JPH03102238A - Quartz vibrator humidity sensor - Google Patents
Quartz vibrator humidity sensorInfo
- Publication number
- JPH03102238A JPH03102238A JP23911389A JP23911389A JPH03102238A JP H03102238 A JPH03102238 A JP H03102238A JP 23911389 A JP23911389 A JP 23911389A JP 23911389 A JP23911389 A JP 23911389A JP H03102238 A JPH03102238 A JP H03102238A
- Authority
- JP
- Japan
- Prior art keywords
- polyvinyl alcohol
- photo
- alcohol resin
- quartz
- humidity sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 239000004372 Polyvinyl alcohol Substances 0.000 claims abstract description 14
- 229920002451 polyvinyl alcohol Polymers 0.000 claims abstract description 14
- 239000011347 resin Substances 0.000 claims abstract description 14
- 229920005989 resin Polymers 0.000 claims abstract description 14
- 239000013078 crystal Substances 0.000 claims description 25
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000007864 aqueous solution Substances 0.000 abstract description 3
- 229910052709 silver Inorganic materials 0.000 abstract description 3
- 239000004332 silver Substances 0.000 abstract description 3
- 239000007787 solid Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 2
- 238000004132 cross linking Methods 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- YVXDRFYHWWPSOA-BQYQJAHWSA-N 1-methyl-4-[(e)-2-phenylethenyl]pyridin-1-ium Chemical group C1=C[N+](C)=CC=C1\C=C\C1=CC=CC=C1 YVXDRFYHWWPSOA-BQYQJAHWSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229920005601 base polymer Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は，水晶振動子湿度センサに関する。更に詳しく
は，感度および耐久性を向上せしめた水晶振動子湿度セ
ンサに関する．
〔従来の技術〕および〔発明が解決しようとする課題〕
従来から、水晶振動子表面にポリアミド系重合体よりな
る水分吸着膜を形威せしめた水晶振動子湿度センサが用
いられているが、この水分吸着膜はその製膜性，耐久性
および感度の点で問題がみられる。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a quartz crystal humidity sensor. More specifically, this article relates to a quartz crystal humidity sensor with improved sensitivity and durability. [Prior art] and [Problem to be solved by the invention]
Conventionally, quartz crystal humidity sensors have been used that have a moisture adsorption film made of polyamide polymer on the surface of the crystal oscillator. I see a problem with this.
そこで、本出願人は，こうした問題点のない水分吸着膜
として、各種のプラズマ重合膜またはその還元処理膜（
特開昭６２−１１８２３．７号公報，同６４−５７１４
３号公報など）あるいは各種の有機化合物塗膜（特開昭
６３−４０８３５号公報，同６３−１７３９３６号公報
、同６３−２４３８３４号公報、同６３−２８２６３１
号公報など）を提案している。Therefore, the present applicant has developed various plasma polymerized membranes or their reduction-treated membranes (
JP-A-62-11823.7, JP-A No. 64-5714
3, etc.) or various organic compound coatings (JP-A No. 63-40835, JP-A No. 63-173936, JP-A No. 63-243834, JP-A No. 63-282631)
Publications, etc.) are being proposed.
本発明の目的は，プラズマ重合膜の形成に必要なプラズ
マ重合装置などを必要とはせず、また有機化合物塗膜よ
りも耐久性にすぐれた水分吸着膜を水晶振動子表面に形
成せしめた水晶振動子湿度センサを提供することにある
。The purpose of the present invention is to form a quartz crystal resonator that does not require a plasma polymerization device required for forming a plasma polymerized film, and has a moisture adsorption film that is more durable than an organic compound coating film formed on the surface of a quartz crystal resonator. An object of the present invention is to provide a vibrator humidity sensor.
かかる本発明の目的は、水晶振動子表面に光架橋ポリビ
ニルアルコール系樹脂膜を形威せしめた水晶振動子湿度
センサによって達或される。This object of the present invention is achieved by a quartz crystal oscillator humidity sensor in which a photocrosslinked polyvinyl alcohol resin film is formed on the surface of the quartz crystal oscillator.
水晶振動子としては、ＡＴカット、振動周波数５ＭＨｚ
以上のものが好んで用いられ，それの使用態様の一例が
第１図に平面図として示されており，例えば表面積が約
０．６４４の水晶面２１の真中に銀電極２２が取付けら
れ，裏面側にも取付けられた＃！ｉ電？のそれぞれから
、リード線２３．２３’が引き出されている。As a crystal oscillator, AT cut, vibration frequency 5MHz
The above method is preferably used, and an example of its usage is shown in a plan view in FIG. # Also installed on the side! i-den? Lead wires 23, 23' are drawn out from each of the.
