JPH03115835U - - Google Patents
Info
- Publication number
- JPH03115835U JPH03115835U JP2647990U JP2647990U JPH03115835U JP H03115835 U JPH03115835 U JP H03115835U JP 2647990 U JP2647990 U JP 2647990U JP 2647990 U JP2647990 U JP 2647990U JP H03115835 U JPH03115835 U JP H03115835U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- beam scanner
- jitter
- scanner motor
- set table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Mechanical Optical Scanning Systems (AREA)
Description
第１図は本考案に係るレーザビームスキヤナモ
ータのジツター計測に於けるワーク固定装置の実
施例説明図、第２図、第３図はそれぞれ従来例の
平面図及び側面図である。
１……レーザビームスキヤナモータ、２……ポ
リゴンミラー、３……ジツター計測用センサ、４
……センサ箱、５……スタンド、６……ワークセ
ツト台、７……凹所、８……真空チヤンバ、９…
…３ポート真空バルブ。
FIG. 1 is an explanatory diagram of an embodiment of a workpiece fixing device for jitter measurement of a laser beam scanner motor according to the present invention, and FIGS. 2 and 3 are a plan view and a side view of a conventional example, respectively. 1... Laser beam scanner motor, 2... Polygon mirror, 3... Jitter measurement sensor, 4
...Sensor box, 5...Stand, 6...Work set table, 7...Recess, 8...Vacuum chamber, 9...
...3 port vacuum valve.
Claims (1)
載置するワークセツト台と、 該ワークセツト台に載置されたレーザビームス
キヤナモータのポリゴンミラーにレーザビームを
照射するレーザ発振器と、 該レーザ発振器から出力されポリゴンミラー表
面で反射したレーザビームを受光することにより
電気的信号を発生するジツター計測用センサと、 該ジツター計測用センサの出力信号に基づいて
レーザビームスキヤナモータのジツター値を算出
するジツターアナライザと、 よりなるレーザビームスキヤナモータのジツター
計測装置において、 前記ワークセツト台の上面にレーザビームスキ
ヤナモータ載置用の凹所を設け、前記ワークセツ
ト台内部には真空チヤンバを前記凹所に連接し、
該真空チヤンバが３ポート真空バルブを介して真
空源に接続されてなることを特徴とするレーザビ
ームスキヤナモータのジツター計測に於けるワー
ク固定装置。[Scope of Claim for Utility Model Registration] A work set table on which a laser beam scanner motor, which is a test object, is placed, and a polygon mirror of the laser beam scanner motor placed on the work set table are irradiated with a laser beam. a laser oscillator; a jitter measurement sensor that generates an electrical signal by receiving a laser beam output from the laser oscillator and reflected on a polygon mirror surface; and a laser beam scanner based on the output signal of the jitter measurement sensor. A jitter analyzer for a laser beam scanner motor, comprising: a jitter analyzer for calculating a jitter value of a motor; and a recess for placing the laser beam scanner motor on the upper surface of the work set table; A vacuum chamber is connected to the recess inside,
A workpiece fixing device for measuring jitter of a laser beam scanner motor, characterized in that the vacuum chamber is connected to a vacuum source via a 3-port vacuum valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2647990U JPH03115835U (en) | 1990-03-14 | 1990-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2647990U JPH03115835U (en) | 1990-03-14 | 1990-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115835U true JPH03115835U (en) | 1991-12-02 |
Family
ID=31529367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2647990U Pending JPH03115835U (en) | 1990-03-14 | 1990-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115835U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009259222A (en) * | 2008-04-17 | 2009-11-05 | Hon Hai Precision Industry Co Ltd | Memory device |
| KR20150110423A (en) * | 2014-03-24 | 2015-10-02 | 타이코 일렉트로닉스 (상하이) 컴퍼니 리미티드 | Card connector |
-
1990
- 1990-03-14 JP JP2647990U patent/JPH03115835U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009259222A (en) * | 2008-04-17 | 2009-11-05 | Hon Hai Precision Industry Co Ltd | Memory device |
| KR20150110423A (en) * | 2014-03-24 | 2015-10-02 | 타이코 일렉트로닉스 (상하이) 컴퍼니 리미티드 | Card connector |
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