JPH0311640A - Package for electronic component - Google Patents

Package for electronic component

Info

Publication number
JPH0311640A
JPH0311640A JP14578589A JP14578589A JPH0311640A JP H0311640 A JPH0311640 A JP H0311640A JP 14578589 A JP14578589 A JP 14578589A JP 14578589 A JP14578589 A JP 14578589A JP H0311640 A JPH0311640 A JP H0311640A
Authority
JP
Japan
Prior art keywords
stage
base
brazing
package
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14578589A
Other languages
Japanese (ja)
Inventor
Takaharu Miyamoto
隆春 宮本
Fumio Miyagawa
文雄 宮川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP14578589A priority Critical patent/JPH0311640A/en
Publication of JPH0311640A publication Critical patent/JPH0311640A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/3205Shape
    • H01L2224/32057Shape in side view
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8338Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/83385Shape, e.g. interlocking features
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/15165Monolayer substrate

Abstract

PURPOSE:To accurately braze a stage onto a base by a method wherein a recessed part into which the lower part of the stage can be fitted is formed on the surface of the base and a peripheral edge at an opening part of the recessed part is scraped and a brazing-material reservoir part is formed. CONSTITUTION:A recessed part 12 into which the lower part of a stage 16 can be fitted is formed on the surface of a base 10; a peripheral edge at an opening part of the recessed part 12 is scraped; a brazing-material reservoir part 14 is formed at the peripheral edge at the opening part. In a state that the lower part of the stage 16 has been fitted into the recessed part 12, the stage 16 is brazed onto the base 10. As a result, during this brazing operation, a brazing material 18 which is going to creep up to a circumferential side-face of the stage 16 is dropped to the brazing-material reservoir part 14 by an action of gravity to which the brazing material 18 is subjected or by an action of surface tension by which the brazing material 18 reserved inside the brazing- material reservoir part 14 is subjected. Thereby, the stage can be brazed accurately onto the base without applying the brazing material between the circumferential side-face of the stage and the surface or the base by drawing a meniscus shape.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、高周波半導体素子とその付属品などの複数の
電子部品をまとめて収容する電子部品用パッケージ(以
下、41にパッケージという)に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an electronic component package (hereinafter referred to as 41 package) that collectively accommodates a plurality of electronic components such as a high frequency semiconductor element and its accessories.

[従来の技術] 上記パッケージとして、従来より、コバール(Fe−N
i−Co合金)、銅などからなるパッケージのベース上
に、高周波半導体素子等のICチップと該チップ用の整
合回路を備えたサブキャリアとを、近接させた状態で、
実装するようにして用いるパッケージがある。
[Prior Art] Kovar (Fe-N) has conventionally been used as the above package.
An IC chip such as a high-frequency semiconductor element and a subcarrier equipped with a matching circuit for the chip are placed close to each other on the base of a package made of copper, etc. (i-Co alloy), copper, etc.
There is a package that can be used to implement it.

このパッケージにおいては、ICチップの熱放散性を高
めたり、ICチップとサブキャリアとの高さやその熱膨
張係数を一致させたりなどするために、ベース上に、C
u−W合金などの金属製のステージをろう付けして、そ
のステージ」二に上記ICチップを搭載している。
In this package, in order to improve the heat dissipation of the IC chip and to match the height and thermal expansion coefficient of the IC chip and subcarrier, a carbon
A metal stage made of u-w alloy or the like is brazed, and the above-mentioned IC chip is mounted on the stage.

[発明が解決しようとする課題] ところで、上記ステージをベース」二にろう付けした場
合は、ろう材がステージの周囲側面とベース表面とに亙
りメニスカス形状を描いて付着した状態となった。そし
て、ステージ近くのベース」二にサブキャリアを実装し
た場合に、上記メニスカス形状を描いて付着したステー
ジの周囲側面のろう材が邪魔をして、サブキャリアをス
テージに近接させてベース上に実装できなかった。
[Problems to be Solved by the Invention] By the way, when the stage was brazed to the base, the brazing material was adhered in a meniscus shape over the peripheral side surface of the stage and the surface of the base. When the subcarrier is mounted on the base 2 near the stage, the brazing metal on the side surface around the stage, which is attached in the meniscus shape described above, gets in the way, and the subcarrier is mounted close to the stage on the base. could not.

