JPH03100911A - Production of thin-film head for perpendicular magnetic recording and reproducing - Google Patents
Production of thin-film head for perpendicular magnetic recording and reproducingInfo
- Publication number
- JPH03100911A JPH03100911A JP23670289A JP23670289A JPH03100911A JP H03100911 A JPH03100911 A JP H03100911A JP 23670289 A JP23670289 A JP 23670289A JP 23670289 A JP23670289 A JP 23670289A JP H03100911 A JPH03100911 A JP H03100911A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- protective layer
- magnetic
- pole
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000011241 protective layer Substances 0.000 claims abstract description 34
- 239000010410 layer Substances 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 230000004907 flux Effects 0.000 claims abstract description 15
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 6
- 239000011229 interlayer Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 8
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概 要〕
垂直磁化記録方式の磁気ディスク装置等に用いられる薄
膜磁気ヘッドの製造方法、特に記録再生効率の良好な垂
直磁気記録再生用薄膜ヘッドの製造方法に関し、
厚くて幅広く媒体対向面積の大きい磁束リターン用上部
磁極の形成を簡単、かつ容易にして、薄膜ヘッドの記録
再生効率を向上させることを目的とし、
非磁性基板上に主磁極を形成し、該主磁極上にその後端
部を露出した形で第一層間絶縁層と薄膜コイル及び第二
層間絶縁層を順次積層形成した後、前記露出した主磁極
後端部上に接続磁極を形成する工程と、該接続磁極を形
成した非磁性基板上を保護層により被った後、該保護層
の表面を接続磁極が露出するように平坦に研磨仕上げす
る工程と、その平坦化した保護層上に先端部を媒体対向
面より所定寸法分だけ後退させた位置で、接続磁極と接
続するように磁性フェライトからなる磁束リターン用上
部磁極を接着する工程と、前記主磁極先端部の不要長さ
部分を保護層及び直下の非磁性基板と共に切除する工程
とを含み構成する。[Detailed Description of the Invention] [Summary] This invention relates to a method for manufacturing a thin film magnetic head used in a perpendicular magnetic recording type magnetic disk device, etc., particularly a method for manufacturing a thin film head for perpendicular magnetic recording and reproducing with good recording and reproducing efficiency. The main magnetic pole is formed on a non-magnetic substrate, and the main magnetic pole is formed on a non-magnetic substrate. After sequentially laminating a first interlayer insulating layer, a thin film coil, and a second interlayer insulating layer with their rear ends exposed, forming a connecting magnetic pole on the exposed rear end of the main pole; After covering the nonmagnetic substrate on which the connecting magnetic pole is formed with a protective layer, the surface of the protective layer is polished to a flat surface so that the connecting magnetic pole is exposed, and the tip is placed on the flattened protective layer. At a position set back by a predetermined dimension from the medium facing surface, a step of gluing a magnetic flux return upper magnetic pole made of magnetic ferrite so as to connect with the connecting magnetic pole, and a protective layer and a protective layer are applied to the unnecessary length of the tip of the main magnetic pole. The structure includes a step of cutting together with the non-magnetic substrate immediately below.
本発明は垂直磁化記録方式の磁気ディスク装置等に用い
られる薄膜磁気ヘッドの製造方法に係り、特に記録再生
効率の良好な垂直磁気記録再生用薄膜ヘッドの製造方法
に関するものである。The present invention relates to a method of manufacturing a thin film magnetic head used in a perpendicular magnetic recording type magnetic disk device, and more particularly to a method of manufacturing a thin film head for perpendicular magnetic recording and reproducing with good recording and reproducing efficiency.
近来、磁気ディスク装置においては高密度化に伴い、一
般に広く用いられている水平磁気記録方式の薄膜磁気ヘ
ッドに比べて、原理的に高密度記録が可能な垂直磁気記
録方式の薄膜磁気ヘッドが提案されている。In recent years, as the density of magnetic disk drives has increased, a perpendicular magnetic recording thin-film magnetic head has been proposed, which is theoretically capable of higher density recording than the generally widely used horizontal magnetic recording thin-film magnetic head. has been done.
このような薄膜磁気ヘッドも高密度記録化に伴って十分
な記録再生出力が得られ難くなる傾向にある。このため
、記録再生効率が良く、かつ高出力で良好な再生波形が
得られる垂直磁気記録再生用の単磁極型′ｗｉ膜ヘッド
を製造する方法が必要とされている。Such thin film magnetic heads also tend to have difficulty in obtaining sufficient recording and reproducing outputs as recording density increases. Therefore, there is a need for a method for manufacturing a single-pole type 'wi film head for perpendicular magnetic recording and reproducing which has good recording and reproducing efficiency and provides high output and good reproduced waveforms.
上記した従来の単磁極型の垂直磁気記録再生用薄膜ヘッ
ドは、第２図（ａ）に示すようにセラミック等からなる
非磁性基板１１上にＮｉ−Ｆｅ膜からなる記録再生用の
主磁極１２を形成し、その主磁極１２上に熱硬化性樹脂
材からなる第一層間絶縁層１３を介して渦巻状、または
螺旋状の薄膜コイル１４と第二層間絶縁層１５を順次積
層形成した後、該第二層間絶縁層１５上に該主磁極１２
よりも厚いＮｉ−Ｆｅ膜からなる磁束リターン用の上部
磁極１６を、その先端部１６ａは後述する媒体対向面１
８より内方へ所定寸法だけ後退した形に、また後端部１
６ｂが前記主磁極１２の後端部１２ｂと接続するように
形成する。In the conventional single-pole type perpendicular magnetic recording/reproducing thin film head described above, as shown in FIG. After forming a spiral or helical thin film coil 14 and a second interlayer insulating layer 15 in sequence on the main magnetic pole 12 via a first interlayer insulating layer 13 made of a thermosetting resin material. , the main magnetic pole 12 is disposed on the second interlayer insulating layer 15.
The upper magnetic pole 16 for magnetic flux return is made of a thicker Ni-Fe film, and its tip 16a is connected to the medium facing surface 1, which will be described later.
8, and the rear end 1
6b is formed so as to be connected to the rear end portion 12b of the main magnetic pole 12.
しかる後、これら基板１１上の全面にへ１２０３等から
なる保護層１７を厚く形成すると共に、第２図（ｂ）に
示すようにその保護層１７の表面を平坦に研磨仕上げし
、更に前記主磁極先端部１６ａの不要長さ部分を図中の
一点鎖線Ａで示す位置で保護層１７及び直下の非磁性基
板１１と共に切除し、その切除面を媒体対向面１８とす
るヘッドスライダ形状に研磨仕上げ加工を行うことによ
って第２図（Ｃ）に示すように完成させている。Thereafter, a thick protective layer 17 made of 1203 or the like is formed on the entire surface of these substrates 11, and the surface of the protective layer 17 is polished to a flat finish as shown in FIG. 2(b). The unnecessary length portion of the magnetic pole tip 16a is cut off along with the protective layer 17 and the non-magnetic substrate 11 directly below at the position indicated by the dashed line A in the figure, and the cut surface is polished into a head slider shape with the medium facing surface 18. By processing, it is completed as shown in FIG. 2(C).
ところで上記したような従来の単磁極型の垂直磁気記録
再生用薄膜ヘッドでは、記録再生特性の向上のためには
前記磁束リターン用の上部磁極１６を厚く、また幅広く
形成し、媒体対向面積を大きくして記録再生効率を高め
る必要がある。By the way, in the conventional single-pole type thin film head for perpendicular magnetic recording and reproducing as described above, in order to improve the recording and reproducing characteristics, the upper magnetic pole 16 for magnetic flux return is formed thick and wide to increase the area facing the medium. It is necessary to increase the recording and reproducing efficiency.
しかしながら、該磁束リターン用の上部磁極１６をスパ
ッタリング法やマスクめっき法等により数十μｍ程度の
厚さの膜厚に形成するには、その成膜工程に長時間を要
し、良好な膜を得ることが困難であった。また膜厚を厚
くするとバターニング時に該上部磁極１６の先端部１６
ａの形状が第２図（Ｃ）に示すようにオーバーハング状
となり、かかる上部磁極１６上に保護層１７を形成した
場合に、前記オーバーハング部分の保護１１１７にＭ（
す）などの微小な空洞等の欠陥が発生し、該欠陥に起因
してその保護層部分に欠け、或いは剥離等が生じ易いと
いった構造上の問題があった。However, in order to form the upper magnetic pole 16 for magnetic flux return to a film thickness of several tens of micrometers by sputtering method, mask plating method, etc., the film forming process requires a long time and a good film cannot be obtained. It was difficult to obtain. Also, if the film thickness is increased, the tip 16 of the upper magnetic pole 16 will be removed during buttering.
When the shape of a becomes an overhang shape as shown in FIG. 2(C) and the protective layer 17 is formed on the upper magnetic pole 16, M(
There are structural problems in that defects such as minute cavities such as (2) are generated, and the protective layer is likely to be chipped or peeled off due to the defects.
