JPH0286458A - Manufacture of recording head of ink jet recording device - Google Patents

Manufacture of recording head of ink jet recording device

Info

Publication number
JPH0286458A
JPH0286458A JP23658488A JP23658488A JPH0286458A JP H0286458 A JPH0286458 A JP H0286458A JP 23658488 A JP23658488 A JP 23658488A JP 23658488 A JP23658488 A JP 23658488A JP H0286458 A JPH0286458 A JP H0286458A
Authority
JP
Japan
Prior art keywords
substrate
top plate
orifice
recording
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23658488A
Other languages
Japanese (ja)
Inventor
Junji Shimoda
下田 準二
Yoshiyuki Mizoguchi
溝口 芳之
Mayumi Yamamoto
真由美 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP23658488A priority Critical patent/JPH0286458A/en
Publication of JPH0286458A publication Critical patent/JPH0286458A/en
Pending legal-status Critical Current

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To make possible the simplification of cutting and accurate opening of fine orifices by forming and working grooves on a substrate before the simultaneous cutting of a top plate and the substrate. CONSTITUTION:There are two processes to be performed; one for sticking a substrate 15 and a top plate 17 together and the other for forming grooves 18 in an orifice and a vertical direction at a position corresponding to an orifice section 11 on the top plate 17 side surface of the substrate 15. After the above processes, the substrate 15 and the top plate 17 are cut so that these pass through the grooves in the direction of the groove 18. The open end of the orifice is formed and consequently, a desired recording head is obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は画像情報に応じて、複数のオリフィスから被記
録媒体上に記録液を吐出して、画像を形成するインクジ
ェット記録装置の記録ヘッドの製造法に関し、特にオリ
フィスの開口するフェイス面にインクが付着することに
よる吐出不良を防止する記録へ、どの製造法に関する。
Detailed Description of the Invention [Industrial Field of Application] The present invention relates to a recording head of an inkjet recording device that forms an image by ejecting recording liquid from a plurality of orifices onto a recording medium according to image information. The present invention relates to a manufacturing method, and particularly relates to a manufacturing method for recording that prevents ejection failure due to ink adhering to the face surface where an orifice opens.

〔従来の技術〕[Conventional technology]

インクジェット記録装置は記録用液体の小液滴を種々の
エネルギー作用方式で、記録ヘッドから吐出させ、それ
を紙等の被記録媒体に付着させて記録を行なうものであ
る。このような記録液(以下インクと称する)滴の形成
ないしは吐出させるためのエネルギー作用方式としては
、記録ヘッドの吐出口付近に圧電素子等の電気機械変換
素子を配設し、外部信号に従って、!気機械変換体の機
械振動をインクに作用させることにより、インク滴を吐
出させるオンデマンドピエゾ方式や、吐出口付近に発熱
体を設け、外部信号に従って発熱体に通電し1発熱体近
傍のインクを気化させることにより、インク滴を吐出さ
せる、いわゆるサーマルインクジェット記録方式等があ
る。
An inkjet recording apparatus performs recording by ejecting small droplets of recording liquid from a recording head using various energy application methods, and making the droplets adhere to a recording medium such as paper. As an energy application method for forming or ejecting such recording liquid (hereinafter referred to as ink) droplets, an electromechanical transducer such as a piezoelectric element is disposed near the ejection opening of the recording head, and an electromechanical transducer element such as a piezoelectric element is installed in the vicinity of the ejection opening of the recording head, and the ! There is an on-demand piezo system that ejects ink droplets by applying mechanical vibrations from a gas-mechanical transducer to the ink, or a heating element is installed near the ejection port, and the ink near the heating element is energized according to an external signal. There is a so-called thermal inkjet recording method in which ink droplets are ejected by vaporization.

これらの方式の記録へ、ドを製作するには、例えばオン
デマンドピエゾ方式に例をとうて説明すれば、まず、複
数の第11アイス、複数の圧力室、複数のインク流路、
及び単一の共通液室が片方の面に形成されている基板と
、前記複数の圧力室に対応する複数の電気機械変換体を
配置した天板とを貼り合せ、この貼り合わせ体のオリフ
ィス部を切断して複数のオリフィスが開口する7工イス
面を形成している。
In order to produce a recording device using these methods, for example, taking the on-demand piezo method as an example, first, a plurality of eleventh ice cubes, a plurality of pressure chambers, a plurality of ink channels,
A substrate having a single common liquid chamber formed on one side and a top plate having a plurality of electromechanical transducers corresponding to the plurality of pressure chambers are bonded together, and an orifice portion of this bonded body is bonded together. is cut to form a seven-way chair surface with a plurality of orifices.

