JPH0310672Y2 - - Google Patents
Info
- Publication number
- JPH0310672Y2 JPH0310672Y2 JP2700588U JP2700588U JPH0310672Y2 JP H0310672 Y2 JPH0310672 Y2 JP H0310672Y2 JP 2700588 U JP2700588 U JP 2700588U JP 2700588 U JP2700588 U JP 2700588U JP H0310672 Y2 JPH0310672 Y2 JP H0310672Y2
- Authority
- JP
- Japan
- Prior art keywords
- pusher
- boat
- wafers
- holder
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 112
- 239000004065 semiconductor Substances 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 18
- 230000003028 elevating effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000011295 pitch Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700588U JPH0310672Y2 (US20030204162A1-20031030-M00001.png) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700588U JPH0310672Y2 (US20030204162A1-20031030-M00001.png) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130539U JPH01130539U (US20030204162A1-20031030-M00001.png) | 1989-09-05 |
| JPH0310672Y2 true JPH0310672Y2 (US20030204162A1-20031030-M00001.png) | 1991-03-15 |
Family
ID=31249135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2700588U Expired JPH0310672Y2 (US20030204162A1-20031030-M00001.png) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0310672Y2 (US20030204162A1-20031030-M00001.png) |
-
1988
- 1988-02-29 JP JP2700588U patent/JPH0310672Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01130539U (US20030204162A1-20031030-M00001.png) | 1989-09-05 |
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