本発明は上記した従来の問題点に鑑み、厚くて幅広い媒
体対向面積の大きい磁束リターン用上部磁極の形成を簡
単、かつ容易にして、記録再生効率の向上を図った新規
な垂直磁気記録再生用薄膜ヘッドの製造方法を提供する
ことを目的とするものである。In view of the above-mentioned conventional problems, the present invention provides a new perpendicular magnetic recording and reproducing device that improves recording and reproducing efficiency by simplifying and facilitating the formation of a thick and wide upper magnetic flux return pole with a large area facing the medium. The object of the present invention is to provide a method for manufacturing a thin film head.
本発明は上記した目的を達成するため、非磁性基板上に
主磁極を形成し、該主磁極上にその後端部を露出した形
で第一層間絶縁層と薄膜コイル及び第二層間絶縁層を順
次積層形成した後、前記露出した主磁極後端部上に接続
磁極を形成する工程と、該接続磁極を形成した非磁性基
板上を保護層により被った後、該保護層の表面を接続磁
極が露出するように平坦に研磨仕上げする工程と、その
平坦化した保護層上に先端部を媒体対向面より所定寸法
分だけ後退させた位置で、接続磁極と接続するように磁
性フェライトからなる磁束リターン用上部磁極を接着す
る工程と、前記主磁極先端部の不要長さ部分を保護層及
び直下の非磁性基板と共に切除する工程とを含み構成す
る。In order to achieve the above object, the present invention forms a main magnetic pole on a non-magnetic substrate, and a first interlayer insulating layer, a thin film coil and a second interlayer insulating layer are formed on the main magnetic pole with their rear ends exposed. A step of forming a connecting magnetic pole on the exposed rear end of the main magnetic pole after sequentially laminating the above, and a step of covering the non-magnetic substrate on which the connecting magnetic pole is formed with a protective layer, and then connecting the surface of the protective layer. A step of polishing the magnetic pole to make it flat so that it is exposed, and then placing a magnetic ferrite layer on the flattened protective layer so that the tip is connected to the connecting magnetic pole at a position where the tip is set back from the medium facing surface by a predetermined distance. The method includes a step of adhering an upper magnetic pole for magnetic flux return, and a step of cutting off an unnecessary length of the tip of the main pole together with a protective layer and a non-magnetic substrate immediately below.
本発明の製造方法では、主磁極、薄膜コイル及び接続磁
極等が形成された全非磁性基板上に、更に保護層を形成
し、その保護層の表面を接＊Ｎ極が露出するように平坦
化した後、その平坦面に予め成形した厚くて幅広い均一
な形状の磁性フェライトからなる磁束リターン用上部磁
極を接着しているため、従来のような保護層の欠け、剥
離等が生ずることなく、厚い磁束リターン用上部磁極を
容易に、かつ簡単に形成することができる。その結果、
該上部磁極の容積及び媒体対向面が大きくでき、上部磁
極と媒体間の磁気抵抗を下げることができるので、記録
再生効率が向上する。In the manufacturing method of the present invention, a protective layer is further formed on the entire non-magnetic substrate on which the main magnetic pole, thin film coil, connecting magnetic pole, etc. are formed, and the surface of the protective layer is flattened so that the N pole is exposed. After that, a magnetic flux return upper magnetic pole made of pre-formed thick and wide uniformly shaped magnetic ferrite is adhered to the flat surface, so there is no chipping or peeling of the protective layer as in conventional methods. A thick upper magnetic flux return pole can be easily and easily formed. the result,
The volume of the upper magnetic pole and the surface facing the medium can be increased, and the magnetic resistance between the upper magnetic pole and the medium can be lowered, so that recording and reproducing efficiency is improved.
以下図面を用いて本発明の実施例について詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図（ａ）〜（ＩＪは本発明に係る垂直磁気記録再生
用薄膜ヘッドの製造方法の一実施例を工程順に示す要部
側断面図である。FIGS. 1A to 1J are side sectional views of essential parts showing, in order of steps, an embodiment of a method for manufacturing a thin film head for perpendicular magnetic recording and reproducing according to the present invention.