そのため、上記パッケージでは、そのベース上にICチ
ップとサブキャリアとを近接させた状態で高密度に実装
できなかったとともに、ICチップとサブキャリアとを
接続するワイヤが長くなって、ICチップとサブキャリ
アとの接続箇所における高周波信号の特性インピーダン
スのマツチングを良好に行えなかった。
Therefore, in the above package, the IC chip and the subcarrier could not be mounted on the base with high density in close proximity, and the wires connecting the IC chip and the subcarrier became long. It was not possible to satisfactorily match the characteristic impedance of the high frequency signal at the connection point with the carrier.

なお、上記難点を解消する目的で、従来より、ステージ
の周囲下端縁を面取りしたり、ステージの周囲側面にろ
う付は用のニッケルめっきなどのめっきを施さないよう
にしたりして、ステージの周囲側面にろう材が這い上が
るのを防ぐようにすることが行われている。
In order to solve the above-mentioned problems, conventional methods have been used, such as chamfering the lower edge of the stage periphery and not applying plating such as nickel plating for brazing on the side surfaces of the stage. Efforts are being made to prevent the filler metal from creeping up the sides.

しかしながら、そのようにしても、ろう材がステージの
周囲側面とベース表面との間にメニスカス形状を描いて
付着するのを完全に防止できなかった。
However, even with this method, it was not possible to completely prevent the brazing filler metal from adhering in a meniscus shape between the peripheral side surface of the stage and the base surface.

本発明は、かかる課題に鑑みてなされたもので、その目
的は、ろう材をステージの周囲側面とベース表面との間
にメニスカス形状を描いて付着させずに、ステージをベ
ース」二にろう付けすることを可能とするパッケージを
提供することにある。
The present invention has been made in view of such problems, and its purpose is to braze the stage to the base without causing the brazing metal to form a meniscus shape between the peripheral side surface of the stage and the base surface. Our goal is to provide a package that allows you to do this.

[課題を解決するための手段] 上記目的のために、本発明の第1のパッケージは、ベー
ス表面にステージの下部を嵌入可能な凹部を形成すると
ともに、その凹部の開口部周縁をえくってその開口部周
縁にろう材溜り部を形成して、その凹部に前記ステージ
の下部を嵌入した状態で、前記ステージを前記ベース」
二にろう付けしてなることを特徴としている。
[Means for Solving the Problems] For the above purpose, the first package of the present invention has a recess formed in the base surface into which the lower part of the stage can be inserted, and the periphery of the opening of the recess is hollowed out. A brazing material reservoir is formed around the opening, and with the lower part of the stage fitted into the recess, the stage is attached to the base.
It is characterized by being made by brazing the two parts.

またそれとともに、上記構成の第1のパッケージにおい
ては、凹部を、ステージの下部をベース上に動かぬよう
に嵌入可能な大きさに形成することを好適としている。
Additionally, in the first package having the above configuration, it is preferable that the recess is formed in a size that allows the lower part of the stage to be fitted onto the base without moving.

また、本発明の第2のパッケージは、ベース表面にリン
グ状をしたろう材溜り部用の溝を形成して、ステージを
、その周囲を前記溝上方に突出させた状態で、前記ベー
ス−ににろう付けしてなることを特徴としている。
Further, in the second package of the present invention, a ring-shaped groove for a brazing material reservoir is formed on the base surface, and the stage is attached to the base with the periphery thereof protruding above the groove. It is characterized by being made by brazing.

