JPH0294250U - - Google Patents
Info
- Publication number
- JPH0294250U JPH0294250U JP268689U JP268689U JPH0294250U JP H0294250 U JPH0294250 U JP H0294250U JP 268689 U JP268689 U JP 268689U JP 268689 U JP268689 U JP 268689U JP H0294250 U JPH0294250 U JP H0294250U
- Authority
- JP
- Japan
- Prior art keywords
- water
- cooled crucible
- electron gun
- evaporation device
- vacuum vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005566 electron beam evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP268689U JPH0294250U (es) | 1989-01-17 | 1989-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP268689U JPH0294250U (es) | 1989-01-17 | 1989-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0294250U true JPH0294250U (es) | 1990-07-26 |
Family
ID=31203670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP268689U Pending JPH0294250U (es) | 1989-01-17 | 1989-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0294250U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009542900A (ja) * | 2006-07-06 | 2009-12-03 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | 電子ビーム蒸発装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379959A (ja) * | 1986-09-20 | 1988-04-09 | Anelva Corp | 薄膜蒸着装置 |
| JPS63259047A (ja) * | 1987-04-16 | 1988-10-26 | Nachi Fujikoshi Corp | 高耐摩耗焼結工具鋼の製造方法 |
-
1989
- 1989-01-17 JP JP268689U patent/JPH0294250U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379959A (ja) * | 1986-09-20 | 1988-04-09 | Anelva Corp | 薄膜蒸着装置 |
| JPS63259047A (ja) * | 1987-04-16 | 1988-10-26 | Nachi Fujikoshi Corp | 高耐摩耗焼結工具鋼の製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009542900A (ja) * | 2006-07-06 | 2009-12-03 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | 電子ビーム蒸発装置 |