JPH0297744U - - Google Patents
Info
- Publication number
- JPH0297744U JPH0297744U JP505389U JP505389U JPH0297744U JP H0297744 U JPH0297744 U JP H0297744U JP 505389 U JP505389 U JP 505389U JP 505389 U JP505389 U JP 505389U JP H0297744 U JPH0297744 U JP H0297744U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- beam device
- ion gun
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989005053U JPH0737233Y2 (ja) | 1989-01-20 | 1989-01-20 | 集束イオンビーム装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989005053U JPH0737233Y2 (ja) | 1989-01-20 | 1989-01-20 | 集束イオンビーム装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0297744U true JPH0297744U (de) | 1990-08-03 |
JPH0737233Y2 JPH0737233Y2 (ja) | 1995-08-23 |
Family
ID=31208093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989005053U Expired - Lifetime JPH0737233Y2 (ja) | 1989-01-20 | 1989-01-20 | 集束イオンビーム装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0737233Y2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1196951A (ja) * | 1997-09-25 | 1999-04-09 | Hitachi Ltd | 倍率制御型荷電粒子ビーム照射装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63187542A (ja) * | 1987-01-28 | 1988-08-03 | Hitachi Ltd | イオンマイクロビ−ム装置 |
-
1989
- 1989-01-20 JP JP1989005053U patent/JPH0737233Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63187542A (ja) * | 1987-01-28 | 1988-08-03 | Hitachi Ltd | イオンマイクロビ−ム装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1196951A (ja) * | 1997-09-25 | 1999-04-09 | Hitachi Ltd | 倍率制御型荷電粒子ビーム照射装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0737233Y2 (ja) | 1995-08-23 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |