JPS6266157U - - Google Patents
Info
- Publication number
- JPS6266157U JPS6266157U JP15808285U JP15808285U JPS6266157U JP S6266157 U JPS6266157 U JP S6266157U JP 15808285 U JP15808285 U JP 15808285U JP 15808285 U JP15808285 U JP 15808285U JP S6266157 U JPS6266157 U JP S6266157U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- shunt
- mass spectrometer
- ion beam
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 230000004907 flux Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案の質量分析装置の磁極シヤント
の１実施例を示す図、第２図は第１図に示す磁極
シヤントの等価回路を示す図、第３図は磁場型質
量分析装置の磁極の平面図、第４図は第３図に示
す磁場型質量分析装置の磁極のＡ―Ａ断面図、第
５図は従来の磁極に用いられるシヤントの構成例
を示す図、第６図は第５図に示すシヤントの等価
回路を示す図である。
１と２は磁極本体、３と４は磁極片、５は分析
管、６はホール素子、７は取付支柱。
Fig. 1 is a diagram showing one embodiment of the magnetic pole shunt of the mass spectrometer of the present invention, Fig. 2 is a diagram showing an equivalent circuit of the magnetic pole shunt shown in Fig. 1, and Fig. 3 is a diagram showing the magnetic pole of the magnetic field type mass spectrometer. 4 is a cross-sectional view taken along line AA of the magnetic pole of the magnetic field type mass spectrometer shown in FIG. 3, FIG. 5 is a diagram showing an equivalent circuit of the shunt shown in FIG. 5; FIG. 1 and 2 are magnetic pole bodies, 3 and 4 are magnetic pole pieces, 5 is an analysis tube, 6 is a Hall element, and 7 is a mounting support.
Claims (1)
質量分析装置の磁極シヤントであつて、シヤント
を２個の磁極片に分割し且つイオンビームが通る
ほぼ中心の位置で磁束が通る方向と同じ垂直方向
に２個の磁極片の接触面を配置したことを特徴と
する質量分析装置の磁極シヤント。 A magnetic pole shunt in a mass spectrometer that provides a uniform magnetic field strength to the ion beam.The shunt is divided into two magnetic pole pieces, and the shunt is placed in the same perpendicular direction as the direction in which the magnetic flux passes, approximately at the center of the ion beam. A magnetic pole shunt for a mass spectrometer, characterized in that a contact surface of two magnetic pole pieces is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985158082U JPH0342620Y2 (en) | 1985-10-16 | 1985-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985158082U JPH0342620Y2 (en) | 1985-10-16 | 1985-10-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6266157U true JPS6266157U (en) | 1987-04-24 |
| JPH0342620Y2 JPH0342620Y2 (en) | 1991-09-06 |
Family
ID=31081233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985158082U Expired JPH0342620Y2 (en) | 1985-10-16 | 1985-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342620Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006156209A (en) * | 2004-11-30 | 2006-06-15 | Sumitomo Eaton Noba Kk | Ion beam/charged particle beam irradiator |
| JP2007516573A (en) * | 2003-05-15 | 2007-06-21 | アクセリス テクノロジーズ インコーポレーテッド | High analytical separation magnet for ribbon beam ion implanter. |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53134892U (en) * | 1977-03-31 | 1978-10-25 |
-
1985
- 1985-10-16 JP JP1985158082U patent/JPH0342620Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53134892U (en) * | 1977-03-31 | 1978-10-25 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007516573A (en) * | 2003-05-15 | 2007-06-21 | アクセリス テクノロジーズ インコーポレーテッド | High analytical separation magnet for ribbon beam ion implanter. |
| JP2006156209A (en) * | 2004-11-30 | 2006-06-15 | Sumitomo Eaton Noba Kk | Ion beam/charged particle beam irradiator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342620Y2 (en) | 1991-09-06 |
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