JPH03115400U - - Google Patents
Info
- Publication number
- JPH03115400U JPH03115400U JP2440690U JP2440690U JPH03115400U JP H03115400 U JPH03115400 U JP H03115400U JP 2440690 U JP2440690 U JP 2440690U JP 2440690 U JP2440690 U JP 2440690U JP H03115400 U JPH03115400 U JP H03115400U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- holder
- holder body
- furnace wall
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2440690U JPH086237Y2 (ja) | 1990-03-13 | 1990-03-13 | 縦型環状炉の発熱体保持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2440690U JPH086237Y2 (ja) | 1990-03-13 | 1990-03-13 | 縦型環状炉の発熱体保持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03115400U true JPH03115400U (enrdf_load_stackoverflow) | 1991-11-28 |
| JPH086237Y2 JPH086237Y2 (ja) | 1996-02-21 |
Family
ID=31527370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2440690U Expired - Lifetime JPH086237Y2 (ja) | 1990-03-13 | 1990-03-13 | 縦型環状炉の発熱体保持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH086237Y2 (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1167424A (ja) * | 1997-08-20 | 1999-03-09 | Kokusai Electric Co Ltd | ヒータ支持装置 |
| KR20040003434A (ko) * | 2002-07-03 | 2004-01-13 | 조성호 | 전기로의 전열선용 애자 |
| JP2010238566A (ja) * | 2009-03-31 | 2010-10-21 | Hanagata:Kk | ヒートトンネル用加熱装置 |
| JP2014186833A (ja) * | 2013-03-22 | 2014-10-02 | Tokyo Electron Ltd | ヒータ装置及び熱処理装置 |
-
1990
- 1990-03-13 JP JP2440690U patent/JPH086237Y2/ja not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1167424A (ja) * | 1997-08-20 | 1999-03-09 | Kokusai Electric Co Ltd | ヒータ支持装置 |
| KR20040003434A (ko) * | 2002-07-03 | 2004-01-13 | 조성호 | 전기로의 전열선용 애자 |
| JP2010238566A (ja) * | 2009-03-31 | 2010-10-21 | Hanagata:Kk | ヒートトンネル用加熱装置 |
| JP2014186833A (ja) * | 2013-03-22 | 2014-10-02 | Tokyo Electron Ltd | ヒータ装置及び熱処理装置 |
| US9462637B2 (en) | 2013-03-22 | 2016-10-04 | Tokyo Electron Limited | Heater device and heat treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH086237Y2 (ja) | 1996-02-21 |