JPH0288238U - - Google Patents

Info

Publication number
JPH0288238U
JPH0288238U JP14590689U JP14590689U JPH0288238U JP H0288238 U JPH0288238 U JP H0288238U JP 14590689 U JP14590689 U JP 14590689U JP 14590689 U JP14590689 U JP 14590689U JP H0288238 U JPH0288238 U JP H0288238U
Authority
JP
Japan
Prior art keywords
carrier
wafer
opening
shaft
tilting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14590689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0316286Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989145906U priority Critical patent/JPH0316286Y2/ja
Publication of JPH0288238U publication Critical patent/JPH0288238U/ja
Application granted granted Critical
Publication of JPH0316286Y2 publication Critical patent/JPH0316286Y2/ja
Expired legal-status Critical Current

Links

JP1989145906U 1989-12-20 1989-12-20 Expired JPH0316286Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989145906U JPH0316286Y2 (enrdf_load_html_response) 1989-12-20 1989-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989145906U JPH0316286Y2 (enrdf_load_html_response) 1989-12-20 1989-12-20

Publications (2)

Publication Number Publication Date
JPH0288238U true JPH0288238U (enrdf_load_html_response) 1990-07-12
JPH0316286Y2 JPH0316286Y2 (enrdf_load_html_response) 1991-04-08

Family

ID=31414909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989145906U Expired JPH0316286Y2 (enrdf_load_html_response) 1989-12-20 1989-12-20

Country Status (1)

Country Link
JP (1) JPH0316286Y2 (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324248U (enrdf_load_html_response) * 1976-08-05 1978-03-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324248U (enrdf_load_html_response) * 1976-08-05 1978-03-01

Also Published As

Publication number Publication date
JPH0316286Y2 (enrdf_load_html_response) 1991-04-08

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