JPH0310528U - - Google Patents
Info
- Publication number
- JPH0310528U JPH0310528U JP7007089U JP7007089U JPH0310528U JP H0310528 U JPH0310528 U JP H0310528U JP 7007089 U JP7007089 U JP 7007089U JP 7007089 U JP7007089 U JP 7007089U JP H0310528 U JPH0310528 U JP H0310528U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- wafer
- susceptor
- periphery
- wafer tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 11
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7007089U JPH0627952Y2 (ja) | 1989-06-15 | 1989-06-15 | ウエハトレイ・サセプタ・トレイ受台の形状 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7007089U JPH0627952Y2 (ja) | 1989-06-15 | 1989-06-15 | ウエハトレイ・サセプタ・トレイ受台の形状 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0310528U true JPH0310528U (zh) | 1991-01-31 |
| JPH0627952Y2 JPH0627952Y2 (ja) | 1994-07-27 |
Family
ID=31605926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7007089U Expired - Fee Related JPH0627952Y2 (ja) | 1989-06-15 | 1989-06-15 | ウエハトレイ・サセプタ・トレイ受台の形状 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627952Y2 (zh) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198663A (ja) * | 1992-01-21 | 1993-08-06 | Hitachi Ltd | 試料搬送ホルダ |
| JP2008258508A (ja) * | 2007-04-06 | 2008-10-23 | Sharp Corp | 気相成長装置及び気相成長方法 |
| US7780440B2 (en) | 2004-10-19 | 2010-08-24 | Canon Anelva Corporation | Substrate supporting/transferring tray |
| CN111926305A (zh) * | 2020-08-12 | 2020-11-13 | 厦门乾照半导体科技有限公司 | 一种用于led晶圆制程的载盘 |
-
1989
- 1989-06-15 JP JP7007089U patent/JPH0627952Y2/ja not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198663A (ja) * | 1992-01-21 | 1993-08-06 | Hitachi Ltd | 試料搬送ホルダ |
| US7780440B2 (en) | 2004-10-19 | 2010-08-24 | Canon Anelva Corporation | Substrate supporting/transferring tray |
| JP2008258508A (ja) * | 2007-04-06 | 2008-10-23 | Sharp Corp | 気相成長装置及び気相成長方法 |
| CN111926305A (zh) * | 2020-08-12 | 2020-11-13 | 厦门乾照半导体科技有限公司 | 一种用于led晶圆制程的载盘 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627952Y2 (ja) | 1994-07-27 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |