JPH0288238U - - Google Patents
Info
- Publication number
- JPH0288238U JPH0288238U JP14590689U JP14590689U JPH0288238U JP H0288238 U JPH0288238 U JP H0288238U JP 14590689 U JP14590689 U JP 14590689U JP 14590689 U JP14590689 U JP 14590689U JP H0288238 U JPH0288238 U JP H0288238U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer
- opening
- shaft
- tilting table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000000969 carrier Substances 0.000 claims 1
- 230000003028 elevating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989145906U JPH0316286Y2 (https=) | 1989-12-20 | 1989-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989145906U JPH0316286Y2 (https=) | 1989-12-20 | 1989-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0288238U true JPH0288238U (https=) | 1990-07-12 |
| JPH0316286Y2 JPH0316286Y2 (https=) | 1991-04-08 |
Family
ID=31414909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989145906U Expired JPH0316286Y2 (https=) | 1989-12-20 | 1989-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316286Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5324248U (https=) * | 1976-08-05 | 1978-03-01 |
-
1989
- 1989-12-20 JP JP1989145906U patent/JPH0316286Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5324248U (https=) * | 1976-08-05 | 1978-03-01 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0316286Y2 (https=) | 1991-04-08 |
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