JPH03115659U - - Google Patents

Info

Publication number
JPH03115659U
JPH03115659U JP2202590U JP2202590U JPH03115659U JP H03115659 U JPH03115659 U JP H03115659U JP 2202590 U JP2202590 U JP 2202590U JP 2202590 U JP2202590 U JP 2202590U JP H03115659 U JPH03115659 U JP H03115659U
Authority
JP
Japan
Prior art keywords
annular
target
magnetic
annular target
sputtering device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2202590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0748666Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990022025U priority Critical patent/JPH0748666Y2/ja
Publication of JPH03115659U publication Critical patent/JPH03115659U/ja
Application granted granted Critical
Publication of JPH0748666Y2 publication Critical patent/JPH0748666Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990022025U 1990-03-05 1990-03-05 スパッタリング装置 Expired - Lifetime JPH0748666Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990022025U JPH0748666Y2 (ja) 1990-03-05 1990-03-05 スパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990022025U JPH0748666Y2 (ja) 1990-03-05 1990-03-05 スパッタリング装置

Publications (2)

Publication Number Publication Date
JPH03115659U true JPH03115659U (OSRAM) 1991-11-29
JPH0748666Y2 JPH0748666Y2 (ja) 1995-11-08

Family

ID=31525051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990022025U Expired - Lifetime JPH0748666Y2 (ja) 1990-03-05 1990-03-05 スパッタリング装置

Country Status (1)

Country Link
JP (1) JPH0748666Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010248562A (ja) * 2009-04-15 2010-11-04 Showa Shinku:Kk マグネトロンカソード
WO2023112155A1 (ja) * 2021-12-14 2023-06-22 日新電機株式会社 スパッタリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02194171A (ja) * 1989-01-20 1990-07-31 Ulvac Corp マグネトロンスパッタリング源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02194171A (ja) * 1989-01-20 1990-07-31 Ulvac Corp マグネトロンスパッタリング源

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010248562A (ja) * 2009-04-15 2010-11-04 Showa Shinku:Kk マグネトロンカソード
WO2023112155A1 (ja) * 2021-12-14 2023-06-22 日新電機株式会社 スパッタリング装置

Also Published As

Publication number Publication date
JPH0748666Y2 (ja) 1995-11-08

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term