JPH03110834U - - Google Patents
Info
- Publication number
- JPH03110834U JPH03110834U JP2063690U JP2063690U JPH03110834U JP H03110834 U JPH03110834 U JP H03110834U JP 2063690 U JP2063690 U JP 2063690U JP 2063690 U JP2063690 U JP 2063690U JP H03110834 U JPH03110834 U JP H03110834U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- temperature
- cooling water
- silicon
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000498 cooling water Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2063690U JPH03110834U (fr) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2063690U JPH03110834U (fr) | 1990-02-28 | 1990-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110834U true JPH03110834U (fr) | 1991-11-13 |
Family
ID=31523723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2063690U Pending JPH03110834U (fr) | 1990-02-28 | 1990-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110834U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007161337A (ja) * | 2005-12-16 | 2007-06-28 | Suruga Co Ltd | 圧縮袋の排気バルブ |
-
1990
- 1990-02-28 JP JP2063690U patent/JPH03110834U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007161337A (ja) * | 2005-12-16 | 2007-06-28 | Suruga Co Ltd | 圧縮袋の排気バルブ |
| JP4635859B2 (ja) * | 2005-12-16 | 2011-02-23 | レック株式会社 | 圧縮袋の排気バルブ |