JPH03109157U - - Google Patents
Info
- Publication number
- JPH03109157U JPH03109157U JP1845390U JP1845390U JPH03109157U JP H03109157 U JPH03109157 U JP H03109157U JP 1845390 U JP1845390 U JP 1845390U JP 1845390 U JP1845390 U JP 1845390U JP H03109157 U JPH03109157 U JP H03109157U
- Authority
- JP
- Japan
- Prior art keywords
- pole pieces
- magnetic field
- flat portion
- field
- approximately
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010408 sweeping Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 241001417527 Pempheridae Species 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第１図は本考案の一実施例にかかる広視野磁場
掃引装置を用いたエリプソメータの概略構成の説
明図、第２図は第１図に示した装置に用いられる
ポールピースの説明図、第３図は第１図に示した
広視野磁場掃引装置の詳細構造を示す側面図、第
４図は第３図に示した広視野磁場掃引装置の上面
図、第５図は第３図に示した広視野磁場掃引装置
の−線上での横断面図、第６図〜第８図は第
１図に示したエリプソメータによるサンプルと広
視野磁場掃引装置の関係の説明図である。
１０……出光系、１２……サンプルステージ、
１４……受光系、２８……磁場掃引装置、４０…
…ポールピース。
FIG. 1 is an explanatory diagram of a schematic configuration of an ellipsometer using a wide-field magnetic field sweeping device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of a pole piece used in the device shown in FIG. 1, and FIG. The figure is a side view showing the detailed structure of the wide-field magnetic field sweeper shown in Figure 1, Figure 4 is a top view of the wide-field magnetic field sweeper shown in Figure 3, and Figure 5 is the same as shown in Figure 3. 6 to 8 are cross-sectional views taken along the - line of the wide-field magnetic field sweeping device, and are explanatory diagrams of the relationship between the wide-field magnetic field sweeping device and the sample obtained by the ellipsometer shown in FIG. 1. 10...Idemitsu system, 12...Sample stage,
14... Light receiving system, 28... Magnetic field sweep device, 40...
...Pole piece.
Claims (1)
平坦部の略中心部より背面に至る光導通孔と、前
記平坦部の略中心より側方に向つて形成された少
なくとも一の切欠溝と、を含むポールピースを一
対と、 前記ポールピース間を架橋し、コイルが巻回さ
れたヨークと、を備え、 前記各ポールピースの平坦部が対面配置される
ことを特徴とする広視野磁場掃引装置。 (2) 請求項１記載の装置において、対向する平
坦部の間に配置されたサンプルが、磁場に対しポ
ーラーカー配置とロンジイテユーデイナルカー配
置及びフアラデー配置を取り得ることを特徴とす
る広視野磁場掃引装置。[Claims for Utility Model Registration] (1) A flat portion formed with a narrowed tip, a light conducting hole extending from approximately the center of the front flat portion to the back surface, and a light conducting hole extending laterally from approximately the center of the flat portion. a pair of pole pieces including at least one notch groove formed by the pole pieces; a yoke bridging the pole pieces and around which a coil is wound; flat parts of the pole pieces facing each other; A wide-field magnetic field sweeping device characterized by: (2) The apparatus according to claim 1, wherein the sample placed between the opposing flat parts can take a polar car configuration, a longitudinal car configuration, and a Faraday configuration with respect to the magnetic field. Field of view magnetic field sweep device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990018453U JPH0810785Y2 (en) | 1990-02-26 | 1990-02-26 | Wide-field magnetic field sweep device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990018453U JPH0810785Y2 (en) | 1990-02-26 | 1990-02-26 | Wide-field magnetic field sweep device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109157U true JPH03109157U (en) | 1991-11-08 |
| JPH0810785Y2 JPH0810785Y2 (en) | 1996-03-29 |
Family
ID=31521609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990018453U Expired - Lifetime JPH0810785Y2 (en) | 1990-02-26 | 1990-02-26 | Wide-field magnetic field sweep device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810785Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55112545A (en) * | 1978-12-20 | 1980-08-30 | Hitachi Ltd | Spectroscopic analyzer utilizing magnetorotation |
| JPS60243539A (en) * | 1984-05-18 | 1985-12-03 | Nec Corp | Magnetooptic effect measuring device |
-
1990
- 1990-02-26 JP JP1990018453U patent/JPH0810785Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55112545A (en) * | 1978-12-20 | 1980-08-30 | Hitachi Ltd | Spectroscopic analyzer utilizing magnetorotation |
| JPS60243539A (en) * | 1984-05-18 | 1985-12-03 | Nec Corp | Magnetooptic effect measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0810785Y2 (en) | 1996-03-29 |
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