JPH0289840U - - Google Patents
Info
- Publication number
- JPH0289840U JPH0289840U JP16999388U JP16999388U JPH0289840U JP H0289840 U JPH0289840 U JP H0289840U JP 16999388 U JP16999388 U JP 16999388U JP 16999388 U JP16999388 U JP 16999388U JP H0289840 U JPH0289840 U JP H0289840U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- conductor layer
- stand
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 2
Description
第１図は本考案の一実施例の平面図、第２図は
従来のウエーハ移し替え器の平面図、第３図はウ
エーハ移し替え器の使用方法を説明するための平
面図である。
１……ウエーハ移し替え器、２……導電層、３
ａ，３ｂ……ウエーハ立て、４……半導体ウエー
ハ、１１……ウエーハ移し替え器。
FIG. 1 is a plan view of an embodiment of the present invention, FIG. 2 is a plan view of a conventional wafer transfer device, and FIG. 3 is a plan view for explaining how to use the wafer transfer device. 1... Wafer transfer device, 2... Conductive layer, 3
a, 3b...Wafer stand, 4...Semiconductor wafer, 11...Wafer transfer device.
Claims (1)
エーハを他のウエーハ立てに移し替えるのに使用
されるＴ字形のウエーハ移し替え器において、少
くとも半導体ウエーハと接触する面が導体層であ
りかつ該導体層が接地電位に保持されていること
を特徴とするウエーハ移し替え器。 In a T-shaped wafer transfer device used to transfer a semiconductor wafer placed on one wafer stand to another wafer stand, at least the surface in contact with the semiconductor wafer is a conductor layer, and the conductor layer A wafer transfer device characterized in that the wafer transfer device is maintained at a ground potential.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16999388U JPH0289840U (en) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16999388U JPH0289840U (en) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289840U true JPH0289840U (en) | 1990-07-17 |
Family
ID=31460548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16999388U Pending JPH0289840U (en) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289840U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12027987B2 (en) | 2018-04-26 | 2024-07-02 | Guangdong Midea Kitchen Appliances Manufacturing Co., Ltd. | Electronic transformer and a microwave cooking appliance |
-
1988
- 1988-12-28 JP JP16999388U patent/JPH0289840U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12027987B2 (en) | 2018-04-26 | 2024-07-02 | Guangdong Midea Kitchen Appliances Manufacturing Co., Ltd. | Electronic transformer and a microwave cooking appliance |