1998-07-09 |
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