JPH03105190A - Leak device in vacuum drying device - Google Patents

Leak device in vacuum drying device

Info

Publication number
JPH03105190A
JPH03105190A JP24213889A JP24213889A JPH03105190A JP H03105190 A JPH03105190 A JP H03105190A JP 24213889 A JP24213889 A JP 24213889A JP 24213889 A JP24213889 A JP 24213889A JP H03105190 A JPH03105190 A JP H03105190A
Authority
JP
Japan
Prior art keywords
vacuum drying
vacuum
drying chamber
pipeline
ball valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24213889A
Other languages
Japanese (ja)
Other versions
JPH0711385B2 (en
Inventor
Nobutoshi Kobayashi
信敏 小林
Naoki Yoshida
直樹 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON SCIENT KK
Kusumoto Chemicals Ltd
Original Assignee
NIPPON SCIENT KK
Kusumoto Chemicals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON SCIENT KK, Kusumoto Chemicals Ltd filed Critical NIPPON SCIENT KK
Priority to JP24213889A priority Critical patent/JPH0711385B2/en
Publication of JPH03105190A publication Critical patent/JPH03105190A/en
Publication of JPH0711385B2 publication Critical patent/JPH0711385B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To minimize the inflow of atmosphere upon switching between communication and interception and prevent the reverse flow of oil due to malfunction by a method wherein a vacuum pump is connected to a vacuum drying chamber and the communication as well as the interception are effected by the fluid ports of a three-way ball valve in two directions while the remaining fluid port is provided with a plug equipped with a capillary. CONSTITUTION:A two-way valve 27 is connected to a pipeline 25 on the back wall of a frame 9 while a pipeline 29 is connected to the two-way valve 27 whereby the pipeline 25 is opened to a atmosphere or connected to an inert gas supplying device 31. One end of another pipeline 33 is connected to the back wall of the frame 9 and a three-way ball valve 35 is connected to the pipeline 33. An external vacuum pump 39 is connected to the three-way ball valve 35 and one end of a plug 43 equipped with a capillary 41 is connected to the remaining fluid port of the valve 35 while the other end of the capillary 41 is opened to atmosphere. The two-way valve 27 is switched to intercept the pipeline 25 from the pipeline 29, the three-way ball valve 35 is switched to communicate the pipeline 33 with the pipeline 37, the vacuum pump 39 is operated and the inside of a vacuum drying chamber 7 is brought into vacuum condition to effect the vacuum drying process of a substance to be measured in the vacuum drying chamber 7.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) この発明は、真空乾燥装置におけるリーク装置に関する
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a leak device in a vacuum drying apparatus.

〈従来の技術) 従来、真空乾燥装置の真空乾燥室を真空にするため、真
空乾燥室の後壁には配管を介して真空ボンブが取付けら
れている。この配管の途中にはストップバルブが設けら
れている。そして、真空乾燥室を真空にするには、スト
ップバルブを開かせると共に、真空ボンブを作動せしめ
て真空乾燥室を真空にしている。
<Prior Art> Conventionally, in order to evacuate the vacuum drying chamber of a vacuum drying apparatus, a vacuum bomb is attached to the rear wall of the vacuum drying chamber via piping. A stop valve is provided in the middle of this piping. To evacuate the vacuum drying chamber, a stop valve is opened and a vacuum bomb is activated to evacuate the vacuum drying chamber.

(発明が解決しようとする課題〉 ところで、上述した従来技術で、真空乾燥室を所定の条
件に真空維持せしめるためには、手動によりストップバ
ルブを閉じると共に真空ボンブ内オイルの逆流を防ぐた
め、まずストップバルブと真空ボンブとの間の配管を外
し、さらに真空ポンプの電源をオフとずる3操作が必要
で大変面倒であるという問題があった。
(Problems to be Solved by the Invention) By the way, in the above-mentioned conventional technology, in order to maintain the vacuum drying chamber under predetermined conditions, it is first necessary to manually close the stop valve and prevent backflow of the oil in the vacuum bomb. There was a problem in that three operations were required: removing the piping between the stop valve and the vacuum bomb, and then turning off the power to the vacuum pump, which was very troublesome.

