JPH03104502A - Chuck device - Google Patents

Abstract

PURPOSE:To prevent dispersion of thickness of a workpiece and simplify automatization of connection and disconnection by processing the workpiece by way of positioning the workpiece at the top edge of an attraction cylinder after attracting the workpiece, then holding the outer periphery of the workpiece with a holding mechanism, and thereafter stopping attraction so as to place the brought in workpiece in processing. CONSTITUTION:The top point of an attraction cylinder 18 is brought in contact with one side lens surface 16a of a lens 16 transported by a transportation device, the lens 16 is sucked by a vacuum pump through an air suction passage 20 and the inside of the attraction cylinder 18 and the lens 16 is positioned. Thereafter, a actuator 15 is driven, a holding claw 17 is actuated to close to hold the outer periphery of the lens 16 and the lens is processed in the state of being held by the holding claw 17 after stopping attraction thereof. After processing, suction by the vacuum pump is carried out, and after the lens 16 is attracted on the top point of the attraction cylinder 18, the holding claw 17 is actuated to open to release holding and the lens 16 is held only by the attraction cylinder 18, attraction is stopped and the lens 16 is returned to the transportation device.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a chunk device that grips the outer periphery of a workpiece when machining the end face, outer circumferential surface, etc. of the workpiece. [Prior Art] Conventionally, as a chuck device, for example,
The one disclosed in Publication No. 3546 is known. This chuck device is as shown in FIGS. 6(a) and 6(b), and is provided with a collet chuck 2 and a tightening ring 3 for tightening the collet chuck 2 at the tip of the lens holding shaft l. Inside the collet chuck 2, a suction cup mounting shaft 5 with an air hole 4 bored in the shaft center is provided so as to be slidable in the axial direction.
is fixed, and an air suction tube 7 is attached to the opposite end. An air hole valve 8 is screwed onto the suction cup mounting shaft 5 in a direction perpendicular to the axis. A compression spring 9 is inserted between the end surface of the suction cup mounting shaft 5 on the air suction tube 7 mounting side and the opposing surface of the inner space of the collet chuck 2. The air hole valve 8 passes through an axially long notch 10 provided on the side wall of the corent chuck 2, and by holding its head and sliding it inside the notch 10, the suction cup mounting shaft 5 can be attached. It is designed so that it can be pulled in against the spring 9. The suction cup mounting shaft 5 can be held at a position where the lens surface of the lens 11 adsorbed by the suction cup rubber 6 fully contacts the lens holding reference surface 12 provided at a position slightly beyond the tip of the collet chuck 2. A retaining pawl l3 for retaining the air hole valve 8 is pivotally supported by a pin 14 installed on the side surface of the collet chuck 2.

In such a tI chuck device, first, the polished surface of the lens 1l is pressed against the sucker rubber 6, and the suction is sucked from the air suction tube 7 by a vacuum pump (not shown), and the lens 1l is
1 is held on the suction cup rubber 6. Next, hold the air hole valve 8 and pull in the suction cup mounting shaft 5 against the force of the spring 9 until the peripheral part of the lens surface that is attracted to the suction cup rubber 6 of the lens 1l is in close contact with the lens holding reference surface l2. The retaining claw 13 is engaged with the air hole valve 8 to hold the lens in that position. After that, I gave up on the tightening ring 3 of the collet chuck 2. In this case, it is only necessary to retract the collet chuck 2 until the inner surface of the tip of the collet chuck 2 comes into contact with the outer peripheral surface of the lens 1l held by the suction cup rubber 6 without any play, and there is no need to tighten it with a tightening force. As described above, the lens 1l is held in close contact with the entire circumference at a predetermined lens holding reference position of the chuck, and displacement in the radial direction is prevented by the collet chuck 2. Then, perform processing in this state. Next, follow the steps below to attach lens 1.
Remove 1. First, loosen the tightening ring 3. This opens chuck 2. When the air hole valve 8 and the stopper claw 13 are unlatched, the suction cup mounting shaft 5 moves forward by the force of the spring 9, and the lens 1l comes to a position protruding from the tip of the corent chuck 2. Thereafter, when the air hole valve 8 is opened and atmospheric pressure is introduced into the air hole 4 in the suction cup mounting shaft 5, the lens 1l is removed from the suction cup rubber 6. [Problems to be Solved by the Invention] However, in the conventional chuck device, since the lens holding reference surface 12 is integrally formed with the collet chuck 2, as the collet chuck 2 is tightened,
At the same time as the collet chuck 2 itself was deformed, the lens holding reference surface 12 also moved. Furthermore, the amount of variation in the lens holding reference surface l2 also varied depending on how tightly the chuck 2 was tightened. Therefore, with the conventional chuck device, it is not possible to accurately position the lens in the thickness direction, resulting in variations in the lens thickness, making it difficult to perform highly accurate processing.

