JPH0287614A - パターン位置精度診断方法および装置 - Google Patents

パターン位置精度診断方法および装置

Info

Publication number
JPH0287614A
JPH0287614A JP63240498A JP24049888A JPH0287614A JP H0287614 A JPH0287614 A JP H0287614A JP 63240498 A JP63240498 A JP 63240498A JP 24049888 A JP24049888 A JP 24049888A JP H0287614 A JPH0287614 A JP H0287614A
Authority
JP
Japan
Prior art keywords
pattern
drawn
positional
developer
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63240498A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532898B2 (OSRAM
Inventor
Yasuo Matsuoka
康男 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP63240498A priority Critical patent/JPH0287614A/ja
Publication of JPH0287614A publication Critical patent/JPH0287614A/ja
Publication of JPH0532898B2 publication Critical patent/JPH0532898B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP63240498A 1988-09-26 1988-09-26 パターン位置精度診断方法および装置 Granted JPH0287614A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63240498A JPH0287614A (ja) 1988-09-26 1988-09-26 パターン位置精度診断方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63240498A JPH0287614A (ja) 1988-09-26 1988-09-26 パターン位置精度診断方法および装置

Publications (2)

Publication Number Publication Date
JPH0287614A true JPH0287614A (ja) 1990-03-28
JPH0532898B2 JPH0532898B2 (OSRAM) 1993-05-18

Family

ID=17060410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63240498A Granted JPH0287614A (ja) 1988-09-26 1988-09-26 パターン位置精度診断方法および装置

Country Status (1)

Country Link
JP (1) JPH0287614A (OSRAM)

Also Published As

Publication number Publication date
JPH0532898B2 (OSRAM) 1993-05-18

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