上記問題を解決するために、ストップバルブの代わりに
三方電磁弁を用いて自動的に真空ポンプ側を大気圧に戻
し、オイルの逆流を防ぐ手段が考えられるが、排気量の
小さな真空ポンプを使用することの多い真空乾燥装置で
は、極力配管内の抵抗を少なくする必要があるにもかか
わらず、一般に内部口径の大きい三方電磁弁は高価で使
用されないのが通常である。
In order to solve the above problem, it is possible to use a three-way solenoid valve instead of a stop valve to automatically return the vacuum pump side to atmospheric pressure and prevent oil backflow, but a vacuum pump with a small displacement is used. In vacuum drying equipment, which is used frequently, three-way solenoid valves with large internal diameters are generally not used because they are expensive, although it is necessary to reduce the resistance in the piping as much as possible.

また、ストップバルブの代わりに単に安価な方ボールバ
ルブを用いたのでは、三方ボールバルブで連通、遮断を
行なうと必ずその途中では真空乾燥室と大気とが運通し
リークが生じて真空乾燥室の真空度を低下させるという
問題があり、かつ真空度を元の状態に戻すには長時間か
かるという問題があった。
In addition, if a cheap one-way ball valve is simply used instead of a stop valve, when a three-way ball valve is used to connect and cut off communication, the vacuum drying chamber and the atmosphere will inevitably flow in the middle, resulting in a leak in the vacuum drying chamber. There was a problem in that the degree of vacuum was lowered, and it took a long time to restore the degree of vacuum to its original state.

この発明の目的は、上記問題点を改善するため、真空乾
燥室と真空ボンブを接続する配管の途中に方ボールバル
ブを設け、三方ボールバルブを連通、遮断の切換えを行
なう際、大気の流入を最小限に押えて真空度を極端に低
下させないようにすると共に、誤操作によるオイルの逆
流防止を図った真空乾燥装置におけるリーク装置を提供
することにある。
The purpose of this invention is to improve the above-mentioned problems by providing a one-way ball valve in the middle of the piping connecting the vacuum drying chamber and the vacuum bomb, and preventing the inflow of atmospheric air when switching the three-way ball valve between communication and isolation. It is an object of the present invention to provide a leak device for a vacuum drying apparatus which suppresses the degree of vacuum to a minimum and prevents the degree of vacuum from decreasing excessively, and which prevents backflow of oil due to erroneous operation.

[発明の構成] (課題を解決するための手段〉 上記目的を達成するために、この発明は、真空乾燥装置
における真空乾燥室を真空にづるため真空乾燥室に配管
を介して真空ポンプを接続して設け、舶記配管の途中に
三方ボールバルブを設け、この三方ボールバルブの二方
向の流体口で前記配管の連通、遮断を行なうと共に、残
りの一方向の流体口に大気に連通したキャピラリを備え
たプラグを設けて真空乾燥装置におけるリーク装置を構
成した。
[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention connects a vacuum pump to the vacuum drying chamber via piping in order to evacuate the vacuum drying chamber in a vacuum drying apparatus. A three-way ball valve is installed in the middle of the ship's piping, and the two-way fluid ports of this three-way ball valve are used to connect and shut off the piping, and the remaining one-way fluid port is connected to a capillary that communicates with the atmosphere. A leak device in a vacuum drying apparatus was constructed by providing a plug with a

また、この発明は前記真空乾燥装置におけるリーク装置
において、前記三方ボールバルブの切換えを自動的に行
なうための駆動装置を設けると共に、この駆動装置に制
El装置を介して前記真空ボンブを連動連結するように
したものである。
Further, in the leak device of the vacuum drying apparatus, the present invention includes a drive device for automatically switching the three-way ball valve, and the vacuum bomb is interlocked and connected to the drive device via a control element. This is how it was done.

