JPH03106736U - - Google Patents

Info

Publication number
JPH03106736U
JPH03106736U JP1581890U JP1581890U JPH03106736U JP H03106736 U JPH03106736 U JP H03106736U JP 1581890 U JP1581890 U JP 1581890U JP 1581890 U JP1581890 U JP 1581890U JP H03106736 U JPH03106736 U JP H03106736U
Authority
JP
Japan
Prior art keywords
waveguide
pressure
dielectric line
pressure detector
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1581890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1581890U priority Critical patent/JPH03106736U/ja
Publication of JPH03106736U publication Critical patent/JPH03106736U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1581890U 1990-02-19 1990-02-19 Pending JPH03106736U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1581890U JPH03106736U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-19 1990-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1581890U JPH03106736U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-19 1990-02-19

Publications (1)

Publication Number Publication Date
JPH03106736U true JPH03106736U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-05

Family

ID=31519108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1581890U Pending JPH03106736U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-19 1990-02-19

Country Status (1)

Country Link
JP (1) JPH03106736U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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