JPH0290600A - Printed board surface treating device - Google Patents

Printed board surface treating device

Info

Publication number
JPH0290600A
JPH0290600A JP24105088A JP24105088A JPH0290600A JP H0290600 A JPH0290600 A JP H0290600A JP 24105088 A JP24105088 A JP 24105088A JP 24105088 A JP24105088 A JP 24105088A JP H0290600 A JPH0290600 A JP H0290600A
Authority
JP
Japan
Prior art keywords
center
spray
nozzles
nozzle
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24105088A
Other languages
Japanese (ja)
Inventor
Koichi Tsuruoka
鶴岡 幸市
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP24105088A priority Critical patent/JPH0290600A/en
Publication of JPH0290600A publication Critical patent/JPH0290600A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0085Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor

Landscapes

  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE:To prevent a solution from standing on the upside of a substrate so as to improve a pattern in dimensional accuracy by a method wherein spray pressure is made to have such a gradient that it rises up gradually toward an etching treatment center. CONSTITUTION:A piping spray 1 has a U shape that its center 1a is nearer than its ends 1b to a treated piece 2. That is, provided that the distance between the spray piping center 1a and a printed board 2 is equal to 1, the distance between a spray piping end 1b and the printed board 2 is made to be 1.5-3. Nozzles 3 are arranged in such a manner that they are dense at the center 1a and become gradually coarse toward the ends 1b. Five nozzles are arranged at the center 1a and 1-3 nozzles are arranged at the ends 1b respectively. And, the inner diameter of the nozzle 3 is small at the center 1a and becomes gradually larger toward the end 1b. That is, the ratio of the diameter of the nozzle at the center 1a to that of the nozzle at the end 1b is 1:(2-3). Therefore, solution standing on the center of the board 2 is removed by flowing down from the board 2.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、プリント基板表面処理装置に係り、特にエツ
チング時のスプレー配管構造に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a printed circuit board surface treatment apparatus, and particularly to a spray piping structure during etching.

(従来の技術) 従来、プリント基板製造プロセスに用いられるエツチン
グ用スプレー配管は、第3図に示すように直線状であり
、ノズル4aの位置は等間隔であるものが使用されてい
た。なお、特開昭61−78123号公報に関連技術が
示されているが、処理中の液たまり防止については特に
開示されていない。
(Prior Art) Conventionally, the etching spray piping used in the printed circuit board manufacturing process is linear as shown in FIG. 3, and the nozzles 4a are arranged at equal intervals. Although a related technique is disclosed in Japanese Patent Application Laid-Open No. 61-78123, it does not specifically disclose how to prevent liquid pooling during processing.

(発明が解決しようとする課題) このように従来においては、等間隔に配置されたノズル
を持つスプレー配管4を使用していたため、エツチング
液5は、プリント基板2の中央部にたまりやすく、エツ
チング不足となりやすかった。よって、第4図の様に、
形成されるパターン7が、すそ広がりとなりやすく、パ
ターン寸法精度が向上できなかった。なお、6はレジス
トである。
(Problem to be Solved by the Invention) In this way, in the past, since the spray piping 4 with nozzles arranged at equal intervals was used, the etching liquid 5 tended to accumulate in the center of the printed circuit board 2, resulting in the etching It was easy to run out. Therefore, as shown in Figure 4,
The formed pattern 7 tended to spread at the base, and the pattern dimensional accuracy could not be improved. Note that 6 is a resist.

本発明の目的は、プリント基板エツチング時の基板上面
における液だまりをなくし、パターン寸法精度を向上さ
せることにある。
An object of the present invention is to eliminate liquid pools on the upper surface of a printed circuit board during etching and to improve pattern dimensional accuracy.

(課題を解決するための手段) 上記目的は、配管スプレーの中央部の流速を増した構成
にすることにより、達成される。
(Means for Solving the Problems) The above object is achieved by increasing the flow velocity at the center of the pipe spray.

