JPH03105741A - Substrate for magneto-optical recording medium - Google Patents
Substrate for magneto-optical recording mediumInfo
- Publication number
- JPH03105741A JPH03105741A JP24180389A JP24180389A JPH03105741A JP H03105741 A JPH03105741 A JP H03105741A JP 24180389 A JP24180389 A JP 24180389A JP 24180389 A JP24180389 A JP 24180389A JP H03105741 A JPH03105741 A JP H03105741A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- aluminum
- soft magnetic
- magneto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 28
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000000696 magnetic material Substances 0.000 claims abstract description 7
- 230000005415 magnetization Effects 0.000 claims abstract description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 6
- 239000010410 layer Substances 0.000 abstract description 34
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 238000005070 sampling Methods 0.000 abstract description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract description 2
- 238000005498 polishing Methods 0.000 abstract description 2
- 239000011241 protective layer Substances 0.000 abstract description 2
- 239000011347 resin Substances 0.000 abstract description 2
- 229920005989 resin Polymers 0.000 abstract description 2
- 235000010210 aluminium Nutrition 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 239000011521 glass Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概 要〕
光磁気記録媒体用アルミニウム基板に関し、ガラス基板
に代えて安価で割れ難いアルミニウム又は合金基板を用
いるために、Ｃ／Ｎの向上を図ることを目的とし、
グルーブを形戊した層又はサンプリングサーボ用ビット
を形威した層の下又は表面に磁化の方向が面内方向であ
る軟磁性体の層を設けるように構或する。[Detailed Description of the Invention] [Summary] The purpose of this invention is to improve the C/N in order to use an inexpensive and hard-to-break aluminum or alloy substrate instead of a glass substrate with respect to an aluminum substrate for magneto-optical recording media. A layer of soft magnetic material whose magnetization direction is in-plane is provided below or on the surface of the layer in which the groove is formed or the layer in which the sampling servo bit is formed.
本発明は光磁気記録用アルミニウム（アルミニウム合金
を含む）基板に係る。The present invention relates to an aluminum (including aluminum alloy) substrate for magneto-optical recording.
光磁気ディスクは希土類（ＲＥ）一遷移金属（ＴＭ）非
品質合金を記録材料としてレーザ光などにより情報の記
録再生を行なうものが、磁気ディスクの次世代を担うも
のとして期待され、盛んに研究開発が進められている。Magneto-optical disks, which use non-quality rare earth (RE)-transition metal (TM) alloys as recording materials and record and reproduce information using laser beams, are expected to be the next generation of magnetic disks and are actively being researched and developed. is in progress.
ところで、このような光磁気ディスク用の基板としては
専らガラスが用いられている。Incidentally, glass is exclusively used as a substrate for such magneto-optical disks.
ガラスは光磁気ディスク用基板材料として優れたもので
あるが、割れ易いという欠点がある。そこで、ガラス基
板に代る安価で割れない基板としてアルミニウム基板の
使用が検討されている。ところが、アルミニウム基板を
用いて光変調記録を行なう場合は問題ないのだが、磁界
変調記録を行なうとＣ／Ｎが劣るという問題がある。Although glass is an excellent substrate material for magneto-optical disks, it has the disadvantage of being easily broken. Therefore, the use of aluminum substrates as an inexpensive and unbreakable substrate to replace glass substrates is being considered. However, although there is no problem when performing optical modulation recording using an aluminum substrate, there is a problem that the C/N is inferior when performing magnetic field modulation recording.
そこで、本発明は、Ｃ／Ｎの改善を図ってアルミニウム
基板を磁界変調記録でも用いることができるようにする
ことを目的とする。Therefore, an object of the present invention is to improve the C/N so that an aluminum substrate can be used for magnetic field modulation recording.
本発明は、上記目的を達戒するために、グルーブを形戊
した層またはサンプルサーボ用のピットを形戊した層と
アルミニウム又はアルミニウム合金板との間に、磁化の
方向が面内方向である軟磁性体の層を設けたことを特徴
とする光磁気記録媒体用基板を提供する。また、同様に
、本発明によれば、アルミニウム又はアルミニウム合金
板上のグルーブを形成した層またはサンプルサーボ用の
ピットを形戒した層の表面に磁化の方向が面内方向であ
る軟磁性体の層を設けたことを特徴とする光磁気記録媒
体用基板が提供される。In order to achieve the above object, the present invention provides a structure in which the direction of magnetization is in the in-plane direction between the groove-shaped layer or the sample servo pit-shaped layer and the aluminum or aluminum alloy plate. A substrate for a magneto-optical recording medium is provided, the substrate being provided with a layer of soft magnetic material. Similarly, according to the present invention, a soft magnetic material whose magnetization direction is in-plane is formed on the surface of a layer formed with grooves or a layer formed with pits for sample servo on an aluminum or aluminum alloy plate. A magneto-optical recording medium substrate characterized in that it is provided with a layer is provided.