The present invention has been made in view of such conventional problems, and it does not cause variations in the wall thickness of the workpiece, and it is easy to automate the attachment and detachment of the workpiece, especially when an i-structure for moving the suction cylinder is provided. The purpose is to provide a chuck device. [Means for Solving the Problems] In order to achieve the above object, the present invention provides a chuck device for gripping the outer periphery of a workpiece, which includes a gripping claw that can be opened and closed to grip the outer periphery of the workpiece. A chuck device was constructed that included a mechanism and a suction tube that was coaxially located at the center of this gripping mechanism and could freely suction a workpiece at its tip and position the workpiece. The present invention also provides a chuck device for gripping the outer periphery of a workpiece, including a gripping mechanism equipped with gripping claws that can be opened and closed to grip the outer periphery of the workpiece, and a gripping mechanism located coaxially at the center of the gripping mechanism and provided at the tip. a suction cylinder that can freely suction a workpiece, a positioning cylinder that is coaxially located inside or outside of this suction cylinder to position the workpiece, and a positioning cylinder that positions the workpiece until the workpiece that is suctioned by the suction cylinder comes into contact with the positioning cylinder. The chuck device is equipped with a moving mechanism for moving the suction cylinder.

[Effect]

In the chuck device of the present invention having the above configuration, the workpiece is sucked at the tip of the suction cylinder, and the workpiece is positioned. Next, the gripping mechanism is activated and the gripping claws are closed to grip the outer periphery of the workpiece. Then stop adsorption,
Perform the specified machining on the workpiece while gripping the workpiece with the gripping claws. After machining, the workpiece is sucked again by the suction cylinder, and the gripping claws of the gripping mechanism are opened to release the grip, and the workpiece is held only by the suction cylinder. Then, suction is stopped and the workpiece is returned to the transport device, etc. Here, the suction cylinder that suctions and positions the workpiece is in a fixed state, unrelated to the operation of the gripping mechanism, so there is no variation in the wall thickness of the workpiece. On the other hand, in the chuck device of the present invention in which a positioning cylinder is provided separately from the suction cylinder and a mechanism for moving the suction cylinder is provided, a workpiece is first suctioned at the tip of the suction cylinder. Then, the workpiece is moved for m until the workpiece attracted by the suction cylinder comes into contact with the positioning cylinder.
The suction cylinder is moved by the drive of the mechanism. Next, the gripping mechanism is driven to close the gripping claws to grip the outer periphery of the workpiece. Thereafter, the suction is stopped, and a predetermined processing is performed on the workpiece while the workpiece is gripped by the gripping claws.

After machining, the moving Iatl is driven to move the suction tube forward, and the workpiece is sucked again at the tip of the suction tube. After that, the gripper of the gripper 1fl is opened to release the grip, and the workpiece is held only by the suction cylinder. Then, suction is stopped and the workpiece is returned to the transport device or the like.

Even in this case, the positioning tube that positions the workpiece is in a fixed state regardless of the operation of the gripping mechanism, so there is no variation in the wall thickness of the workpiece.
Furthermore, since a mechanism for moving the suction cylinder is provided, it is possible to easily automate the attachment and detachment of workpieces.

