JPH02106458U - - Google Patents
Info
- Publication number
- JPH02106458U JPH02106458U JP1470289U JP1470289U JPH02106458U JP H02106458 U JPH02106458 U JP H02106458U JP 1470289 U JP1470289 U JP 1470289U JP 1470289 U JP1470289 U JP 1470289U JP H02106458 U JPH02106458 U JP H02106458U
- Authority
- JP
- Japan
- Prior art keywords
- target
- annular
- stacked
- mainly
- back side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1470289U JPH02106458U (es) | 1989-02-10 | 1989-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1470289U JPH02106458U (es) | 1989-02-10 | 1989-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106458U true JPH02106458U (es) | 1990-08-23 |
Family
ID=31226141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1470289U Pending JPH02106458U (es) | 1989-02-10 | 1989-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106458U (es) |
-
1989
- 1989-02-10 JP JP1470289U patent/JPH02106458U/ja active Pending