「作用1 上記構成の第1、第2のパッケージにおいては、ステー
ジをベース上にろう付けする際に、ステージの周囲側面
に這い上がろうとするろう材が、そのろう材が受ける重
力作用やベース表面の凹部の開口部周縁のろう材溜り部
内またはベース表面のリング状をしたろう材溜り部用の
溝内に溜ったろう材から受ける表面張力作用により、そ
の開口部周縁のろう材溜り部、またはリング状をしたろ
う材溜り部用の溝に落下して、ステージの周囲側面とベ
ース表面との間にろう材がメニスカス形状を描いて付着
することがない。
Effect 1 In the first and second packages with the above configuration, when the stage is brazed onto the base, the brazing material that tries to climb up the side surfaces around the stage is affected by the gravitational action on the brazing material and the base. Due to the surface tension effect from the brazing material accumulated in the brazing material reservoir around the opening of the recess on the surface or in the ring-shaped brazing material reservoir groove on the base surface, the brazing material reservoir around the opening, or The brazing material does not fall into the ring-shaped groove for the brazing material reservoir and adhere in a meniscus shape between the peripheral side surface of the stage and the base surface.

また、凹部を、ステージの下部をベース上に動かぬよう
に嵌入可能な大きさに形成した第1のパッケージにあっ
ては、その凹部にステージの下部を嵌入することにより
、ステージをベース上の所定位置に位置決めてきる。
In addition, in the first package in which the recess is formed to a size that allows the lower part of the stage to be inserted onto the base without moving, the lower part of the stage can be inserted into the recess to allow the stage to be placed on the base. It will be positioned at the specified position.

[実施例] 次に、本発明の実施例を図面に従い説明する。[Example] Next, embodiments of the present invention will be described with reference to the drawings.

第1図は本発明の第1のパッケージの好適な実施例を示
し、詳しくは、その一部拡大正面断面図を示す。以下、
この図中の実施例を説明する。
FIG. 1 shows a preferred embodiment of the first package of the present invention, and specifically shows a partially enlarged front sectional view thereof. below,
The embodiment shown in this figure will be explained.

図において、10は、パッケージの底部を形成しぞいる
コバール、銅などからなるベースである。
In the figure, 10 is a base made of Kovar, copper, etc. that forms the bottom of the package.

16は、Cu−W合金などからなる方形状をしたICチ
ップ22搭載用のステージである。
Reference numeral 16 denotes a rectangular stage made of Cu-W alloy or the like for mounting the IC chip 22.

上記ベース10表面には、上記ステージI6の下部を嵌
入可能な方形盲穴状をした凹部12を形成している。
A rectangular blind hole-shaped recess 12 into which the lower part of the stage I6 can be inserted is formed on the surface of the base 10.

またそれとともに、上記凹部12の上端開口部周縁を、
第1図に示したように凹部12内側に向けて斜め下方に
断面直線状にえぐって、その上端開口部周縁にろう材溜
り部14を形成している。
At the same time, the periphery of the upper end opening of the recess 12 is
As shown in FIG. 1, the recess 12 is hollowed out diagonally downward in a linear cross-section to form a brazing material reservoir 14 at the periphery of the upper opening.

なお、ろう材溜り部14は、」1記凹部12の−L端開
口部周縁を、第2図に示したように断面段差状にえぐっ
たり、第3図に示したように断面弧状にえくったりして
、形成しても良い。
The brazing material reservoir 14 is formed by hollowing out the periphery of the -L end opening of the recess 12 so that it has a stepped cross section as shown in FIG. 2, or an arcuate cross section as shown in FIG. You can also knead it and form it.

また、図のパッケージでは、ベース10表面の凹部12
を、ステージ16の下部をベース10上にその前後、左
右等に動かぬように嵌入可能な大きさに形成している。
In addition, in the illustrated package, the recess 12 on the surface of the base 10
is formed in a size that allows the lower part of the stage 16 to be fitted onto the base 10 without moving forward, backward, left or right, etc.

