JPH0294262U - - Google Patents
Info
- Publication number
- JPH0294262U JPH0294262U JP301589U JP301589U JPH0294262U JP H0294262 U JPH0294262 U JP H0294262U JP 301589 U JP301589 U JP 301589U JP 301589 U JP301589 U JP 301589U JP H0294262 U JPH0294262 U JP H0294262U
- Authority
- JP
- Japan
- Prior art keywords
- placement area
- susceptor
- sample placement
- view
- depression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図はサセプタの平面図、第３図は本考案において
使用する薄膜成長装置の構成を示す断面図、第４
図は従来のサセプタを示す断面図、第５図は従来
のサセプタを示す断面図、第５図はサセプタ改良
前の成長装置の構成を示す断面図である。
図において、１……チヤンバー、２……サセプ
タ、３……溝、４……ウエハ、６……ウエハ配置
領域、７，８……ピンセツト。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a plan view of the susceptor, Figure 3 is a sectional view showing the configuration of the thin film growth apparatus used in the present invention, and Figure 4
5 is a sectional view showing a conventional susceptor, FIG. 5 is a sectional view showing the structure of a growth apparatus before the susceptor is improved. In the figure, 1...chamber, 2...susceptor, 3...groove, 4...wafer, 6...wafer placement area, 7, 8...tweezers.
Claims (1)
成るサセプタにおいて、前記試料配置領域の一部
分に窪みが形成されたことを特徴とするサセプタ
。 A susceptor comprising a plate-like member having a sample placement area defined on its surface, characterized in that a depression is formed in a portion of the sample placement area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP301589U JPH0294262U (en) | 1989-01-12 | 1989-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP301589U JPH0294262U (en) | 1989-01-12 | 1989-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0294262U true JPH0294262U (en) | 1990-07-26 |
Family
ID=31204279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP301589U Pending JPH0294262U (en) | 1989-01-12 | 1989-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0294262U (en) |
-
1989
- 1989-01-12 JP JP301589U patent/JPH0294262U/ja active Pending