JPH029112Y2 - - Google Patents

Info

Publication number
JPH029112Y2
JPH029112Y2 JP1983019912U JP1991283U JPH029112Y2 JP H029112 Y2 JPH029112 Y2 JP H029112Y2 JP 1983019912 U JP1983019912 U JP 1983019912U JP 1991283 U JP1991283 U JP 1991283U JP H029112 Y2 JPH029112 Y2 JP H029112Y2
Authority
JP
Japan
Prior art keywords
pump
mechanical booster
oil rotary
pumping speed
booster pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983019912U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59126193U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1991283U priority Critical patent/JPS59126193U/ja
Publication of JPS59126193U publication Critical patent/JPS59126193U/ja
Application granted granted Critical
Publication of JPH029112Y2 publication Critical patent/JPH029112Y2/ja
Granted legal-status Critical Current

Links

JP1991283U 1983-02-14 1983-02-14 真空排気装置 Granted JPS59126193U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991283U JPS59126193U (ja) 1983-02-14 1983-02-14 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991283U JPS59126193U (ja) 1983-02-14 1983-02-14 真空排気装置

Publications (2)

Publication Number Publication Date
JPS59126193U JPS59126193U (ja) 1984-08-24
JPH029112Y2 true JPH029112Y2 (forum.php) 1990-03-06

Family

ID=30151050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991283U Granted JPS59126193U (ja) 1983-02-14 1983-02-14 真空排気装置

Country Status (1)

Country Link
JP (1) JPS59126193U (forum.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2796321B2 (ja) * 1988-11-22 1998-09-10 株式会社芝浦製作所 圧力制御機構

Also Published As

Publication number Publication date
JPS59126193U (ja) 1984-08-24

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