JPH029553Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to an apparatus for intermittently transferring a frame such as a lead frame one pitch at a time to a bonding station during wire or die bonding.

(Prior Art) Conventionally, when bonding wires or dies, frames such as lead frames have been transferred using the apparatus shown in FIGS. 4 and 5. In the figure, the feed arm 1 has a slide shaft 3 that is slidably inserted into a slide block 2. A holding column 4 is fixed upright at both ends of the slide shaft 3, and the upper end of the holding column 4 is An arm 6 extends above the lead frame 5 from above.
A feed pin 7 is fixed to the tip of the arm 6, and this feed pin 7 faces the feed hole 8 of the lead frame 5. The feed arm 1 composed of these members includes a vertical drive means (not shown) that moves the slide block 2 up and down, and a feed arm 1.
In combination with the feed driving means 9 which reciprocates in the horizontal direction, that is, the longitudinal direction of the lead frame 5, the gate motion, that is, the descent of the arm 6 to cause the feed pin 7 to enter the feed hole 8, and the arm 6 in the transfer direction, retraction of the feed pin 7 from the feed hole 8 by raising the arm 6, and return movement of the arm 6 by one pitch, and by repeating this gate motion, The lead frame 5 is guided by a guide rail 10 and is intermittently transferred one pitch at a time to a bonding station, and bonding between the semiconductor (IC chip) 11 on the lead frame 5 and the leads 12 around it is performed.

By the way, the vertical driving means moves the slide block to the guide shaft 1 by cylinder driving or cam driving.
3. Similarly, the feed drive means 9 also engages the piston shaft 15 of the cylinder 14 with the holding column 4 of the feed arm 1, and moves the feed arm 1 by driving the cylinder, or an actuating rod that swings by a cam. Let the feed arm 1 follow the
It is known that the feed arm 1 is moved by this cam drive. In both of these feed drive means 9, the amount of movement (transfer amount) of the feed arm 1 is set fixedly and cannot be easily changed.

(Problems to be Solved by the Invention) In recent years, various types of semiconductors have been used in various sectors, and for this reason, it has become necessary to bond different types of semiconductors using a common bonding device. By the way, as is well known, the pitch interval of the feed holes 8 of the lead frame 5 differs depending on the type of semiconductor 11. However, in the conventional device, the transfer amount of the arm 6 is smaller than the cylinder 14.
Since the cylinder stroke amount is fixedly set by the stroke amount or the amount of swing of the actuating rod by the cam, each time a different type of lead frame 5 is transferred, the cylinder stroke amount must be replaced with a cylinder device with a different stroke amount or difficult. The amount of oscillation had to be adjusted by changing the length of the actuating rod or replacing cams with different amounts of eccentricity.

However, replacing such cams, etc. is very troublesome, and adjusting the stroke amount and the amount of swing of the actuating rod is an extremely difficult task that requires skill. There was a problem that it was not possible.

The present invention was developed in consideration of the above problems, and when the type of frame such as a lead frame is changed, the amount of movement of the feed arm can be changed extremely easily by matching the pitch spacing after the change. It is also an object to provide a frame transfer device for a bonding device that can be changed quickly and accurately.

(Means for solving the problems) In order to solve the above problems, the present invention is configured as follows. That is, the present invention includes a feed arm including a slide shaft that can freely slide on a slide block and a feed pin that goes in and out of a feed hole in a frame, and a vertical drive means that moves the feed arm in the vertical direction by raising and lowering the slide block. In a frame transfer device for a bonding apparatus, the frame transfer device includes a feed drive means for reciprocating a feed arm in the horizontal direction, and intermittently transfers the frame by gate motion of the feed arm. a coil provided on either one of the two sides, an iron core that fits relatively movably with the coil provided on the other side of the two, and a detection sensor that detects the position and movement speed of the feed arm; This is a frame transfer device for a bonding device that includes a control circuit that controls a drive current to a coil based on a detection signal from a detection sensor.

(Function) In the present invention having the above configuration, the vertical movement of the feed arm is performed by the vertical drive means as in the conventional device. In addition, the horizontal movement of the feed arm is achieved by supplying a drive current to the coil.
A so-called linear motor action is produced between the coil and the iron core, and the feeding arm is moved by the attraction force of this linear motor action using the slide block as a guide. Then, by changing the polarity of the voltage applied to the coil, the feed arm moves in the opposite direction and returns to its original position. The gate motion of the feed arm is performed by the combination of vertical movement and horizontal movement of the feed arm.
Intermittent transport of frames is achieved.

In this case, the amount of movement of the feed arm depends on the magnitude of the drive current supplied to the coil, but by inputting the pitch interval of the frame to be transferred into the control circuit in advance, the control circuit can control the amount of movement from the detection sensor. Based on the information, that is, the position and movement speed of the feed arm, the optimum supply current value is calculated from moment to moment, and the coil is driven by this calculated current, thereby achieving accurate intermittent transfer of the frame. Ru. Even if the type of frame is changed during frame transfer, by inputting the changed pitch interval into the control circuit, the transfer amount of the feed arm can be extremely easily, quickly and accurately adjusted to the changed pitch. This makes it possible to match the spacing.

(Example) Hereinafter, an example of the present invention will be described based on the drawings. Note that the same members as those in the conventional device are given the same reference numerals and their explanations will be omitted.

FIG. 1 shows a first embodiment of the present invention, in which the means for vertically driving the feed arm 1 is constructed in the same manner as in the conventional device, and therefore the slide block 2 can be moved vertically by a cam or cylinder device. It is becoming.