〔Example〕

(First Embodiment) Figure 1 shows a chuck device of this embodiment, in which an actuator 15 is used as the gripper a side, and a lens l6 which is a workpiece is attached to the tip of this actuator 15.
A gripping claw 17 that can be opened and closed is provided to grip the outer periphery of the gripper. Further, a cylindrical suction tube 18 is fixedly provided at the center of the actuator 15 coaxially with the actuator 15 . The tip of the suction cylinder l8 is provided so as to be located near the tip of the gripping claw l7, and can freely suction the lens 16 by coming into contact with one lens surface 16a of the lens 16.
6 can be positioned in the thickness direction (horizontal direction in Figure 1). Furthermore, a base l9 is fixedly provided at the base end of the actuator l5. An air suction passage 20 is formed in the central axis of the base 19, and this air suction passage 20 communicates with the inside of the suction cylinder 18. Further, the air suction passage 20 is connected to a vacuum bomb (not shown).

In such an m-power chuck device, the tip of the suction cylinder 8 is brought into contact with one lens surface 16a of the lens l6 transported by a transport device (not shown), for example. Then, the lens 16 is suctioned by a vacuum bomb through the air suction passage 20 and the inside of the suction cylinder 18, and the lens 16 is suctioned at the tip of the suction cylinder 18, and the lens 16 is positioned. Next, the actuator l5 is driven to close the gripping claw l7 to grip the outer periphery of the lens 16. After that, the suction is stopped and the lens 1 is held by the gripping claw 17.
6, perform the specified processing on the lens l6. After processing, suction is performed again using the vacuum pump, and the lens 16 is suctioned at the tip of the suction tube 18. After that, the gripping claw 17 of the actuator 15 is operated for a while to release the grip, and the lens 16 is removed using only the suction tube 18. Hold. Then, the suction is stopped and the lens 16 is returned to the transport device.

As described above, according to this embodiment, the suction tube 18 for suctioning and positioning the lens 16 is independent of the operation of the gripping claw l7 of the actuator 15 and is located in a fixed position. No variation occurs. Thereby, the lens 16 can be held and processed with high precision. (Second Embodiment) FIG. 2 shows the Chanok device of this embodiment, in which an actuator 15 is used as the side of the gripping Ia, and a lens 16 which is a workpiece is attached to the tip of this actuator 15.
A gripping claw 17 that can be opened and closed is provided to grip the outer periphery of the gripper.
Furthermore, a substantially cylindrical positioning cylinder 2l is fixedly provided at the center of the actuator 15 coaxially with the actuator 15. The tip of the positioning tube 21 is provided so as to be located near the tip of the gripping claw l7, and comes into contact with one lens surface 16a of the lens 16 in the thickness direction (second direction) of the lens l6.
Positioning is possible in the horizontal direction (in the figure). Further, inside the positioning cylinder 21, a cylindrical suction cylinder 22 is provided coaxially therewith so as to be slidable in an airtight manner with respect to the positioning cylinder 21. The suction cylinder 22 can suction the lens 16 by bringing the tip thereof into contact with the lens surface 16a. Further, the suction tube 22 is always urged in the forward direction (rightward in FIG. 2) by a compression spring 23 provided inside the base end of the positioning tube 21. A base l9 is fixed to the base end of the actuator 15. An air suction passage 20 is formed in the central axis of the base 19, and the air suction passage 20 communicates with the inside of the positioning cylinder 2l and the inside of the suction cylinder 22. Further, the air suction passage 20 is connected to a vacuum pump (not shown).

