JPS62153365U - - Google Patents
Info
- Publication number
- JPS62153365U JPS62153365U JP1914987U JP1914987U JPS62153365U JP S62153365 U JPS62153365 U JP S62153365U JP 1914987 U JP1914987 U JP 1914987U JP 1914987 U JP1914987 U JP 1914987U JP S62153365 U JPS62153365 U JP S62153365U
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- target
- magnetron sputtering
- sputtering device
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1914987U JPS62153365U (es) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1914987U JPS62153365U (es) | 1987-02-12 | 1987-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62153365U true JPS62153365U (es) | 1987-09-29 |
Family
ID=30813486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1914987U Pending JPS62153365U (es) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62153365U (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55148770A (en) * | 1979-04-09 | 1980-11-19 | Vac Tec Syst | Spatter apparatus |
-
1987
- 1987-02-12 JP JP1914987U patent/JPS62153365U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55148770A (en) * | 1979-04-09 | 1980-11-19 | Vac Tec Syst | Spatter apparatus |