水晶振動子表面への光架橋ポリビニルアルコール系樹脂
膜の形成は、固形分濃度約１〜２０％の光架橋性ポリビ
ニルアルコール系樹脂水溶液の適当量、例えば約１〜１
００μＱをスビナ上にクランプした水晶振動子表面に滴
下し、約１０００〜５０００ｒｐｍの回転数で約１〜１
０秒間回転塗布した後、室温に約１０〜１２０分間放置
してから、波長２７００〜４５００λ、好ましくは３０
００〜３７００大の光を約ｌ〜３００秒間光照射し，光
架橋させることにより行われる。Formation of a photocrosslinkable polyvinyl alcohol resin film on the surface of the crystal resonator is carried out by using an appropriate amount of a photocrosslinkable polyvinyl alcohol resin aqueous solution having a solid content concentration of about 1 to 20%, for example, about 1 to 1%.
Drop 00 μQ onto the surface of a crystal resonator clamped on a subina, and rotate at a rotation speed of about 1000 to 5000 rpm to about 1 to 1
After spin coating for 0 seconds, leave it at room temperature for about 10 to 120 minutes, and then apply a coating with a wavelength of 2700 to 4500λ, preferably 30
This is carried out by irradiating light with a wavelength of 0.00 to 3700 for about 1 to 300 seconds to effect photocrosslinking.
光架橋性ポリビニルアルコール系樹脂としては、完全け
ん化または部分けん化ポリビニルアルコールにスチルバ
ゾリウム基、ジアゾ基などの感光性基を結合せしめたも
の、好ましくは基幹ポリマー中のＯＨの数■がスチルバ
ゾリウム基、例えばスチリルビリジニウム基，スチリル
キノリニウム基などによって置換されたものが用いられ
、ペンダント状に置換されたこれらのスチルバゾリウム
基は光照射によって２量化し、膜状物を形成させる６〔
作用〕および〔発明の効果〕
水晶振動子は、下記式に示されるように，表面に付着し
た物質の重量変化に対応して、その周波数が変化するの
で、このような原理に基いて湿度量を測定することがで
きる。The photocrosslinkable polyvinyl alcohol resin is one in which a photosensitive group such as a stilbazolium group or a diazo group is bonded to a completely saponified or partially saponified polyvinyl alcohol, preferably one in which the number of OH in the base polymer is a stilbazolium group, such as styryl. Those substituted with viridinium groups, styrylquinolinium groups, etc. are used, and these pendantly substituted stilbazolium groups dimerize upon light irradiation to form a film-like substance.
[Operation] and [Effects of the Invention] As shown in the formula below, the frequency of a crystal oscillator changes in response to changes in the weight of the substance attached to its surface. can be measured.
ΔＦ＝Ｋ・Δｍ
ΔＦ二周波数変化量
Δ一二付着重量変化量
Ｋ：定数
本発明に係る水晶振動子湿度センサは，水晶振動子の表
面に光架橋ポリビニルアルコール系樹脂膜を形成させ，
この光架橋ポリビニルアルコール系樹脂膜は多くの水酸
基を残している樹脂から形成された膜であって水分吸着
膜として有効に作用し、従来の有機物系水分吸着膜と比
較して，高感度を示すばかりではなく、架橋構造をとっ
ているため高耐久性をも実現させている。ΔF=K・Δm ΔF2 Frequency change Δ12 Adhesive weight change K: Constant The crystal resonator humidity sensor according to the present invention forms a photo-crosslinked polyvinyl alcohol resin film on the surface of the crystal resonator,
This photo-crosslinked polyvinyl alcohol resin film is a film formed from a resin that retains many hydroxyl groups and acts effectively as a moisture adsorption film, exhibiting higher sensitivity compared to conventional organic moisture adsorption films. Not only that, but the cross-linked structure also makes it highly durable.
次に、実施例について本発明を説明する。 Next, the present invention will be explained with reference to examples.
実施例
固形分濃度１０．５重量２の光架橋性ポリビニルアルコ
ール系樹脂（東洋合成製品ＳＰＰ−Ｌ）水溶液１０μＱ
を、スビナ上にクランプした第１図に示される形状の水
晶振動子（八雲通信工業製、ＡＴカット、振動周波数６
Ｍ Ｈ ｚ ）の電極表面上に滴下し、３０００ｒｐ
ｏ＋．２秒間の条件下で回転塗布した後，室温下に１時
間放置してから、波長４０００大の光を５秒間照射して
光架橋させた。Example 10 μQ of an aqueous solution of photocrosslinkable polyvinyl alcohol resin (SPP-L manufactured by Toyo Gosei) with a solid content concentration of 10.5 weight 2
A crystal resonator of the shape shown in Fig. 1 (manufactured by Yakumo Tsushin Kogyo, AT cut, vibration frequency 6) was clamped on a subina.