そのための具体策として、スプレー配管を■配管スプレ
ーの中央部と基板の距離を端部と基板との距離より小さ
くする。
As a concrete measure for this purpose, the distance between the center of the spray piping and the substrate is made smaller than the distance between the end of the spray piping and the substrate.

■ノズル配置を中心部で密、端部に行くに従い疎にする
■The nozzle arrangement should be dense in the center and sparse towards the edges.

■中央部の穴径を小さくし、端部の穴径を大きくする。■ Decrease the diameter of the hole in the center and increase the diameter of the hole at the ends.

これらの■〜■は、単独使用でも良く、組合せ使用でも
良い。
These (1) to (2) may be used alone or in combination.

(作用) ■配管スプレーの中央部から、基板までの放射液の到達
距離を短かくすることにより、その分だけ、液のもつエ
ネルギは大きいので、流量も大きい。
(Function) ■By shortening the distance that the emitted liquid reaches from the center of the piping spray to the substrate, the energy of the liquid is correspondingly large, so the flow rate is also large.

■ノズル配置を中心部で密、端部に行くに従い疎にする
ことにより、基板中央部では、′液が到達する際、流動
的になり、端部方向に流れていく。
(2) By arranging the nozzles densely in the center and sparsely toward the edges, the liquid becomes fluid when it reaches the center of the substrate and flows toward the edges.

■スプレー配管の穴径を、中央部で小さくし、端部では
大きくすることにより、中央部の穴からは、流速が大、
端部では、流速が小さくなる。
■By making the hole diameter of the spray pipe smaller in the center and larger at the ends, the flow velocity is high from the hole in the center.
At the ends, the flow velocity is reduced.

以上の3つの構成の単独使用又は組合せ使用により、基
板中央部では、液だまりが、できにくくなる。そのこと
から、エツチング不足が、解消され、パターン寸法精度
が向上できる。
By using the above three configurations alone or in combination, a liquid pool is less likely to form in the center of the substrate. As a result, insufficient etching can be eliminated and pattern dimensional accuracy can be improved.

(実施例) 以下、本発明の一実施例を第1図により説明する。配管
スプレー1は、中央部1aが端部1bより被処理物2に
近い距離のU型形状である。具体的には、スプレー配管
中央部1aとプリント基板2の距離を“1″とした場合
、スプレー配管端部1bとプリント基板2の距離をl#
1.5jj〜″3紳とする。
(Example) An example of the present invention will be described below with reference to FIG. The piping spray 1 has a U-shape in which the center portion 1a is closer to the object to be treated 2 than the end portions 1b. Specifically, when the distance between the spray piping center 1a and the printed circuit board 2 is "1", the distance between the spray piping end 1b and the printed circuit board 2 is l#
1.5jj~''3 gents.

ノズル3は、スプレー配管中央部1aで密にして。The nozzle 3 is placed close to the center of the spray pipe 1a.

端部1bに向かうにつれて疎になるように配置する。They are arranged so that they become sparser toward the end 1b.

具体的には、中央部1aのノズル数5に対して、端部1
bは、ノズル数1〜3とする。
Specifically, the number of nozzles in the central part 1a is 5, and the number of nozzles in the end part 1
b is the number of nozzles from 1 to 3.

また、ノズル3の穴径は、中央部1aで小、端部lbに
向かうにつれて、大とする。具体的には、中央部穴径1
に対し、て、端部穴径2〜3の比率にする。
Further, the hole diameter of the nozzle 3 is small at the center portion 1a and becomes large toward the end portion lb. Specifically, the central hole diameter 1
In contrast, the end hole diameter should be at a ratio of 2 to 3.

以上の構成により、基板2の中央部の液だまりは、基板
2から流れ落ちることにより、排除されるという効果が
ある。
The above configuration has the effect that the liquid pool at the center of the substrate 2 is eliminated by flowing down from the substrate 2.