The vacuum pump serves as a suction means when the lens 16 is suctioned by the suction tube 22, and also moves the suction tube 22 that has suctioned the lens l6 backward (second
It is also a movement mechanism that allows movement (leftward movement in the figure). In a chuck device having such a structure, for example, the tip of the suction tube 22, which is being advanced by the force of the compression spring 23, is brought into contact with one lens surface 16a of the lens 16 conveyed by a conveyance device (not shown). . Then, the lens 16 is suctioned by the vacuum pump through the air suction passage 20, the inside of the positioning tube 21, and the inside of the suction tube 22, and the lens 16 is suctioned at the tip of the suction tube 22. Furthermore, a strong suction is performed by a vacuum pump, and the suction tube 22 is compressed by the compression spring 2.
3, and move the suction tube 22 until one lens surface 16a of the lens l6 comes into contact with the tip of the positioning tube 21. Next, the actuator 15 is driven to close the gripping claws 17 to grip the outer periphery of the lens 16. Thereafter, the suction is stopped, and while the lens 16 is being held by the gripping claws 17, a predetermined processing is performed on the lens 16. After processing, suction is performed again using the vacuum pump, and the suction cylinder 2
After the lens 16 is suctioned at the tip of the actuator 15, the gripping claw l7 of the actuator 15 is opened to release the grip, and the lens l6 is held only by the suction cylinder 22. Then, after weakening the suction force a little and moving the suction tube 22 forward by the force of the compression spring 23, suction is stopped and the lens 16 is returned to the conveyance device. As described above, according to this embodiment, the positioning cylinder 21 for positioning the lens 16 is in a fixed state and is unrelated to the operation of the gripping claw l7 of the actuator 15, so that variations in the wall thickness of the lens 16 can be prevented. It never occurs. Thereby, the lens 16 can be held and processed with high precision. In addition, since the adsorption cylinder 22 is provided with a movable side (vacuum pump), the attachment and detachment of the lens l6 can be easily automated.

(Third Embodiment) FIG. 3 shows a chuck device of this embodiment, which uses a scroll chuck 24 as a gripping mechanism. A gripping claw 25 that can be opened and closed is provided for gripping. In addition, a substantially cylindrical positioning tube 26 is fixedly installed in the middle of the scroll chuck 24 coaxially with the scroll chuck 24 . The tip of the positioning tube 26 is provided so as to be located near the tip of the gripping claw 25, and comes into contact with one lens surface 16a of the lens 16, so that the tip of the positioning tube 26 is positioned in the thickness direction (horizontal direction in FIG. 3) of the lens 16. Positioning is possible. Further, inside the positioning cylinder 26, a cylindrical suction cylinder 27 is provided coaxially therewith so as to be slidable in an airtight manner with respect to the positioning cylinder 26. The suction cylinder 27 can suction the lens 16 by bringing its tip into contact with the lens surface 16a.

A base 28 is fixed to the base end of the scroll chuck 24. An air suction tube 29 is fixed to the center axis of the base 28, and the inner peripheral surface of the adsorption tube 27 is airtightly slid onto the outer circumference of the tip of the air suction tube 29 via an O-ring 30. It is movably provided, and the tip has a positioning tube 26.
It is located near the tip of. Further, an air suction passage 3l is formed in the base 28 separately from the air suction pipe 29, and this air suction passage 31 is communicated with the inside of the positioning cylinder 26. The air suction pipe 29 and the air suction passage 31 are each independently connected to a vacuum pump (not shown). That is, in this embodiment, two systems of suction mechanisms are provided.

In a chuck device having such a mechanism, air is introduced into the positioning tube 26 through the air suction passage 31 to the one lens surface 16a of the lens 16 conveyed by a conveyance device (not shown), and the suction tube 27 is moved. move forward,
The tip of the suction tube 27 is brought into contact with the tip.

Then, the lens is suctioned by the Shinmoto pump through two air suction tubes and the inside of the suction cylinder 27, and the lens 16 is suctioned at the tip of the suction cylinder 27. Thereafter, the inside of the positioning cylinder 26 is made negative pressure through the air suction passage 31 by a vacuum bomb,
The suction 7427 that is suctioning the lens l6 is moved backward, and the suction T527 is moved until one lens surface 16a abuts the tip of the positioning tube 26. Next, the scroll chunk 24 is driven and the grip claw 25 is closed to grip the outer periphery of the lens 16. After that, the suction is stopped, and while the lens 16 is being held by the gripping claws 25, the lens 16 is
Perform the specified processing on the object. After processing, suction is performed again using the vacuum bomb and the lens 16 is sucked at the tip of the suction cylinder 27. After that, the gripping claw 25 of the scroll chuck 24 is opened to release the grip, and the lens 16 is removed using only the suction cylinder 27. hold.