軟磁性体層の厚さは、グルーブ層又はサンプルサーボ用
ビット層の下に形戒する場合には１００ｎｍ〜１Ｊｓ程
度、グルーブ層又はサンプルサーボ用ピット層の表面に
形成する場合には１００ｎｍ〜２００ｎｍ程度がよい。The thickness of the soft magnetic layer is approximately 100 nm to 1 Js when formed under the groove layer or sample servo bit layer, and 100 nm to 200 nm when formed on the surface of the groove layer or sample servo pit layer. Good condition.
光磁気記録のために磁界を変調する際にアルミニウム基
板内に発生する渦電流を防止するには軟磁性層の材質に
も依存するが１００ｎｍ程度の厚さが必要であり、製造
上ＩＪｓ以上は実際的ではなく、またグルーブ層やサン
プルサーボ用ビット層の表面に形成する場合にはグルー
ブ又はピットの凹凸が表面に出ている必要があるので２
００ｎｍ以下にすることが望ましい。In order to prevent eddy currents generated in the aluminum substrate when modulating the magnetic field for magneto-optical recording, a thickness of about 100 nm is required, although it depends on the material of the soft magnetic layer. It is not practical, and if it is formed on the surface of the groove layer or sample servo bit layer, the grooves or pits must have unevenness on the surface.
It is desirable that the thickness be 00 nm or less.
軟磁性材料としては、特に限定されないがＮｉＦｅ，Ｍ
ｏＮｉＦｅ ， ＣｕＭｏＮｉＦｅなどを用いることが
できる。Examples of soft magnetic materials include, but are not limited to, NiFe, M
oNiFe, CuMoNiFe, etc. can be used.
磁界を変調する際にＡｆ基板内に発生する渦電流がＣ／
Ｎ低下の原因ではないかと考え、Ａｆ基板の表面に面内
方向に磁化した軟磁性体膜をつけた。これにより、磁場
の侵入が防がれてＣ／Ｎが向上したものと考えられる。The eddy current generated in the Af substrate when modulating the magnetic field is C/
Thinking that this may be the cause of the decrease in N, a soft magnetic film magnetized in the in-plane direction was attached to the surface of the Af substrate. It is thought that this prevents the penetration of the magnetic field and improves the C/N.
実施例１〜３
第１図に実施例のアルミニウム基板を示す。直径１３０
ｍｍ，厚さ１．９帥のアルミニウム（Ａ １ −９６％
、Ｍｇ ４％〉製円板ｌの表面を研摩後、軟磁性体層２
としてＮｉｃｅ （実施例１ ） 、ＭｏＮｉＦｅ （
実施例２ ） 、ＣｕＭｏＮｉＦｅ （実施例３〉をス
パッタで２００ｎｍの厚さに製膜し、次いでトラッキン
グ用グルーブ層（厚さ５０ｊ！ｍ）３を形威した。その
上に、第２図に示す如く、Ｔｂ−Ｓｔｅ２誘電体層（厚
さ１００ｎｍ） ４、ＴｂＦｅＣｏ記録層（厚さｌ００
ｎｍ） ５、Ｔｂ−Ｓｔｏｗ誘電体層（厚さｌＱＱｎｍ
） ６をそれぞれスパッタ製膜した後、さらに樹脂保護
層（厚さ５０μ）７を形威した。Examples 1 to 3 FIG. 1 shows aluminum substrates of Examples. Diameter 130
mm, 1.9 mm thick aluminum (A 1 -96%
, Mg 4%> After polishing the surface of the disk l, the soft magnetic layer 2
Nice (Example 1), MoNiFe (
Example 2), CuMoNiFe (Example 3) was formed into a film with a thickness of 200 nm by sputtering, and then a tracking groove layer (thickness: 50 m!) 3 was formed. 4. Tb-Ste2 dielectric layer (thickness 100 nm) 4. TbFeCo recording layer (thickness 100 nm)
5, Tb-Stow dielectric layer (thickness lQQnm)
) 6 was formed into a film by sputtering, and then a resin protective layer 7 (thickness: 50 μm) was formed.
比較のために、第４図の如く、軟磁性体層２を設けない
以外、実施例と同様の構或からなる従来例の光磁気ディ
スクを作製した。For comparison, a conventional magneto-optical disk having the same structure as the example except that the soft magnetic layer 2 was not provided was prepared as shown in FIG.
得られた光磁気ディスクのＣ／Ｎを第２図に示す如く、
バイアスコイル１１、対物レンズ１２を配置して２．４
−ビットで測定した。結果は下記の通りであった。The C/N of the obtained magneto-optical disk is as shown in Fig. 2.
