JPH03115400U - - Google Patents
Info
- Publication number
- JPH03115400U JPH03115400U JP2440690U JP2440690U JPH03115400U JP H03115400 U JPH03115400 U JP H03115400U JP 2440690 U JP2440690 U JP 2440690U JP 2440690 U JP2440690 U JP 2440690U JP H03115400 U JPH03115400 U JP H03115400U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- holder
- holder body
- furnace wall
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Description
第1図Aは本考案による発熱体保持具の一実施
例を示す平面図、第1図Bはこの側面図、第2図
Aは第1図の発熱体保持具を縦型環状炉の炉壁体
内面に組み込んだ状態を示す部分縦断面図、第2
図Bはこの部分横断面図、第3図は従来の縦型環
状炉の一例を示す概略断面図、第4図Aは第3図
の縦型環状炉で使用される発熱体保持具の拡大斜
視図、第4図Bは取付状態を示す概略図である。
10……発熱体保持具、11……保持具本体、
11a……貫通孔、12……凸部、13……凹部
、14……発熱体保持部、14a……先端部、1
5……炉壁体、15a……縦溝、16……電気抵
抗発熱体、17……補強部材、18……凹部。
FIG. 1A is a plan view showing an embodiment of the heating element holder according to the present invention, FIG. 1B is a side view of the heating element holder, and FIG. Partial vertical cross-sectional view showing the state incorporated into the inner surface of the wall, 2nd
Figure B is a partial cross-sectional view of this, Figure 3 is a schematic cross-sectional view showing an example of a conventional vertical ring furnace, and Figure 4A is an enlarged view of the heating element holder used in the vertical ring furnace shown in Figure 3. The perspective view and FIG. 4B are schematic diagrams showing the attached state. 10... Heating element holder, 11... Holder main body,
11a...Through hole, 12...Convex portion, 13...Concave portion, 14...Heating element holding portion, 14a...Tip portion, 1
5...Furnace wall body, 15a...Vertical groove, 16...Electric resistance heating element, 17...Reinforcement member, 18...Recessed portion.
Claims (1)
周面に沿つて螺旋状に配置された電気抵抗発熱体
を所定のピツチで保持する発熱体保持具において
、 ほぼ矩形の断面を有する耐熱性のブロツクから
形成されかつ炉壁体の内周面に備えられた縦溝内
に嵌挿される保持具本体と、保持具本体から突出
しかつ電気抵抗発熱体を支持する凹部を有する発
熱体保持部とからなり、保持具本体は、その上面
または下面に設けられた凸部と、隣接する他の保
持具本体の上面または下面に設けられた凸部に対
して垂直状態で嵌合し得る凹部とを有することを
特徴とする発熱体保持具。 (2) 発熱体保持部は、垂直方向に拡大された先
端部を有し、電気抵抗発熱体を支持する凹部は先
端部と保持具本体との間に形成された請求項(1)
に記載の発熱体保持具。 (3) 保持具本体は貫通孔を備え、炉壁体の内周
面に設けられた縦溝内に複数の発熱体保持具を垂
直に積み重ねた状態で保持具本体の貫通孔に細長
い補強部材を挿通したとき、垂直方向に隣接する
複数の発熱体保持具が更に安定して固定される請
求項(1)に記載の発熱体保持具。[Claims for Utility Model Registration] (1) A heating element that holds electric resistance heating elements spirally arranged along the inner peripheral surface of a furnace wall formed in the shape of a vertical hollow cylinder at a predetermined pitch. The holder includes a holder body formed from a heat-resistant block having a substantially rectangular cross section and fitted into a vertical groove provided on the inner circumferential surface of the furnace wall, and a holder body that protrudes from the holder body and generates electric resistance. The holder body has a convex part provided on the upper or lower surface thereof, and a convex part provided on the upper or lower surface of another adjacent holder body. A heating element holder characterized by having a recess that can be fitted vertically to the heating element holder. (2) Claim (1), wherein the heating element holding part has a vertically enlarged tip, and the recess for supporting the electrical resistance heating element is formed between the tip and the holder body.
The heating element holder described in . (3) The holder body is equipped with a through hole, and a plurality of heating element holders are stacked vertically in the vertical groove provided on the inner peripheral surface of the furnace wall, and a long and thin reinforcing member is inserted into the through hole of the holder body. The heating element holder according to claim 1, wherein when the heating element holder is inserted through the heating element holder, the plurality of vertically adjacent heating element holders are more stably fixed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2440690U JPH086237Y2 (en) | 1990-03-13 | 1990-03-13 | Heater holder for vertical annular furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2440690U JPH086237Y2 (en) | 1990-03-13 | 1990-03-13 | Heater holder for vertical annular furnace |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03115400U true JPH03115400U (en) | 1991-11-28 |
JPH086237Y2 JPH086237Y2 (en) | 1996-02-21 |
Family
ID=31527370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2440690U Expired - Lifetime JPH086237Y2 (en) | 1990-03-13 | 1990-03-13 | Heater holder for vertical annular furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH086237Y2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1167424A (en) * | 1997-08-20 | 1999-03-09 | Kokusai Electric Co Ltd | Heater support apparatus |
KR20040003434A (en) * | 2002-07-03 | 2004-01-13 | 조성호 | Insulation block for electric furnace heater |
JP2010238566A (en) * | 2009-03-31 | 2010-10-21 | Hanagata:Kk | Heating device for heat tunnel |
JP2014186833A (en) * | 2013-03-22 | 2014-10-02 | Tokyo Electron Ltd | Heater device and thermal treatment apparatus |
-
1990
- 1990-03-13 JP JP2440690U patent/JPH086237Y2/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1167424A (en) * | 1997-08-20 | 1999-03-09 | Kokusai Electric Co Ltd | Heater support apparatus |
KR20040003434A (en) * | 2002-07-03 | 2004-01-13 | 조성호 | Insulation block for electric furnace heater |
JP2010238566A (en) * | 2009-03-31 | 2010-10-21 | Hanagata:Kk | Heating device for heat tunnel |
JP2014186833A (en) * | 2013-03-22 | 2014-10-02 | Tokyo Electron Ltd | Heater device and thermal treatment apparatus |
US9462637B2 (en) | 2013-03-22 | 2016-10-04 | Tokyo Electron Limited | Heater device and heat treatment apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH086237Y2 (en) | 1996-02-21 |