第１図（ａｌに示すように、先ずスライダとなる例えば
セラミック等からなる非磁性基板２１上にＮｉ−Ｆｃ膜
からなる記録再生用の主磁極２２を形成し、その主磁極
２２上にその先端部２２ａ及び後端部２２ｂを露出した
形に熱硬化性樹脂材からなる第一層間絶縁層２３を介し
て渦巻状、または螺旋状の薄膜コイル２４と第二層間絶
縁層２５を順次積層形成した後、前記主磁極後端部２２
ｂ上にＮｉ−Ｆｅ膜からなる接続磁極２６をマスクめっ
き法等により形成する。As shown in FIG. 1 (al), first, a main magnetic pole 22 for recording and reproducing made of a Ni-Fc film is formed on a non-magnetic substrate 21 made of, for example, ceramic, which will become a slider, and the tip of the main magnetic pole 22 is placed on the main magnetic pole 22. A spiral or helical thin film coil 24 and a second interlayer insulating layer 25 are sequentially laminated via a first interlayer insulating layer 23 made of a thermosetting resin material with the portion 22a and rear end 22b exposed. After that, the main magnetic pole rear end portion 22
A connecting magnetic pole 26 made of a Ni--Fe film is formed on b by mask plating or the like.
引き続き該接続磁極２６を含む全非磁性基板２１上に例
えばＡ ＩＩ ｚＯ＋等からなる保護層２７を厚く形成
する。Subsequently, a thick protective layer 27 made of, for example, A II zO+ is formed on the entire nonmagnetic substrate 21 including the connecting magnetic pole 26 .
しかる後、第１図（ｂｌに示すように該保護層２７を数
十μｍの膜厚に研磨してその表面を前記接続磁極２６が
露出するように平坦に仕上げる。Thereafter, as shown in FIG. 1 (bl), the protective layer 27 is polished to a thickness of several tens of micrometers, and its surface is finished flat so that the connecting magnetic pole 26 is exposed.
そして平坦化した保護層２７上に、１００μｍ程度の厚
さで、かつ幅の広いＭ ｎ −Ｚ ｎ ％或いはＮｉ−
Ｚｎ等の磁性フェライトからなるブロック状の磁束リタ
ーン用上部磁極２８を、その先端部が媒体対向面（或い
は主磁極先端部２２ａ）より所定寸法分だけ内方へ後退
させた位置で、前記接続磁極２６と接続するように例え
ば熱硬化性樹脂等からなる接着剤により接着固定する。Then, on the flattened protective layer 27, a Mn-Zn% or Ni- layer with a thickness of about 100 μm and a wide width is applied.
A block-shaped upper magnetic flux return magnetic pole 28 made of magnetic ferrite such as Zn is connected to the connection magnetic pole at a position where its tip is retreated inward by a predetermined distance from the medium facing surface (or the main magnetic pole tip 22a). 26 and is bonded and fixed using an adhesive made of, for example, thermosetting resin.
次に前記主磁極先端部２２ａの不要長さ部分を図中の一
点鎖線Ｂで示す位置で保護層２７及び直下の非磁性基板
２１と共に切除し、その切除面を媒体対向面２９とする
ヘッドスライダ形状に研磨仕上げ加工を行って第１図（
Ｃ）に示すように完成させる。Next, the unnecessary length portion of the main pole tip 22a is cut away along with the protective layer 27 and the non-magnetic substrate 21 immediately below at the position indicated by the dashed line B in the figure, and the cut surface becomes the medium facing surface 29 of the head slider. The shape is polished and finished as shown in Figure 1 (
Complete as shown in C).
かくすれば、厚い磁束リターン用上部磁極２８の形成が
簡単化され、しかも従来例で問題となっていた保護層の
欠け、剥離等が解消される等、記録再生効率及び信頼性
の良い単磁極形の垂直磁気記録再生用薄膜ヘッドを容易
に得ることが可能となる。This simplifies the formation of the thick upper magnetic flux return pole 28, and eliminates the problems of chipping and peeling of the protective layer, which were problems in the conventional example, resulting in a single magnetic pole with good recording and reproducing efficiency and reliability. It becomes possible to easily obtain a thin film head for perpendicular magnetic recording/reproduction of the shape.
以上の説明から明らかなように、本発明に係る垂直磁気
記録再生用薄膜ヘッドの製造方法によれば、磁束リター
ン用上部磁極の形成工程が簡単化され、厚い均一な形状
の磁束リターン用上部磁極を容易に形成することができ
るため、記録再生効率が向上する。また従来の如き保護
層の欠け、剥離等も解消され、記録再生特性及び信頼性
が向上し、工数が低減できる等、実用上優れた効果を奏
する。As is clear from the above description, according to the method of manufacturing a thin film head for perpendicular magnetic recording and reproducing according to the present invention, the process of forming the upper magnetic flux return pole is simplified, and the upper magnetic flux return pole has a thick and uniform shape. can be easily formed, improving recording and reproducing efficiency. In addition, chipping and peeling of the protective layer as in the prior art are eliminated, recording and reproducing characteristics and reliability are improved, and the number of man-hours can be reduced, resulting in excellent practical effects.