2.4 with bias coil 11 and objective lens 12 arranged
- Measured in bits. The results were as follows.
なお、光変調で記録した場合、およびガラス基板を用い
て従来例の構威を有する光磁気ディスクを作製した場合
のＣ／Ｎは５３ｄＢである。Note that the C/N is 53 dB when recording is performed by optical modulation and when a magneto-optical disk having the conventional structure is manufactured using a glass substrate.
実施例４〜６
第３図に示す如く、実施例１〜３と同じアルミニウム基
板１上にグルーブ層（厚さ５０１１ｍ）３’を形威した
後、その上に軟磁性体層（厚さ２００ｎｍ）２′をスパ
ッタ製膜した。その後、第２図に示す如く、実施例１〜
３と同様にして光磁気ディスクを作製した。Examples 4 to 6 As shown in FIG. 3, a groove layer (5011 m thick) 3' was formed on the same aluminum substrate 1 as in Examples 1 to 3, and then a soft magnetic layer (200 nm thick) was formed on it. )2' was formed into a film by sputtering. Thereafter, as shown in FIG.
A magneto-optical disk was produced in the same manner as in Example 3.
得られた光磁気ディスクを実施例１〜３と同様に評価し
た。結果を下記に示す。The obtained magneto-optical disks were evaluated in the same manner as in Examples 1-3. The results are shown below.
１１・・・バイアスコイル、 ｌ２・・・対物レンズ。11...bias coil, l2...Objective lens.
本発明によれば、Ｃ／Ｎの向上を図ることができるので
、安価で割れないアルミニウム基板を磁界変調記録でも
用いることができる。According to the present invention, since the C/N ratio can be improved, an inexpensive and unbreakable aluminum substrate can be used for magnetic field modulation recording.
第１〜３図は実施例の基板及び光磁気ディスクの断面構
或図、第４図は従来例の基板の断面構或図である。1 to 3 are cross-sectional views of a substrate and a magneto-optical disk according to an embodiment, and FIG. 4 is a cross-sectional view of a conventional substrate.
Claims (1)
ットを形成した層とアルミニウム又はアルミニウム合金
板との間に、磁化の方向が面内方向である軟磁性体の層
を設けたことを特徴とする光磁気記録媒体用基板。 ２、アルミニウム又はアルミニウム合金板上のグルーブ
を形成した層またはサンプルサーボ用のピットを形成し
た層の表面に磁化の方向が面内方向である軟磁性体の層
を設けたことを特徴とする光磁気記録媒体用基板。[Claims] 1. A soft magnetic layer whose magnetization direction is in-plane is provided between the layer with grooves or the layer with sample servo pits and the aluminum or aluminum alloy plate. A substrate for a magneto-optical recording medium, characterized in that: 2. A light characterized by providing a layer of soft magnetic material whose magnetization direction is in-plane on the surface of a layer formed with grooves or a layer formed with pits for sample servo on an aluminum or aluminum alloy plate. Substrate for magnetic recording media.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24180389A JPH03105741A (en) | 1989-09-20 | 1989-09-20 | Substrate for magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24180389A JPH03105741A (en) | 1989-09-20 | 1989-09-20 | Substrate for magneto-optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03105741A true JPH03105741A (en) | 1991-05-02 |
Family
ID=17079742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24180389A Pending JPH03105741A (en) | 1989-09-20 | 1989-09-20 | Substrate for magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03105741A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03137837A (en) * | 1989-10-21 | 1991-06-12 | Sony Corp | Magneto-optical recording medium |
| WO2003056555A1 (en) * | 2001-12-25 | 2003-07-10 | Fujitsu Limited | Optical magnetic recording medium |
| WO2005034114A1 (en) * | 2003-10-01 | 2005-04-14 | Fujitsu Limited | Photomagnetic recording medium substrate producing method and phtomagnetic recording medium |
-
1989
- 1989-09-20 JP JP24180389A patent/JPH03105741A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03137837A (en) * | 1989-10-21 | 1991-06-12 | Sony Corp | Magneto-optical recording medium |
| WO2003056555A1 (en) * | 2001-12-25 | 2003-07-10 | Fujitsu Limited | Optical magnetic recording medium |
| US7090933B2 (en) | 2001-12-25 | 2006-08-15 | Fujitsu Limited | Magneto-optical recording medium including a soft magnetic layer, a protective layer and a silane coupling agent layer, in this order |
| WO2005034114A1 (en) * | 2003-10-01 | 2005-04-14 | Fujitsu Limited | Photomagnetic recording medium substrate producing method and phtomagnetic recording medium |
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