JPH0289342U - - Google Patents

Info

Publication number

JPH0289342U

JPH0289342U JP16864988U JP16864988U JPH0289342U JP H0289342 U JPH0289342 U JP H0289342U JP 16864988 U JP16864988 U JP 16864988U JP 16864988 U JP16864988 U JP 16864988U JP H0289342 U JPH0289342 U JP H0289342U

Authority

JP

Japan

Prior art keywords

pressure

silicon

diaphragm chip

semiconductor

sensitive diaphragm

Prior art date

1988-12-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
• 229910052710 silicon Inorganic materials 0.000 claims description 14
• 239000010703 silicon Substances 0.000 claims description 14
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims 9
• 239000000463 material Substances 0.000 claims 3
• 239000002184 metal Substances 0.000 claims 3
• 239000000758 substrate Substances 0.000 claims 1