(作用) この発明の真空乾燥装置におけるリーク装置を採用する
ことにより、真空ボンブを作動させると共に三方ボール
バルブを真空にすべく切換えることにより、真空乾燥室
が真空となる。そして真空乾燥室が所定の真空度に達す
るとその維持は三方ボールバルブを遮断にずべく切換え
ることによって行なわれると同時に真空ボンブは大気開
放となるので、真空ポンプの電源はいつでもオフにでき
る。
(Function) By employing the leak device in the vacuum drying apparatus of the present invention, the vacuum drying chamber is evacuated by operating the vacuum bomb and switching the three-way ball valve to evacuate. When the vacuum drying chamber reaches a predetermined degree of vacuum, the degree of vacuum is maintained by constantly switching off the three-way ball valve, and at the same time, the vacuum bomb is opened to the atmosphere, so the power to the vacuum pump can be turned off at any time.

前記三方ボールバルブを゛連通″から゛遮断″に切換え
るとき、真空乾燥室は大気に連通することがあってリー
クが生じるが、三方ボールバルプの一つの流体口にはキ
ャピラリを備えたプラグが設けられているので、リーク
量が極力少なくなり、真空乾燥室の真空度をFi端に低
下せずに極わずかなリーク量で済む。
When the three-way ball valve is switched from "communicating" to "blocking", the vacuum drying chamber may be communicated with the atmosphere, causing a leak, but one fluid port of the three-way ball valve is provided with a plug equipped with a capillary. Therefore, the amount of leakage is minimized, and the degree of vacuum in the vacuum drying chamber is not lowered to the Fi end, and only a small amount of leakage is required.

また、三方ボールバルブを駆動装置で切換えるようにし
、かつ制御装置を経て真空ボンブを自動的に停止せしめ
るようにしたから、誤操作によるオイルの逆流防止が図
られると共に、誤操作がなくなる。
Furthermore, since the three-way ball valve is switched by the drive device and the vacuum bomb is automatically stopped via the control device, backflow of oil due to erroneous operation is prevented and erroneous operation is eliminated.

(実施例) 以下、この発明の実施例を図面に基づいて詳細に説明す
る。
(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.

第1図を参照するに、真空乾燥装置1は真空乾燥室本体
3とこの真空乾燥室本体″3の前面に開閉可能なn5な
どで構成ざれている。真空乾燥室本体3は内部に被測定
物を収容せしめる真空乾燥室7を有した内フレーム9と
この内フレーム9の外側を断熱材11を介してカバーし
た外フレーム13からなるものである。しかも、内フレ
ーム9の外周部には真空乾燥室7を一定の温度に加熱す
るヒータ15が設けられている。
Referring to FIG. 1, the vacuum drying apparatus 1 consists of a vacuum drying chamber main body 3 and a device N5 that can be opened and closed on the front of the vacuum drying chamber main body 3. It consists of an inner frame 9 having a vacuum drying chamber 7 for storing objects, and an outer frame 13 covering the outside of the inner frame 9 with a heat insulating material 11 in between. A heater 15 is provided to heat the drying chamber 7 to a constant temperature.

前記内フレーム9の前面には例えば矩形形状の開口部1
7が形成されており、この開口部17の外周部における
内フレーム9の前面にはゴムなどからなるパッキン19
が取付けられている。
For example, a rectangular opening 1 is provided on the front surface of the inner frame 9.
7 is formed, and a packing 19 made of rubber or the like is provided on the front surface of the inner frame 9 at the outer periphery of the opening 17.
is installed.

前記扉5は前記開口部17に対応した位置に設けられた
透明なガラスプレート21と、このガラスプレート21
を支持すると共にカバーする扉フレーム23などで構成
されている。
The door 5 includes a transparent glass plate 21 provided at a position corresponding to the opening 17, and this glass plate 21.
The door frame 23 supports and covers the door frame 23.

上記構或により、作業者が扉5を開かせて被測定物を真
空乾燥室本体3の真空乾燥室7内に収容せしめ、次いで
扉5を閉じる。而して真空乾燥室7を真空にすると共に
ヒータ15で加熱し一定の温度に制御することによって
、被測定物が所望の条件で真空乾燥処理されることにな
る。
With the above structure, the operator opens the door 5 to accommodate the object to be measured in the vacuum drying chamber 7 of the vacuum drying chamber main body 3, and then closes the door 5. By evacuating the vacuum drying chamber 7 and controlling the temperature to a constant temperature by heating with the heater 15, the object to be measured can be vacuum dried under desired conditions.

