JPH03113340U - - Google Patents
Info
- Publication number
- JPH03113340U JPH03113340U JP2302990U JP2302990U JPH03113340U JP H03113340 U JPH03113340 U JP H03113340U JP 2302990 U JP2302990 U JP 2302990U JP 2302990 U JP2302990 U JP 2302990U JP H03113340 U JPH03113340 U JP H03113340U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- conveyance rollers
- conveyance
- support surface
- rollers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 239000007769 metal material Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Rollers For Roller Conveyors For Transfer (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2302990U JPH03113340U (US07923587-20110412-C00022.png) | 1990-03-07 | 1990-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2302990U JPH03113340U (US07923587-20110412-C00022.png) | 1990-03-07 | 1990-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03113340U true JPH03113340U (US07923587-20110412-C00022.png) | 1991-11-19 |
Family
ID=31526031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2302990U Pending JPH03113340U (US07923587-20110412-C00022.png) | 1990-03-07 | 1990-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03113340U (US07923587-20110412-C00022.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003050600A1 (fr) * | 2001-12-13 | 2003-06-19 | Sumitomo Precision Products Co., Ltd | Systeme de traitement de substrat et dispositif de sechage de substrat |
| KR100814336B1 (ko) * | 2006-10-12 | 2008-03-18 | 한화테크엠주식회사 | 컨베이어의 롤러 샤프트 그라운드 장치 |
| JP2011029318A (ja) * | 2009-07-23 | 2011-02-10 | Tokyo Electron Ltd | 基板搬送装置 |
| WO2011121632A1 (ja) * | 2010-03-29 | 2011-10-06 | キヤノンアネルバ株式会社 | 搬送機構及びこれを用いた真空処理装置と電子デバイスの製造方法 |
-
1990
- 1990-03-07 JP JP2302990U patent/JPH03113340U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003050600A1 (fr) * | 2001-12-13 | 2003-06-19 | Sumitomo Precision Products Co., Ltd | Systeme de traitement de substrat et dispositif de sechage de substrat |
| KR100814336B1 (ko) * | 2006-10-12 | 2008-03-18 | 한화테크엠주식회사 | 컨베이어의 롤러 샤프트 그라운드 장치 |
| JP2011029318A (ja) * | 2009-07-23 | 2011-02-10 | Tokyo Electron Ltd | 基板搬送装置 |
| WO2011121632A1 (ja) * | 2010-03-29 | 2011-10-06 | キヤノンアネルバ株式会社 | 搬送機構及びこれを用いた真空処理装置と電子デバイスの製造方法 |