Then, another vacuum pump introduces the atmosphere into the positioning cylinder 26 through the air suction passage 31, moves the suction cylinder 27 forward, and then stops suction and returns the lens 16 to the transport device.

As described above, according to this embodiment, the positioning cylinder 26 for positioning the lens 16 is independent of the operation of the gripping claw 25 of the scroll knob 24 and is in a fixed state, so that variations in the wall thickness of the lens 16 can be avoided. It never gives birth. Thereby, the lens 16 can be held and processed with high precision. Further, since the moving device u4 (vacuum pump) for the adsorption cylinder 27 is provided, the attachment and detachment of the lens l6 can be easily automated.

In particular, since two systems of suction mechanisms are provided, it is easy to adjust the tying when attaching and detaching the lens 16, and even when the lens 16 is being transported on a pallet, the lens 16 can be easily adjusted without interfering with the pallet. can be attached and detached.

(Fourth Embodiment) FIG. 4(a) shows a chuck device of this embodiment, in which a scroll chuck 24 is used as a gripping mechanism, and a tip of this scroll chunk 24 is attached to a workpiece. A gripping claw 25 that grips the outer periphery of the lens 16 and can be opened and closed is provided. Further, a cylindrical positioning tube 32 is fixedly provided at the center of the scroll chuck 24 coaxially with the scroll chunk 24. The tip of the positioning cylinder 32 is provided so as to be located near the tip of the gripping claw 25, and comes into contact with one lens surface 16a to move the lens l6 in the thickness direction (vertical direction in FIG. 4(a)). Positioning is possible.

Furthermore, the base end (upper end) of a suction cylinder 33 made of a rubber bellows is joined to a substantially central position on the inner circumferential surface of the positioning cylinder 32. The adsorption cylinder 33 is the positioning cylinder 32
It is installed coaxially with the robot, and can only be expanded and contracted in the vertical direction. Further, a suction pad 34 is fixed to the tip (lower end) of the suction cylinder 33 so as to close the opening at the tip. A through hole 34a is formed in the center of the suction band 34. Further, inside the suction cylinder 33, a spherical stop valve 35 is provided in a free-standing shape (it can freely move toward and away from the suction pad 34 and the like, and can freely rotate).

As shown in FIG. 4 (bl), the stop valve 35 has small holes 35a that penetrate in the three-dimensional direction of the sphere. The relationship with the size is that for every through hole 34a, one of the small holes 35a is always 1)! It has an impressive size and shape. On the other hand, a base 19 is provided at the base end of the scroll jack 24.
is permanently installed. An air suction passage 20 is formed in the central axis of the base 19, and this air suction passage 20
is in communication with the inside of the positioning tube 32 and suction 133. Further, the air suction passage 2o is connected to a vacuum pump (not shown).

In such a chuck device, the tip of the suction tube 33, which is descending under its own weight, is brought into contact with one lens surface 16a of the lens 1G, which is conveyed by a conveying device (not shown), for example. Then, the lens 16 is suctioned by a vacuum pump through the air suction passage 20 and the like, and the lens 16 is suctioned at the tip of the suction tube 33 . Thereafter, the suction tube 33 is further contracted by continuing suction, and the suction tube 33 is contracted (raised) until one lens surface 16a abuts the tip of the positioning tube 32. At this time, the stonop valve 35 is
It is in a floating state. Next, the scroll chunk 24 is driven and the gripping claws 25 are closed to grip the outer periphery of the lens 16. Thereafter, the suction is stopped, and while the lens 16 is held by the gripping claws 25, a predetermined processing is performed on the lens l6.