MHz) onto the electrode surface and rotated at 3000 rpm.
o+. After spin coating for 2 seconds, the coating was left at room temperature for 1 hour and then irradiated with light with a wavelength of 4000 for 5 seconds to effect photocrosslinking.
このようにして表面に光架橋ポリビニルアルコール系樹
脂膜を形威させたｉ個の水晶振動子２５を用いた周波数
測定回路の一例が第２図に示されており，測定された周
波数が周波数カウンタ２６によって計測されるようにし
た周波数測定装置を２５℃の恒温恒湿槽中に設置し、相
対湿度に対する周波数変化を測定した。An example of a frequency measuring circuit using i crystal oscillators 25 having photo-crosslinked polyvinyl alcohol resin films on their surfaces is shown in FIG. 2, and the measured frequency is detected by a frequency counter. A frequency measuring device designed to measure frequency according to No. 26 was installed in a constant temperature and humidity chamber at 25° C., and changes in frequency with respect to relative humidity were measured.
その結果，相対湿度３０〜９０％の範囲内で，相対湿度
１０％当り約−１００Ｈｚの周波数変化量（ΔＦ）が示
され、相対湿度と周波数変化との間に良好な相関関係が
認められ、この光架橋ポリビニルアルコール系樹脂膜を
形成させた水晶振動子が湿度センサを形威し得ることが
確認された。As a result, within the range of 30 to 90% relative humidity, a frequency change (ΔF) of approximately -100 Hz per 10% relative humidity was shown, and a good correlation was observed between relative humidity and frequency change. It was confirmed that a quartz crystal resonator formed with this photo-crosslinked polyvinyl alcohol resin film could be used as a humidity sensor.
更に，この水晶振動子湿度センサを、湿度９０％の雰囲
気中に４８時間放置した後、再び湿度に対する感度を測
定したが、その感度に変化はみられなかった。Further, after this quartz crystal resonator humidity sensor was left in an atmosphere with a humidity of 90% for 48 hours, the sensitivity to humidity was measured again, but no change was observed in the sensitivity.
第１図は、本発明で用いられる水晶振動子の一態様の平
面図である．また，第２図は、本発明に係る水晶振動子
湿度センサの周波数測定回路の一例である。
（符号の説明）
２１・・・・・水晶面
２２・・・・・銀電極
２４・・・・・水晶振動子
２５・・・・・水晶振動子湿度センサ
２６・・・・・周波数カウンタFIG. 1 is a plan view of one embodiment of a crystal resonator used in the present invention. Moreover, FIG. 2 is an example of a frequency measuring circuit of a crystal resonator humidity sensor according to the present invention. (Explanation of symbols) 21...Crystal surface 22...Silver electrode 24...Crystal oscillator 25...Crystal oscillator humidity sensor 26...Frequency counter
Claims (1)
脂膜を形成せしめてなる水晶振動子湿度センサ。1. A quartz crystal oscillator humidity sensor formed by forming a photocrosslinked polyvinyl alcohol resin film on the surface of a quartz crystal oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23911389A JP2773292B2 (en) | 1989-09-14 | 1989-09-14 | Quartz crystal humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23911389A JP2773292B2 (en) | 1989-09-14 | 1989-09-14 | Quartz crystal humidity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03102238A true JPH03102238A (en) | 1991-04-26 |
| JP2773292B2 JP2773292B2 (en) | 1998-07-09 |
Family
ID=17039991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23911389A Expired - Fee Related JP2773292B2 (en) | 1989-09-14 | 1989-09-14 | Quartz crystal humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2773292B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5339675A (en) * | 1992-10-08 | 1994-08-23 | Millipore Corporation | Apparatus for monitoring impurities in a gas stream |
| JP2018105689A (en) * | 2016-12-26 | 2018-07-05 | 太陽誘電株式会社 | Living body monitoring device and method for analyzing urine |
-
1989
- 1989-09-14 JP JP23911389A patent/JP2773292B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5339675A (en) * | 1992-10-08 | 1994-08-23 | Millipore Corporation | Apparatus for monitoring impurities in a gas stream |
| JP2018105689A (en) * | 2016-12-26 | 2018-07-05 | 太陽誘電株式会社 | Living body monitoring device and method for analyzing urine |
| WO2018123296A1 (en) * | 2016-12-26 | 2018-07-05 | 太陽誘電株式会社 | Biological monitoring device and urine analyzing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2773292B2 (en) | 1998-07-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |