JPH03101515U - - Google Patents

Info

Publication number
JPH03101515U
JPH03101515U JP933090U JP933090U JPH03101515U JP H03101515 U JPH03101515 U JP H03101515U JP 933090 U JP933090 U JP 933090U JP 933090 U JP933090 U JP 933090U JP H03101515 U JPH03101515 U JP H03101515U
Authority
JP
Japan
Prior art keywords
chemical liquid
suction pipe
pumping
air vent
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP933090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH083003Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP933090U priority Critical patent/JPH083003Y2/ja
Publication of JPH03101515U publication Critical patent/JPH03101515U/ja
Application granted granted Critical
Publication of JPH083003Y2 publication Critical patent/JPH083003Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP933090U 1990-01-31 1990-01-31 半導体における処理薬液の汲み上げ装置 Expired - Fee Related JPH083003Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP933090U JPH083003Y2 (ja) 1990-01-31 1990-01-31 半導体における処理薬液の汲み上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP933090U JPH083003Y2 (ja) 1990-01-31 1990-01-31 半導体における処理薬液の汲み上げ装置

Publications (2)

Publication Number Publication Date
JPH03101515U true JPH03101515U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-23
JPH083003Y2 JPH083003Y2 (ja) 1996-01-29

Family

ID=31512937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP933090U Expired - Fee Related JPH083003Y2 (ja) 1990-01-31 1990-01-31 半導体における処理薬液の汲み上げ装置

Country Status (1)

Country Link
JP (1) JPH083003Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH083003Y2 (ja) 1996-01-29

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Legal Events

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