After processing, the gripping claw 25 of the scroll chuck 24 is released from the grip, and the lens 16 is held only by the suction cylinder 33. Here, the reason why the lens 16 can be held is because the suction tube 33 is in a negative pressure state because although the suction is stopped, the atmospheric air is not introduced. Next, the atmosphere is introduced into the adsorption cylinder 33 via the air suction passage 20. At this time, the stop valve 35 rests on the through hole 34a of the suction puff 34, and the atmosphere comes to exit only from the small hole 35a of the stop valve 35. For this reason, first, the adsorption tube 3
3 extends (descends) due to its own weight and the weight of the lens 16, and then the lens 16 separates from the suction pad 34. This returns the lens 16 to the transport device.

As described above, according to this embodiment, the positioning cylinder 32 for positioning the lens 16 is independent of the operation of the gripping claws 25 of the scroll chuck 24 and is in a fixed state. It never gives birth. Thereby, the lens 16 can be held and processed with high precision. Furthermore, since the suction tube 33 is constructed with a bell rose and a moving mechanism (vacuum pump) is provided, the structure is simple and inexpensive, and the attachment and detachment of the lens 16 can be easily automated.

(Fifth Embodiment) FIG. 5(a) shows a handle device according to this embodiment, in which a scroll handle 24 is used as a gripping mechanism. A gripping claw 25 that grips the outer periphery of the lens 16 and can be opened and closed is provided. In the center of scroll chaseok 24,
A cylindrical positioning cylinder 36 is fixed coaxially with the scroll chuck 24. Tip (lower end) of positioning tube 36
is provided so as to be located near the tip of the gripping claw 25, and can position the lens 16 in the thickness direction (vertical direction in FIG. 5(a)) by coming into contact with one lens surface 16a. .

Furthermore, a cylindrical suction cylinder 37 is fitted coaxially with the positioning cylinder 36 on the outside thereof in an airtight manner and slidable therein. That is, an O-ring is interposed between the positioning cylinder 36 and the suction cylinder 37, and a ring-shaped groove 37a is formed on the inner peripheral surface of the upper end of the suction cylinder 37. ○The ring 38 is engaged to prevent the suction cylinder 37 from falling. The suction tube 37 can suction the lens 16 by bringing its tip into contact with the lens surface 16a.

A base 39 is fixed to the base end (upper end) of the scroll chuck 24 . At the center axis of this base 39,
An air suction passage 40 is formed, and the air suction passage 40
A large diameter valve chamber 40a is formed at the lower end of the valve. The air suction passage 40 communicates with the inside of the positioning cylinder 36 and the suction cylinder 37. Further, the air suction passage 40 is connected to a vacuum pump (not shown). Furthermore, the valve chamber 4
Inside 0a, a circular valve 41 whose plane view is shown in FIG. 5(b) is attached at the upper end of the positioning cylinder 36 so as to be rotatable via a pin 42. The valve 41 has a small hole 41a penetrating through its center.

The valve 41 has a size that can close the upper end opening of the positioning tube 36.

In a chuck device having such a structure, the tip of the suction cylinder 37, which is descending under its own weight, is brought into contact with one lens surface 16a of the lens 16, which is transported by, for example, a transport device (not shown). Then, the lens 16 is suctioned by a vacuum pump through the air suction passage 40, etc., and the lens l6 is suctioned at the tip of the suction tube 37. At this time, the valve 41 is
As shown by the imaginary line in FIG. 5(a), the upper end of the positioning tube 36 is left open. After that, by further performing suction, the suction tube 3 that has suctioned the lens l6
7 is raised, and one lens surface 16a is aligned with the positioning tube 36.
The suction tube 37 is raised until it comes into contact with the tip (lower end) of the suction cylinder 37. Next, the scroll chuck 24 is driven, and the gripping claws 25
The outer periphery of the lens 16 is grasped by closing the lens. after that,
With the suction stopped and the lens 16 held by the gripping claws 25, a predetermined process is performed on the lens 16.