被測定物が真空乾燥室7内で真空乾燥処理されていると
き、被測定物の状態は透明なガラスプレート21を通し
てよ<1!察することができる。
When the object to be measured is being vacuum-dried in the vacuum drying chamber 7, the state of the object to be measured can be checked by passing it through the transparent glass plate 21<1! can be understood.

舶記内フレーム9の後壁には配管25の一端が接続され
ており、配管25の他端は二方バルブ27に接続されて
いる。この二方バルブ27には配管29の一端が接続さ
れており、この配管29の他端は外フレーム13を突出
して大気開放にされるか、又は外部のN2ガスなどの不
活性ガスのガス供給装置31に接続されている。
One end of a pipe 25 is connected to the rear wall of the internal frame 9, and the other end of the pipe 25 is connected to a two-way valve 27. One end of a pipe 29 is connected to this two-way valve 27, and the other end of this pipe 29 is either exposed to the atmosphere by protruding the outer frame 13, or is supplied with an external inert gas such as N2 gas. It is connected to the device 31.

前記内フレーム9の後壁には前記配管29とは別の配管
33の一端が接続されており、この配管33の他端には
三方ボールバルブ35の流体口に接続されている。この
三方ボールバルブ35の別の流体口には配管37の一端
が接続されており、配管37の他端は外フレーム13に
突出して外部の真空ポンブ39に接続されている。前記
三方ボールバルブ35の残りの流体口にはキPビラリ4
1を備えたプラグ43の一端が接続されており、ブラグ
43の他端は外フレーム13に突出し、キャピラリ41
の他端は大気に開放されている。
One end of a pipe 33 other than the pipe 29 is connected to the rear wall of the inner frame 9, and the other end of this pipe 33 is connected to a fluid port of a three-way ball valve 35. One end of a pipe 37 is connected to another fluid port of the three-way ball valve 35, and the other end of the pipe 37 protrudes from the outer frame 13 and is connected to an external vacuum pump 39. The remaining fluid ports of the three-way ball valve 35 are provided with a
1 is connected to one end of the plug 43, and the other end of the plug 43 protrudes into the outer frame 13 and is connected to the capillary 41.
The other end is open to the atmosphere.

上記構成により、二方バルブ27を切換えて、配管25
と29を遮断し、さらに三方ボールバルブ35を切換え
て配管33と37とを連通せしめると共に、真空ボンブ
39を一定時間作動させると、真空ポンプ3つにより、
真空乾燥室7内が所定の真空状態となり、真空乾燥室7
内の被測定物が真空乾燥処理されることになる。
With the above configuration, the two-way valve 27 is switched and the piping 25
When the three-way ball valve 35 is switched to connect the pipes 33 and 37, and the vacuum bomb 39 is operated for a certain period of time, the three vacuum pumps
The inside of the vacuum drying chamber 7 becomes a predetermined vacuum state, and the vacuum drying chamber 7
The object to be measured inside will be subjected to a vacuum drying process.

真空ボンブ39を停止せしめると共に、三方ボールバル
ブ35を切換えて配管37とキャピラリ41とを連通せ
しめ、配管33と37とを遮断せしめ、さらに、二方バ
ルブ27を切換えて配管27と29とを連通せしめるこ
とにより、ガス供給装@31から不活性ガスが流れて配
管29、二方バルブ27、配管25を経て真空乾燥室7
内に供給される。真空乾燥室7内に一定の不活性ガスが
供給されると、二方バルブ27を切換えて配管25と2
9とを遮断せしめることにより、ガス供給装置31から
の不活性ガスが真空乾燥v7内に供給されなくなり、真
空乾燥室7内の不活性ガスの星が一定量に保持され不活
性ガス下での熱処理が行われることになる。
The vacuum bomb 39 is stopped, the three-way ball valve 35 is switched to connect the pipe 37 and the capillary 41, the pipes 33 and 37 are cut off, and the two-way valve 27 is switched to connect the pipes 27 and 29. As a result, inert gas flows from the gas supply device @ 31 to the vacuum drying chamber 7 via the piping 29, the two-way valve 27, and the piping 25.
supplied within. When a certain amount of inert gas is supplied into the vacuum drying chamber 7, the two-way valve 27 is switched to open the pipes 25 and 2.
9, the inert gas from the gas supply device 31 is no longer supplied to the vacuum drying chamber 7, and the inert gas inside the vacuum drying chamber 7 is maintained at a constant amount. Heat treatment will be performed.