On the other hand, the feed driving means, which is characteristic of the present invention, is constructed as follows in this embodiment. First, feed arm 1 is attached to slide block 2.
A slide shaft 3 is slidably fitted into the slide shaft 3 via a ball 16, and coils 17 are fitted into the slide shaft 3 at positions on both sides of the slide block 2. One end of this coil 17 is fixed to the end face of the slide block 2, and
A certain minute gap is interposed between the slide shaft 3 and the coil 17, so that the coil 17 and the slide shaft 3 can move relative to each other. The coil 17 is connected to a drive circuit 18, and by providing polarity as shown in the figure, the coil 1 is connected to the slide shaft 3 which functions as an iron core.
A linear motor action occurs between the slide shaft 3 and the coil 17, and the relative movement between the slide shaft 3 and the coil 17 causes the feed arm 1 to move in a predetermined direction. Also, in this case, the coil 17
By reversing the polarity of the applied voltage, the feed arm 1 moves back in the opposite direction.

Information on the moving position and moving speed of the feed arm 1 is detected by a detection sensor 19. This detection sensor 19 includes a linear scale 20 fixed to the end of the holding column 4 of the feed arm 1, and a pair of light emitting elements (not shown) fixed to the slide block 2 side and arranged oppositely on both sides of the linear scale 20. ) and a light receiving element 21. Therefore, the amount of movement of the feed arm 1, that is, the amount of movement of the linear scale 20, is transmitted to the light receiving element 21 as a light pulse signal.
The light pulse signal is detected by the light receiving element 21 and converted into an electrical signal. This electric signal is then amplified as appropriate and output to the control circuit 23.

The control circuit 23 constantly calculates the moving position and moving speed of the feed arm 1 based on the pulse count value, pulse interval time, etc. based on the information of the detection signal from the detection sensor, and calculates the value of the drive current to be supplied to the coil 17. is commanded to the drive circuit 18.

Therefore, by presetting the transfer amount of the feed arm 1, that is, the value of the feed hole pitch of the lead frame, in the control circuit 23 such as a computer, the control circuit 23 takes into consideration this preset value and the detection signal. is used to calculate and command the optimum drive current to the coil 17, and the amount of movement of the feed arm 1 becomes extremely accurate.

Furthermore, even if the type of lead frame 5 is changed, by inputting the value of the sprocket hole pitch of the lead frame 5 after the change into the control circuit 23, the control circuit 23 will work effectively and adjust the pitch interval after the change. By matching them, the transfer drive of the feed arm 1 can be performed reliably. As a result, when the type of lead frame 5 is changed, the troublesome part replacement and adjustment labor required in the conventional device can be effectively eliminated.

As described above, the amount of movement of the feed arm 1 is effectively controlled by using the coil 17, but the timing of the start of the feed is given by means such as a cam as in the conventional device.

FIG. 3 shows a second embodiment of the invention. In the description of this embodiment, the same members as those of the conventional device and the first embodiment are designated by the same reference numerals, and the explanation thereof will be omitted.

The difference between this second embodiment and the first embodiment is as follows:
This is because the iron core that performs the linear motor function is provided separately and independently without being used also as the slide shaft 3. That is, in FIG. 3, the end of the coil 17 is fixed to the end surface of the holding column 4 of the feed arm 1, while the iron core 24 having an E-shaped cross section is fixed to the wall surface on the slide block 2 side. ing. The coil 17 is fitted into the central magnetized leg 24a of the iron core 24 so as to be relatively movable, and the outer leg 24a of the iron core 24
A magnet 25 facing the coil 17 is fixed to the inner surface of the tip of the coil 4b.

In the second embodiment having the above configuration, the drive current to the coil 17 is controlled by the control circuit 23 in the same manner as in the first embodiment, ensuring an accurate transfer amount of the feed arm 1, and the lead frame 5 Even if there is a change in the product type, the change in transfer amount can be handled extremely easily, quickly and accurately without being forced to perform troublesome work. In the above explanation, the case where a linear motor is used has been explained, but the present invention can be similarly implemented using a pulse motor.

(Effects of the invention) Since the present invention is configured as explained above, even if the type of frame is changed when transporting frames such as lead frames, cams etc., which were indispensable in conventional equipment, can be used. There is no need to replace parts or difficult adjustment work associated with such replacement, and it is possible to change the transfer amount extremely easily, quickly and accurately.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing the first embodiment of the present invention, FIG. 2 is a block diagram showing the electric signal system for driving the device shown in FIG. 1, and FIG. 3 is a cross-sectional view showing the second embodiment of the present invention. , Fig. 4 is a plan view of the conventional device, and Fig. 5 is a plan view of the conventional device.
FIG. 1...Feed arm, 2...Slide block,
3...Slide shaft, 9...Feed drive means, 17...
... Coil, 18 ... Drive circuit, 19 ... Detection sensor, 23 ... Control circuit, 24 ... Iron core.

Claims (1)

[Scope of utility model registration request] A feed arm equipped with a slide shaft that can freely slide on the slide block and a feed pin that goes in and out of the feed hole in the frame, a vertical drive means that moves the feed arm in the vertical direction by raising and lowering the slide block, and a feed arm that moves the feed arm in the horizontal direction. In a frame transfer device of a bonding apparatus, which has a feed drive means that reciprocates and intermittently transfers the frame by gate motion of the feed arm, the feed drive means is either on the feed arm side or on the slide block side. A coil provided on one side, an iron core provided on the other side of the two and fitted into the coil in a relatively movable manner, a detection sensor that detects the position and movement speed of the feed arm, and a detection sensor that detects the position and movement speed of the feed arm. A frame transfer device for a bonding device, which includes a control circuit that controls a drive current to a coil.