JPH0291935U - - Google Patents

Info

Publication number
JPH0291935U
JPH0291935U JP46789U JP46789U JPH0291935U JP H0291935 U JPH0291935 U JP H0291935U JP 46789 U JP46789 U JP 46789U JP 46789 U JP46789 U JP 46789U JP H0291935 U JPH0291935 U JP H0291935U
Authority
JP
Japan
Prior art keywords
vacuum
emitted light
plasma
vacuum chamber
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP46789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46789U priority Critical patent/JPH0291935U/ja
Publication of JPH0291935U publication Critical patent/JPH0291935U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Drying Of Semiconductors (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP46789U 1989-01-05 1989-01-05 Pending JPH0291935U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46789U JPH0291935U (enrdf_load_stackoverflow) 1989-01-05 1989-01-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46789U JPH0291935U (enrdf_load_stackoverflow) 1989-01-05 1989-01-05

Publications (1)

Publication Number Publication Date
JPH0291935U true JPH0291935U (enrdf_load_stackoverflow) 1990-07-20

Family

ID=31199524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46789U Pending JPH0291935U (enrdf_load_stackoverflow) 1989-01-05 1989-01-05

Country Status (1)

Country Link
JP (1) JPH0291935U (enrdf_load_stackoverflow)

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