具体的には、」1記凹部12を、ステージ16の下部周
囲の全体を隙間なく嵌入可能な大きさに形成していて、
上記凹部12にステージ16の下部を嵌入することによ
り、ステージ16をベース10上の所定位置に動かぬよ
うに位置決めてきるようにしている。
Specifically, the recess 12 is formed to a size that allows the entire lower part of the stage 16 to be inserted thereinto without any gaps;
By fitting the lower part of the stage 16 into the recess 12, the stage 16 can be fixedly positioned at a predetermined position on the base 10.

なお、上記凹部12は、ステージ16の下部周囲の四方
の一部を隙間なく嵌入可能な大きさに形成して、その凹
部12にステージ16の下部を嵌入することにより、ス
テージI6をベース10上の所定位置に動かぬように位
置決めできるようにしても良い。
Note that the recess 12 is formed to a size that allows the stage 16 to fit into the four sides around the lower part without any gaps, and by fitting the lower part of the stage 16 into the recess 12, the stage I6 can be placed on the base 10. It may also be possible to position it in a predetermined position so as not to move.

そして、ステージ16の下部をベース10表面の凹部1
2に隙間なく嵌入して、ステージ16をベース101に
位置決めした状態で、−に記ろう材部り部14内からス
テージ16の下部周囲と凹部12内周面との間にろう材
18を充填することにより、ステージ16をベース10
上にろう付けしている。
Then, the lower part of the stage 16 is inserted into the recess 1 on the surface of the base 10.
2 without any gaps, and with the stage 16 positioned on the base 101, fill the space between the lower part of the stage 16 and the inner peripheral surface of the recess 12 from within the filler metal portion 14 indicated by -. By doing this, stage 16 becomes base 10
It is brazed on top.

第1図に示した第1のパンケージは以」−のように構成
していて、ステージ16をベース10」二にろう付けし
た際に、ろう材18がステージ16の周囲側面にメニス
カス形状を描いて這い上がることがない。
The first pancage shown in FIG. 1 is constructed as follows, and when the stage 16 is brazed to the base 10, the brazing filler metal 18 forms a meniscus shape on the side surface around the stage 16. I never crawl up.

第4図は上述実施例に類似する本発明の第1のパッケー
ジの好適な実施例を示し、詳しくは、その一部拡大正面
断面図を示す。以下、この図中の実施例を説明する。
FIG. 4 shows a preferred embodiment of the first package of the present invention similar to the embodiments described above, and in particular shows a partially enlarged front sectional view thereof. The embodiment shown in this figure will be described below.

図のパッケージでは、ベース10表面に形成した四部I
2の開口部周縁を、第4図に示したように、四部12内
底面に達する深さまで、凹部12内側に向けて斜め下方
に断面直線状に大きくえぐって、その開口部周縁にろう
材部り部14を形成している。
In the package shown in the figure, the four parts I formed on the surface of the base 10 are
As shown in FIG. 4, the periphery of the opening of No. 2 is hollowed out in a straight cross-section diagonally downward toward the inside of the recess 12 to a depth that reaches the inner bottom surface of the fourth part 12, and a brazing material portion is placed around the periphery of the opening. A curved portion 14 is formed.

なお、上記ろう材部り部14は、凹部12の開口部周縁
を、垂直下方に向けて断面直線状にえぐ7〜 ったり、凹部12内側に向けて断面弧状にえぐったりし
て、形成しても良い。
The brazing material portion 14 is formed by hollowing out the periphery of the opening of the recess 12 vertically downward to have a linear cross section, or by hollowing out an arcuate cross section toward the inside of the recess 12. It's okay.

