JPH03112929U - - Google Patents
Info
- Publication number
- JPH03112929U JPH03112929U JP2098890U JP2098890U JPH03112929U JP H03112929 U JPH03112929 U JP H03112929U JP 2098890 U JP2098890 U JP 2098890U JP 2098890 U JP2098890 U JP 2098890U JP H03112929 U JPH03112929 U JP H03112929U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- developer tank
- developer
- liquid supply
- developing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098890U JPH03112929U (enExample) | 1990-03-01 | 1990-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098890U JPH03112929U (enExample) | 1990-03-01 | 1990-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03112929U true JPH03112929U (enExample) | 1991-11-19 |
Family
ID=31524067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2098890U Pending JPH03112929U (enExample) | 1990-03-01 | 1990-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03112929U (enExample) |
-
1990
- 1990-03-01 JP JP2098890U patent/JPH03112929U/ja active Pending
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