(発明の効果) 本発明によれば、エツチング時の基板上面における液だ
まり5が防止でき、形成されるパターン断面7は、第2
図の様に、レジスト6の寸法通りとなるため、パターン
寸法精度の向上が、可能である。
(Effects of the Invention) According to the present invention, it is possible to prevent liquid pooling 5 on the upper surface of the substrate during etching, and the formed pattern cross section 7 is
As shown in the figure, since the dimensions match the resist 6, it is possible to improve pattern dimensional accuracy.

ナオ、プリント基板2の支持台を傾斜させることにより
、液たまり防止の効果はさらに助長される。
By tilting the support base of the printed circuit board 2, the effect of preventing liquid pooling is further enhanced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の概観図、第2図は精度よく
仕上った導体パターン箇所の断面図、第3図は従来のス
プレー配管を利用した装置の概観図、第4図は従来の液
だまりが発生した場合の導体パターン箇所の断面図であ
る。 1、U型配管スプレー 2、プリント基板 3、ノズル 手 続 補 正 書 (方式) %式% プリント基板表面処理装置 補正をする者 11件との関係
Fig. 1 is an overview of an embodiment of the present invention, Fig. 2 is a sectional view of a precisely finished conductor pattern, Fig. 3 is an overview of a device using conventional spray piping, and Fig. 4 is a conventional FIG. 3 is a cross-sectional view of a conductor pattern when a liquid pool occurs. 1, U-shaped piping spray 2, printed circuit board 3, nozzle procedure correction form (method) % formula % Relationship with 11 cases of persons correcting printed circuit board surface treatment equipment

Claims (1)

【特許請求の範囲】[Claims] 1.水平コンベア型プリント基板エッチング装置におい
て、スプレー圧力をエッチング処理する中央部に向けて
徐々に高めた構造を有することを特徴とするプリント基
板表面処理装置。
1. 1. A horizontal conveyor type printed circuit board etching apparatus, which is characterized by having a structure in which spray pressure is gradually increased toward a central portion to be etched.
JP24105088A 1988-09-28 1988-09-28 Printed board surface treating device Pending JPH0290600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24105088A JPH0290600A (en) 1988-09-28 1988-09-28 Printed board surface treating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24105088A JPH0290600A (en) 1988-09-28 1988-09-28 Printed board surface treating device

Publications (1)

Publication Number Publication Date
JPH0290600A true JPH0290600A (en) 1990-03-30

Family

ID=17068564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24105088A Pending JPH0290600A (en) 1988-09-28 1988-09-28 Printed board surface treating device

Country Status (1)

Country Link
JP (1) JPH0290600A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0448085A (en) * 1990-06-15 1992-02-18 Matsushita Electric Works Ltd Etching and developing method
WO1993009563A1 (en) * 1991-11-07 1993-05-13 Atotetch Usa, Inc. Method and apparatus for controlled spray etching
JP2006313219A (en) * 2005-05-09 2006-11-16 Toppan Printing Co Ltd Development apparatus
US7758716B2 (en) 2006-07-28 2010-07-20 Foxconn Advanced Technology Inc. Apparatus for spraying etchant solution onto preformed printed circuit board

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0448085A (en) * 1990-06-15 1992-02-18 Matsushita Electric Works Ltd Etching and developing method
WO1993009563A1 (en) * 1991-11-07 1993-05-13 Atotetch Usa, Inc. Method and apparatus for controlled spray etching
US5228949A (en) * 1991-11-07 1993-07-20 Chemcut Corporation Method and apparatus for controlled spray etching
US5290384A (en) * 1991-11-07 1994-03-01 Chemcut Corporation Apparatus for controlled spray etching
JP2006313219A (en) * 2005-05-09 2006-11-16 Toppan Printing Co Ltd Development apparatus
US7758716B2 (en) 2006-07-28 2010-07-20 Foxconn Advanced Technology Inc. Apparatus for spraying etchant solution onto preformed printed circuit board

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