そして、ベース10表面の凹部12を、その凹部にステ
ージ16の下部を嵌入した状態て、ステージ16の下部
周囲側面と凹部12内側面との間に隙間かあくように形
成していて、ベース10表面の凹部12を、ステージ位
置決め用の孔に兼用させずに、専らステージ16の周囲
側面にろう材18が這い」二がるのを防くろう材部り部
14用に形成している。
The recess 12 on the surface of the base 10 is formed so that when the lower part of the stage 16 is fitted into the recess, there is a gap between the lower peripheral side surface of the stage 16 and the inner surface of the recess 12. The recessed part 12 on the surface is not used also as a hole for positioning the stage, but is formed exclusively as a brazing filler metal part 14 to prevent the brazing filler metal 18 from creeping on the peripheral side surface of the stage 16.

その他の構成およびその作用は、既述実施例の第1のパ
ッケージと同様であり、その説明を省略する。
The other configurations and their functions are the same as those of the first package of the previously described embodiments, and their explanations will be omitted.

第5図は、本発明の第2のパッケージの好適な実施例を
示し、詳しくは、その一部拡大正面断面図を示す。以下
、この図中の実施例を説明する。
FIG. 5 shows a preferred embodiment of the second package of the present invention, and specifically shows a partially enlarged front sectional view thereof. The embodiment shown in this figure will be described below.

図のパッケージでは、方形状をしたステージ16周囲の
大きさに合わせて、ベース10表面に方形リング状をし
たろう材部り部用の溝20を形成している。
In the illustrated package, a rectangular ring-shaped groove 20 for the brazing material portion is formed on the surface of the base 10 in accordance with the size of the periphery of the rectangular stage 16.

ここで、図では、上記溝20の断面形状を弧状に形成し
ているが、その断面形状をコの字状やV字状などに形成
しても良い。
Here, in the figure, the cross-sectional shape of the groove 20 is formed into an arc shape, but the cross-sectional shape may be formed into a U-shape, a V-shape, or the like.

そして、ステージ16の周囲を」−記ベース表面の溝2
0上方に突出させた状態で、」1記方形リング状をした
溝20内から該溝に囲まれたベース10表面とステージ
16下面との間にろう材18を充填することにより、ス
テージ16を上記方形リング状をした溝20て囲まれた
ベース10」二にろう付けしている。
Then, around the stage 16, the groove 2 on the base surface is
The stage 16 is made by filling the space between the surface of the base 10 surrounded by the groove 20 and the lower surface of the stage 16 from within the rectangular ring-shaped groove 20 with the brazing material 18 protruding upward. The base 10, which is surrounded by the rectangular ring-shaped groove 20, is brazed to the second base.

第5図に示したパッケージは以上のように構成していて
、その作用は、既述実施例の第1のパッケージと同様で
あり、その説明を省略する。
The package shown in FIG. 5 is constructed as described above, and its operation is the same as that of the first package of the previously described embodiment, so a description thereof will be omitted.

U発明の効果1 以上説明したように、本発明の第1、第2のパッケージ
によれば、ろう材をステージの周囲側面とベース表面と
の間にメニスカス形状を描いて付着させずに、ステージ
をベース上にろう付けできる。
U Effect of the Invention 1 As explained above, according to the first and second packages of the present invention, the brazing filler metal is not attached to the stage in a meniscus shape between the peripheral side surface of the stage and the base surface. can be brazed onto the base.

そして、ICチップ等の電子部品を搭載したステージ近
くのベース」二に、整合回路を備えたサブキャリア等の
電子部品を、近接させた状態で、高密度に実装できると
ともに、その近接させた状態で実装した電子部品間を短
いワイヤで接続して、その両型子部品間の接続箇所にお
ける高周波信号の特性インピーダンスのマツチングを良
好に行える。
Second, electronic components such as subcarriers equipped with matching circuits can be mounted in close proximity to the base near the stage on which electronic components such as IC chips are mounted. By connecting the electronic components mounted with a short wire using a short wire, the characteristic impedance of the high frequency signal at the connection point between both mold components can be well matched.