第１図（ａ）〜（Ｃ）は本発明に係る垂直磁気記録再生
用薄膜ヘッドの製造方法の一実施例を
工程順に示す要部側断面図、
第２図（ａｌ〜（Ｃ）は従来の垂直磁気記録再生用薄膜
ヘッドの製造方法を工程順に示す要部
側断面図である。
第１図（ａ）〜（ｅ）において、
２１は非磁性基板、２２は主磁極、２３は第一層間絶縁
層、２４は薄膜コイル、２５は第二層間絶縁層、２６は
接続磁極、２７は保護層、２８は上部磁極をそれぞれ示
す。1(a) to 1(C) are side cross-sectional views of main parts showing an embodiment of the manufacturing method of a thin film head for perpendicular magnetic recording and reproducing according to the present invention in the order of steps, and FIGS. 1A to 1E are side cross-sectional views of main parts showing a manufacturing method of a thin film head for perpendicular magnetic recording and reproducing in the order of steps. In FIGS. An interlayer insulating layer, 24 a thin film coil, 25 a second interlayer insulating layer, 26 a connecting magnetic pole, 27 a protective layer, and 28 an upper magnetic pole.
Claims (1)
磁極（２２）上にその後端部（２２ｂ）を露出した形で
第一層間絶縁層（２３）と薄膜コイル（２４）及び第二
層間絶縁層（２５）を順次積層形成した後、前記露出し
た主磁極後端部（２２ｂ）上に接続磁極（２６）を形成
する工程と、 該接続磁極（２６）を形成した非磁性基板上を保護層（
２７）により被った後、該保護層（２７）の表面を接続
磁極（２６）が露出するように平坦に研磨仕上げする工
程と、 その平坦化した保護層（２７）上に先端部を媒体対向面
より所定寸法分だけ後退させた位置で、接続磁極（２６
）と接続するように磁性フェライトからなる磁束リター
ン用上部磁極（２８）を接着する工程と、前記主磁極先
端部の不要長さ部分を保護層（２７）及び直下の非磁性
基板（２１）と共に切除する工程とを含むことを特徴と
する垂直磁気記録再生用薄膜ヘッドの製造方法。[Claims] A main magnetic pole (22) is formed on a non-magnetic substrate (21), and a first interlayer insulating layer (23) is formed on the main magnetic pole (22) with its rear end (22b) exposed. ), a thin film coil (24), and a second interlayer insulating layer (25) are sequentially laminated, and then a connecting magnetic pole (26) is formed on the exposed rear end portion (22b) of the main magnetic pole; A protective layer (
27), the surface of the protective layer (27) is polished to a flat surface so that the connecting magnetic pole (26) is exposed, and the tip is placed on the flattened protective layer (27) so as to face the medium. Connecting magnetic pole (26
) and bonding the upper magnetic pole for magnetic flux return (28) made of magnetic ferrite so as to connect with the main magnetic pole, and the unnecessary length of the tip of the main pole is bonded together with the protective layer (27) and the non-magnetic substrate (21) directly below. 1. A method of manufacturing a thin film head for perpendicular magnetic recording and reproducing, the method comprising the step of cutting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23670289A JPH03100911A (en) | 1989-09-11 | 1989-09-11 | Production of thin-film head for perpendicular magnetic recording and reproducing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23670289A JPH03100911A (en) | 1989-09-11 | 1989-09-11 | Production of thin-film head for perpendicular magnetic recording and reproducing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03100911A true JPH03100911A (en) | 1991-04-25 |
Family
ID=17004500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23670289A Pending JPH03100911A (en) | 1989-09-11 | 1989-09-11 | Production of thin-film head for perpendicular magnetic recording and reproducing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03100911A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7120988B2 (en) | 2003-09-26 | 2006-10-17 | Hitachi Global Storage Technologies Netherlands B.V. | Method for forming a write head having air bearing surface (ABS) |
| US7296337B2 (en) | 2004-05-25 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Notched trailing shield for perpendicular write head |
-
1989
- 1989-09-11 JP JP23670289A patent/JPH03100911A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7120988B2 (en) | 2003-09-26 | 2006-10-17 | Hitachi Global Storage Technologies Netherlands B.V. | Method for forming a write head having air bearing surface (ABS) |
| US7296337B2 (en) | 2004-05-25 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Notched trailing shield for perpendicular write head |
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