真空乾燥室7内を不活性ガスで満すことなく、単に真空
を解除する場合には、ガス供給装置31を撤去し大気開
放とした上で二方バルブ27を切換え、配管25と29
を連通せしめることによつ−C真空乾燥室γ内の真空が
解除ざれることになる。
To simply release the vacuum without filling the vacuum drying chamber 7 with inert gas, remove the gas supply device 31 and open it to the atmosphere, then switch the two-way valve 27 and connect the pipes 25 and 29.
By communicating with the -C vacuum drying chamber γ, the vacuum inside the -C vacuum drying chamber γ is released.

前記三方ボールバルブ35の具体的な構造の一例が第2
図(A>に示されている。第2図(A)に43いて三方
ボールバルブ35は三方の流体口35A.35B.35
Cを備え、流体口35Aが配管37に、流体口35Bが
配管33に、また流体口35Gが第2図(B)に示した
キャピラリ41を右したブラグ43に接続されている。
An example of a specific structure of the three-way ball valve 35 is the second one.
The three-way ball valve 35 has three fluid ports 35A, 35B, and 35 shown in FIG.
The fluid port 35A is connected to the pipe 37, the fluid port 35B is connected to the pipe 33, and the fluid port 35G is connected to a plug 43 on the right side of the capillary 41 shown in FIG. 2(B).

三方ボールバルブ35内には第3図(p、>.(B).
(C)に示すごとく、ボール45が備えられており、こ
のボール45を動かすために、例えばボール45に連結
した切換えハンドル47が外部に設けられている。
Inside the three-way ball valve 35 are the valves shown in FIG. 3 (p, >. (B).
As shown in (C), a ball 45 is provided, and in order to move this ball 45, for example, a switching handle 47 connected to the ball 45 is provided externally.

この切換えハンドル47を例えば作業者が手動で回動せ
しめることにより、第3図(A)に示づごとく、ボール
45が流体口35Cを塞ぎ、流体口35Aと35Bとが
連通し配管33と37とが連通ずる。また、第3図(B
)に示すごとく、ボール45が流体口35Bを塞ぎ、流
体口35Aと35Gとが連通して配管37とキャピラリ
41とが連通ずる。
When this switching handle 47 is manually rotated by, for example, an operator, the ball 45 closes the fluid port 35C, as shown in FIG. The two are connected. Also, Figure 3 (B
), the ball 45 closes the fluid port 35B, the fluid ports 35A and 35G communicate with each other, and the pipe 37 and the capillary 41 communicate with each other.

このように、第3図(A).(B)に示すごとくハンド
ル47を廻して切換える際には、三方ボールバルブ35
では第3図(C)に示したごとく、ボール45が中立状
態になることがあり、流入口35A.35B,35Gの
三方が連通状態となる。
In this way, Figure 3(A). When switching by turning the handle 47 as shown in (B), the three-way ball valve 35
As shown in FIG. 3(C), the ball 45 may be in a neutral state and the inlet 35A. Three sides of 35B and 35G are in communication state.

したがって、真空乾燥室7が真空されるべきところを大
気と連通してリークしてしまう。このリークはキャピラ
リ41がなく、通常の配管の口径の場合には、第4図に
示したP1のリークがあると、リークがない状態に復帰
するのにT+時間かかる。
Therefore, the part of the vacuum drying chamber 7 that should be evacuated is communicated with the atmosphere and leaks. This leak occurs without the capillary 41 and in the case of a normal pipe diameter, if there is a leak of P1 shown in FIG. 4, it takes T+ time to return to the state without leak.

これに対して、本実施例のようにキャピラリ41がある
と、第4図に示したわずかな△P1のリークがあっても
、リークがない状態にづるのにΔ丁1時間だけで戻すこ
とができる。したがって、流入口35Gにキャピラリ4
1を有したブラグ43を設けることによってリークの低
減を図ることができる。
On the other hand, if there is a capillary 41 as in this embodiment, even if there is a slight leak of ΔP1 shown in FIG. 4, it takes only ΔP1 hour to return to the state without leakage. I can do it. Therefore, the capillary 4 is connected to the inlet 35G.
1, leakage can be reduced by providing the plug 43 having a diameter of 1.