また、凹部を、ステージの下部をベース上に動かぬよう
に嵌入可能な大きさに形成した第1のパッケージにあっ
ては、その四部にステージの下部を嵌入するだけで、ス
テージをベース上の所定位置に位置決めでき、ステージ
をベース上にろう付けする際のステージの位置決め作業
の容易化が図れる。
In addition, in the first package, where the recess is formed to a size that allows the lower part of the stage to be inserted onto the base without moving, the stage can be placed on the base by simply inserting the lower part of the stage into the four parts. The stage can be positioned at a predetermined position, and the work of positioning the stage when brazing the stage onto the base can be facilitated.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1の電子部品用パッケージの一部拡
大正面断面図、第2図と第3図はそれぞれ本発明の第1
の電子部品用パッケージのベースの凹部周辺の拡大正面
断面図、第4図は本発明の他の第1の電子部品用パッケ
ージの一部拡大正面断面図、第5図は本発明の第2の電
子部品用パッケージの一部拡大正面断面図である。 10・・ベース、  12・・・四部、14・・・ろう
材部り部、  16・・・ステージ、18・・・ろう材
、 20・・・溝。
FIG. 1 is a partially enlarged front sectional view of the first electronic component package of the present invention, and FIGS. 2 and 3 are respectively the first package of the present invention.
FIG. 4 is a partially enlarged front sectional view of another first electronic component package of the present invention, and FIG. FIG. 2 is a partially enlarged front sectional view of the electronic component package. DESCRIPTION OF SYMBOLS 10... Base, 12... Four parts, 14... Brazing metal part, 16... Stage, 18... Brazing metal, 20... Groove.

Claims (1)

【特許請求の範囲】 1、ベース表面にステージの下部を嵌入可能な凹部を形
成するとともに、その凹部の開口部周縁をえぐってその
開口部周縁にろう材溜り部を形成して、その凹部に前記
ステージの下部を嵌入した状態で、前記ステージを前記
ベース上にろう付けしてなる電子部品用パッケージ。 2、凹部を、ステージの下部をベース上に動かぬように
嵌入可能な大きさに形成した請求項1記載の電子部品用
パッケージ。 3、ベース表面にリング状をしたろう材溜り部用の溝を
形成して、ステージを、その周囲を前記溝上方に突出さ
せた状態で、前記ベース上にろう付けしてなる電子部品
用パッケージ。
[Claims] 1. A recess into which the lower part of the stage can be inserted is formed on the base surface, and the periphery of the opening of the recess is scooped out to form a brazing material reservoir at the periphery of the opening. An electronic component package, in which the stage is brazed onto the base with the lower part of the stage fitted. 2. The electronic component package according to claim 1, wherein the recess is formed in a size that allows the lower part of the stage to be fitted onto the base without moving. 3. An electronic component package in which a ring-shaped groove for a brazing material reservoir is formed on the base surface, and the stage is brazed onto the base with its periphery protruding above the groove. .
JP14578589A 1989-06-08 1989-06-08 Package for electronic component Pending JPH0311640A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14578589A JPH0311640A (en) 1989-06-08 1989-06-08 Package for electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14578589A JPH0311640A (en) 1989-06-08 1989-06-08 Package for electronic component

Publications (1)

Publication Number Publication Date
JPH0311640A true JPH0311640A (en) 1991-01-18

Family

ID=15393105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14578589A Pending JPH0311640A (en) 1989-06-08 1989-06-08 Package for electronic component

Country Status (1)

Country Link
JP (1) JPH0311640A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07201893A (en) * 1995-01-31 1995-08-04 Sony Corp Semiconductor device
CN105190855A (en) * 2013-03-13 2015-12-23 丰田自动车株式会社 Semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07201893A (en) * 1995-01-31 1995-08-04 Sony Corp Semiconductor device
CN105190855A (en) * 2013-03-13 2015-12-23 丰田自动车株式会社 Semiconductor device
JPWO2014141399A1 (en) * 2013-03-13 2017-02-16 トヨタ自動車株式会社 Semiconductor device
CN105190855B (en) * 2013-03-13 2017-09-19 丰田自动车株式会社 Semiconductor device

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