JPH0294250U - - Google Patents
Info
- Publication number
- JPH0294250U JPH0294250U JP268689U JP268689U JPH0294250U JP H0294250 U JPH0294250 U JP H0294250U JP 268689 U JP268689 U JP 268689U JP 268689 U JP268689 U JP 268689U JP H0294250 U JPH0294250 U JP H0294250U
- Authority
- JP
- Japan
- Prior art keywords
- water
- cooled crucible
- electron gun
- evaporation device
- vacuum vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005566 electron beam evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図は第１図の正面図、第３図は従来の偏向型の電
子銃を用いた蒸発装置の正面図、第４図は直線型
の電子銃を用いた蒸発装置の平面図である。
図中、１は真空容器、３は電子銃、４は水冷ル
ツボ、１０は偏向磁石である。
Figure 1 is a plan view showing one embodiment of the present invention;
The drawings are a front view of FIG. 1, FIG. 3 is a front view of an evaporation device using a conventional deflection type electron gun, and FIG. 4 is a plan view of an evaporation device using a linear type electron gun. In the figure, 1 is a vacuum vessel, 3 is an electron gun, 4 is a water-cooled crucible, and 10 is a deflection magnet.
Claims (1)
移動自在に設けると共にその水冷ルツボに偏向磁
石を一体に設けたことを特徴とする電子ビーム蒸
発装置。 An electron beam evaporation device characterized in that a water-cooled crucible is movably provided in a vacuum vessel to which an electron gun is connected, and a deflection magnet is integrally provided with the water-cooled crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP268689U JPH0294250U (en) | 1989-01-17 | 1989-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP268689U JPH0294250U (en) | 1989-01-17 | 1989-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0294250U true JPH0294250U (en) | 1990-07-26 |
Family
ID=31203670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP268689U Pending JPH0294250U (en) | 1989-01-17 | 1989-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0294250U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009542900A (en) * | 2006-07-06 | 2009-12-03 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | Electron beam evaporator |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379959A (en) * | 1986-09-20 | 1988-04-09 | Anelva Corp | Device for vapor-depositing thin film |
| JPS63259047A (en) * | 1987-04-16 | 1988-10-26 | Nachi Fujikoshi Corp | Production of high wear resistant sintered tool steel |
-
1989
- 1989-01-17 JP JP268689U patent/JPH0294250U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379959A (en) * | 1986-09-20 | 1988-04-09 | Anelva Corp | Device for vapor-depositing thin film |
| JPS63259047A (en) * | 1987-04-16 | 1988-10-26 | Nachi Fujikoshi Corp | Production of high wear resistant sintered tool steel |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009542900A (en) * | 2006-07-06 | 2009-12-03 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | Electron beam evaporator |