第5図には三方ボールバルブ35を自動的に切換える他
の実施例が示されている。第5図において、上述した実
施例の部品と同じ部には同じ符号を付して説明寸る。ボ
ール45を回動させるためにボール45にジョイントな
どの連結部拐49を介してサーボモータのごとき駆動装
置51が設けられている。この駆動装置51は取付板5
3に取イ4けられている。ざらに、この駆動装置51に
は制御装置55が接続されており、この制tll装置5
5には前記真空ボンブ39の電FA装置57が接続され
ている。
FIG. 5 shows another embodiment in which the three-way ball valve 35 is automatically switched. In FIG. 5, parts that are the same as those in the embodiment described above are given the same reference numerals for explanation. In order to rotate the ball 45, a driving device 51 such as a servo motor is provided on the ball 45 via a connecting portion 49 such as a joint. This drive device 51 is attached to the mounting plate 5
It has been taken by 3 and 4. Roughly speaking, a control device 55 is connected to this drive device 51, and this control device 5
5 is connected to an electric FA device 57 of the vacuum bomb 39.

上記構或により、制III装置55から三方ボールバル
ブ35のボール45を回動すべき信号が駆動装置51に
送られて駆動装置51を駆動せしめ、ボール45を回動
させて真空乾ff室7と真空ポンプ3つとを連通又は遮
断せしめると共に、制御装置55から真空ポンブ39の
電源装置57へ信号を送って真空ポンブ39を作動させ
たり、あるいは停止させたりづることを自動的に行なう
ことができるから、作業者による誤操作をなくずると共
に誤操作によるオイルの逆流防止を図ることができる。
With the above structure, a signal to rotate the ball 45 of the three-way ball valve 35 is sent from the control III device 55 to the drive device 51, which drives the drive device 51, rotates the ball 45, and operates the vacuum drying chamber 7. and the three vacuum pumps, and can automatically start or stop the vacuum pump 39 by sending a signal from the control device 55 to the power supply device 57 of the vacuum pump 39. It is possible to eliminate erroneous operations by the operator and to prevent backflow of oil due to erroneous operations.

なお、この発明は前述した実施例に限定されることなく
、適宜の変更を行なうことにより、その他の態様で実施
し得るものである。例えば本実施例における三方ポール
バルブ35に接続寸る配管33.37はできるだけ内径
変化の少ないものを使用つるのが効果的である。
Note that the present invention is not limited to the embodiments described above, and can be implemented in other embodiments by making appropriate changes. For example, it is effective to use pipes 33 and 37 connected to the three-way pole valve 35 in this embodiment with pipes whose inner diameters change as little as possible.

[発明の効果] 以上のごとき実施例の説明より理解されるように、この
発明によれば、真空ボンブを作動させると共に三方ポー
ルバルブを真空にすべく切換えることにより、真空乾燥
室が真空となり、真空乾燥室が所定の真空度に達すると
三方ポールバルブを遮断にすべく切換えることによって
行なわれ、次いで真空ボンブの電源をオフにしている。
[Effects of the Invention] As understood from the above description of the embodiments, according to the present invention, by operating the vacuum bomb and switching the three-way pole valve to create a vacuum, the vacuum drying chamber becomes evacuated. When the vacuum drying chamber reaches a predetermined degree of vacuum, this is done by switching the three-way pole valve to shut off, and then turning off the power to the vacuum bomb.

前記三方ボールバルブを゛連通”から“遮断”に切換え
るとき、真空乾燥室は大気に連通することがあってリー
クが生じるが、三方ボールバルブの一つの流体口にはキ
ャピラリを備えたプラグが設けられているので、リーク
量が極力少なくなり、真空乾燥室の真空度を極端に低下
せずに極わずかなリーク吊で済み短時間で元の真空度に
することができる。
When the three-way ball valve is switched from "communicating" to "blocking," the vacuum drying chamber may be communicated with the atmosphere, causing a leak, but one fluid port of the three-way ball valve is equipped with a plug equipped with a capillary. As a result, the amount of leakage is minimized, and the vacuum level of the vacuum drying chamber can be returned to its original level in a short period of time with only a very small amount of leakage and no drastic reduction in the degree of vacuum.

また、三方ボールバルブを駆動装置で切換えるようにし
、かつ制御装置を経て真空ボンブを自動的に停止せしめ
るようにしたから、誤操作によるオイルの逆流訪止を図
ることができると共に、誤操作をなくすることができる
In addition, since the three-way ball valve is switched by the drive device and the vacuum bomb is automatically stopped via the control device, it is possible to prevent backflow of oil due to erroneous operation, and to eliminate erroneous operation. I can do it.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の主要部を示し、真空乾燥装置の側断
面概略図、第2図(A)は三方ボールバルブの一例を示
す斜視図、第2図(B)は三方ボールバルブの一つの流
体口に設けられるキャピラリを有したプラグの断面図、
第3図(A).(B)および(C)は真空するときの動
作説明図、第4図は真空状態となる圧力と時間による真
空曲線図、第5図は三方ボールバルブと真空ボンブを自
動的に制御する別実施例図である。
Fig. 1 shows the main parts of the present invention, and Fig. 2 (A) is a perspective view showing an example of a three-way ball valve, and Fig. 2 (B) is a schematic side cross-sectional view of a vacuum drying device. a cross-sectional view of a plug with capillaries provided in two fluid ports;
Figure 3 (A). (B) and (C) are explanatory diagrams of the operation when creating a vacuum, Figure 4 is a vacuum curve diagram depending on the pressure and time to achieve a vacuum state, and Figure 5 is a separate implementation that automatically controls the three-way ball valve and vacuum bomb. This is an example diagram.

Claims (2)

【特許請求の範囲】[Claims] (1)真空乾燥装置における真空乾燥室を真空にするた
め真空乾燥室に配管を介して真空ポンプを接続して設け
、前記配管の途中に三方ボールバルブを設け、この三方
ボールバルブの二方向の流体口で前記配管の連通、遮断
を行なうと共に、残りの一方向の流体口に大気に連通し
たキャピラリを備えたプラグを設けてなることを特徴と
する真空乾燥装置におけるリーク装置。
(1) In order to evacuate the vacuum drying chamber in the vacuum drying device, a vacuum pump is connected to the vacuum drying chamber via piping, and a three-way ball valve is installed in the middle of the piping, and the two-way A leak device for a vacuum drying apparatus, characterized in that a fluid port communicates and shuts off the piping, and the remaining fluid port in one direction is provided with a plug equipped with a capillary communicating with the atmosphere.
(2)前記請求項(1)において、前記三方ボールバル
ブの切換えを自動的に行なうための駆動装置を設けると
共に、この駆動装置に制御装置を介して前記真空ポンプ
を連動連結してなることを特徴とする真空乾燥装置にお
けるリーク装置。
(2) In claim (1), a drive device is provided for automatically switching the three-way ball valve, and the vacuum pump is interlocked and connected to the drive device via a control device. Features a leak device in vacuum drying equipment.
JP24213889A 1989-09-20 1989-09-20 Leak device in vacuum dryer Expired - Fee Related JPH0711385B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24213889A JPH0711385B2 (en) 1989-09-20 1989-09-20 Leak device in vacuum dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24213889A JPH0711385B2 (en) 1989-09-20 1989-09-20 Leak device in vacuum dryer

Publications (2)

Publication Number Publication Date
JPH03105190A true JPH03105190A (en) 1991-05-01
JPH0711385B2 JPH0711385B2 (en) 1995-02-08

Family

ID=17084879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24213889A Expired - Fee Related JPH0711385B2 (en) 1989-09-20 1989-09-20 Leak device in vacuum dryer

Country Status (1)

Country Link
JP (1) JPH0711385B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013053825A (en) * 2011-09-05 2013-03-21 Kyoshin Engineering:Kk Drying apparatus and drying method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013053825A (en) * 2011-09-05 2013-03-21 Kyoshin Engineering:Kk Drying apparatus and drying method

Also Published As

Publication number Publication date
JPH0711385B2 (en) 1995-02-08

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