After processing, suction is performed again using the vacuum pump, and the suction cylinder 3
After the lens 16 is suctioned at the tip of the scroll chuck 24, the gripping claw 25 of the scroll chuck 24 is opened to release the grip, and the lens 16 is held only by the suction cylinder 37. Next, the atmosphere is introduced into the adsorption cylinder 37 through the air suction passage 40. At this time, the valve 41 is in a position to close the upper end opening of the positioning tube 36, as shown by the solid line in FIG. 5(a). As a result, the atmosphere introduced into the adsorption cylinder 37 is
It is limited to only those that pass through the small hole 41a of the valve 4l. Therefore, first, the suction cylinder 37 descends while adsorbing the lens 16, and then the lens 16 separates from the suction cylinder 37. This returns the lens 16 to the transport device.

As described above, according to this embodiment, the positioning cylinder 37 for positioning the lens 16 is independent of the operation of the gripping claw 25 of the scroll chuck 24 and is in a fixed state. No variation occurs. Thereby, the lens 16 can be held and processed with high precision. In addition, a moving mechanism (such as a vacuum bomb) for the suction tube 37 is provided, and in the same manner as in the fourth embodiment, vacuum suction is opened and closed by one empty suction passage 40 and a valve 41.
The lens 16 can be attached and detached simply by opening and closing the gripping claws 25, and the structure is simple and inexpensive, and automation can be achieved.

In addition, in the third to fifth embodiments, the scroll chuck 24 was used as the gripping mechanism, but the same effect can be obtained with this or other chuck. Further, in the second to fifth embodiments, the suction cylinders 22, 27, 33.37 may be provided inside or outside the positioning cylinders 21, 26, 32, 36. Furthermore, each adsorption cylinder 18, 22, 27, 33.
Although the tip of 37 is a cylindrical end surface, the present invention is not limited to this embodiment, and can be determined as appropriate depending on the shape of the workpiece to be sucked. In addition, adsorption cylinders 18, 22, 27
．． 37 may be provided with something like a suction pad. On the other hand, the chuck devices shown in FIGS. 4(a) and 5(a) are limited to use with their axes vertical as shown in the figures, but other devices are not limited to this. [Effects of the Invention] As described above, according to the chuck device of the present invention, a suction tube or a positioning tube for positioning the workpiece is provided in a fixed state and is unrelated to the operation of the gripping claws of the gripping mechanism. Therefore, there is no variation in the thickness of the workpiece, and it is possible to hold and process the workpiece with high precision.Especially when a suction tube movement mechanism is installed, it is possible to automate the attachment and detachment of the workpiece. It can be done easily.

[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a partially cutaway side view showing a first embodiment of the chasok device of the present invention, FIG. 2 is a partially cutaway side view showing a second embodiment of the present invention, and FIG. The figure is a partially cutaway side view showing the third embodiment of the present invention, FIG. 4(a) is a partially cutaway side view showing the fourth embodiment of the present invention, and FIG. 5(a) is a partially cutaway side view showing the fifth embodiment of the present invention; FIG. 5(6) is a chuck shown in FIG. 5(a). FIG. 6(a) is a plan view of the valve of the device, and FIG.
b) is a plan view showing essential parts of the chuck device shown in FIG. 33.37... Adsorption cylinder 20.31
．． 40...Air suction passage 2L26, 32.36...Positioning cylinder 23...Compression spring 24...Scroll chunk 29...Air suction pipe 34...Adsorption band 35...Stosop valve 4L... ·valve

Claims (2)

[Claims] (1) In a chuck device that grips the outer circumference of a workpiece,
A gripping mechanism equipped with gripping claws that can be opened and closed to grip the outer periphery of a workpiece, and a suction cylinder located coaxially at the center of this gripping mechanism and capable of freely suctioning a workpiece at its tip and positioning the workpiece. A chuck device characterized by comprising: (2) In a chuck device that grips the outer circumference of a workpiece,
A gripping mechanism equipped with gripping claws that can be opened and closed to grip the outer periphery of a workpiece, a suction cylinder located coaxially at the center of this gripping mechanism and capable of suctioning a workpiece at its tip, and a A chuck comprising: a positioning cylinder located coaxially on the outside to position a workpiece; and a moving mechanism that moves the suction cylinder until the workpiece attracted by the suction cylinder comes into contact with the positioning cylinder. Device.