ところで、この切断によって出来上がった複数のオリス
イスが開口する7工イス面(切断面)の面積が大きいと
、記録時に7工イス面にインクが付着しやすくなり、こ
のフェイス面のインクの残存によりインク滴の吐出方向
が曲り、正確な記録が行いにくくなるという問題がある
By the way, if the area of the 7-piece surface (cut surface) where the multiple ori-swisses created by this cutting are open is large, ink tends to adhere to the 7-piece surface during recording, and the ink remains on the face surface. There is a problem in that the ejection direction of the droplets is curved, making it difficult to perform accurate recording.

そこで、従来、この7工イス面面積を切断または研磨等
の追加工により、減少させるという方法がとられている
Conventionally, therefore, a method has been used to reduce the surface area of the seven-cut chair by additional machining such as cutting or polishing.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、7工イス面面積の小さい記録へ、ドを製
造するための前述の方法では、基板と天板とを貼シ合わ
せ、切断により所望のオリフィス開口面を形成した後に
、7工イス面面積減少のための加工を行なうので、前記
切断時には基板と天板との合計の厚さに対して加工を行
なわなければならず、加工が困難であり、且つ、このた
め、オリフィス開口形成のn1反を十分高めることが困
難であるという問題点があった。また、所定の位置にオ
リフィス開口を形成した後にフェイス面減少加工を行な
うので、せっかく形成したオリスイス開口部の精度を低
下させるという難点もあった。
However, in the above-mentioned method for manufacturing a device with a small chair surface area, the substrate and the top plate are pasted together and the desired orifice opening surface is formed by cutting. Since processing is performed to reduce the thickness, processing must be performed on the total thickness of the substrate and the top plate at the time of cutting, which makes processing difficult. There was a problem in that it was difficult to sufficiently increase the Furthermore, since the face surface reduction process is performed after the orifice opening is formed at a predetermined position, there is also the problem that the precision of the orifice opening that has been formed is reduced.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は前述した課題を解決するための手段として。 The present invention is intended as a means to solve the above-mentioned problems.

画像情報に応じて、複数のオリフィスから記録液滴を被
記録媒体上に吐出して、画像を形成するインクジェット
記録装置の、基板と天板との密着により、これらの界面
にオリフィスが形成される記録ヘッドの製造法において
、 基板と天板とを貼り合わせる工程、及び前記基板の天板
側と反対側の面のオリフィス部対応位置に該オリフィス
の方向と垂直な方向に清音形成する工程全行ない、しか
る後に該溝の方向に該湾内を通る様に前記基板及び天板
を切断し、オリフィス開口端面を形成することを特徴と
する、インクジェット記録装置の記録へ、ドの製造法を
提供するものである。
An orifice is formed at the interface between the substrate and top plate of an inkjet recording device that forms an image by ejecting recording droplets from multiple orifices onto a recording medium according to image information. In the method for manufacturing a recording head, the steps of bonding a substrate and a top plate together, and forming a clear sound in a direction perpendicular to the direction of the orifice at a position corresponding to the orifice portion on the surface opposite to the top plate side of the substrate are all carried out. , and then cutting the substrate and top plate so as to pass through the bay in the direction of the groove to form an orifice opening end face. It is.

〔実施例〕〔Example〕

以下に図面を用いて本発明の一実施例を詳細に説明する
An embodiment of the present invention will be described in detail below using the drawings.

第1図は本発明の一実施例を説明する為の分解斜視図で
ある。
FIG. 1 is an exploded perspective view for explaining one embodiment of the present invention.

第1図において、11は記録液滴を吐出する為のオリア
イス部であり、12はオリフィス部11に連通しオリフ
ィス部11に圧力波を伝搬する為の圧力室部であシ、1
3は圧力室部12に連通し圧力室部12にインクを供給
する為のインク流路部であり、14は複数のインク流路
部13に連通ずる共通液室部である。これらの複数のオ
リスイス部11.圧力室部12、インク流路部13.及
び単一の共通液室部14は同一の基板15上にハーフエ
ツチング等の技術により形成されている。
In FIG. 1, 11 is an orifice portion for discharging recording droplets, 12 is a pressure chamber portion communicating with the orifice portion 11 and propagating pressure waves to the orifice portion 11;
Reference numeral 3 designates an ink flow path portion that communicates with the pressure chamber portion 12 and supplies ink to the pressure chamber portion 12, and numeral 14 represents a common liquid chamber portion that communicates with the plurality of ink flow path portions 13. These plurality of oriswiss parts 11. Pressure chamber section 12, ink flow path section 13. The single common liquid chamber 14 is formed on the same substrate 15 by a technique such as half etching.

16は記録液滴を形成する為のエネルギー発生体である
複数の圧電素子等の電気機械変換体であり、17は基板
15のオリフィス11、圧力室12等が形成されている
面に接着又は高温圧R等の技術により密着される天板で
ある。複数の電気機械変換体16は複数の圧力室12に
対応する位置の天板上に接着等により配置されている。
Reference numeral 16 indicates an electromechanical transducer such as a plurality of piezoelectric elements, which are energy generators for forming recording droplets, and reference numeral 17 indicates an electromechanical transducer such as a plurality of piezoelectric elements, which is an energy generator for forming recording droplets, and 17 is an electromechanical transducer that is bonded or heated to a surface on which the orifice 11, pressure chamber 12, etc. of the substrate 15 are formed. This is a top plate that is tightly attached using techniques such as pressure R. The plurality of electromechanical transducers 16 are arranged on the top plate at positions corresponding to the plurality of pressure chambers 12 by adhesive or the like.

基板15のオリフィス11.圧力室12等が形成されて
いない面のオリフィス11の下部には、吐出方向と垂直
な方向に溝18が形成されている。
Orifice 11 of substrate 15. A groove 18 is formed in the lower part of the orifice 11 on the surface where the pressure chamber 12 and the like are not formed in a direction perpendicular to the discharge direction.

溝18は天板17の密着後又は基板15単体の加工時に
、一体成形によるか又は7ライス加工、研削等の比較的
簡便な加工技術により形成される。
The grooves 18 are formed after the top plate 17 is brought into close contact with the top plate 17 or when processing the substrate 15 alone, either by integral molding or by a relatively simple processing technique such as 7-rice processing or grinding.

第2図は、基板15内に溝18が形成され、基板15と
天板17とが密着された後の状態におけるヘッド斜視図
を示す。第2図において21の斜線部は切断除去部であ
り、オリフィス部の記録液滴の吐出方向と垂直な面のダ
イシングソー等による切断又は研磨等により、切断除去
される部分である。
FIG. 2 shows a perspective view of the head in a state after the groove 18 is formed in the substrate 15 and the substrate 15 and the top plate 17 are brought into close contact. In FIG. 2, the shaded area 21 is a cutting and removal part, which is a part that is cut and removed by cutting or polishing with a dicing saw or the like on a surface perpendicular to the recording droplet ejection direction of the orifice part.

第3図に第2図の状態から第2図における切断除去部2
1t−切断又は切断、研磨の併用により除去した後のヘ
ッド斜視図を示す。この切断又は研磨工程により複数の
オリフィス11が所定の位置で開口する。また、基板1
5内に溝18を形成しておくこと釦より、第3図におけ
るオリフィス11が配列されているフェイス面の面積は
溝18の深さに応じて狭くなっているため、7工イス面
のインク濡れが防止され、記録液滴の吐出方向が均一化
される。
Fig. 3 shows the cutting and removal part 2 in Fig. 2 from the state shown in Fig. 2.
A perspective view of the head after removal by 1t-cutting or a combination of cutting and polishing is shown. Through this cutting or polishing process, a plurality of orifices 11 are opened at predetermined positions. In addition, the board 1
5, the area of the face surface where the orifices 11 are arranged in FIG. Wetting is prevented and the ejection direction of recording droplets is made uniform.

第4図は本発明によるマルチインクジェット記録へ、ド
を搭載したヘッド周辺部の概観図である。
FIG. 4 is a general view of the periphery of a head equipped with a multi-ink jet recording device according to the present invention.

図において、41はマルチインクジェット記録ヘッドで
あり、インクを供給する為の供給チューブ42を介して
、インクを貯蔵する為の容器であるインクタンク43と
連結されている。44はマルチインクジェット記録ヘッ
ド41を固定し、ヘッドを走査するキャリッジである。
In the figure, reference numeral 41 denotes a multi-ink jet recording head, which is connected to an ink tank 43, which is a container for storing ink, via a supply tube 42 for supplying ink. A carriage 44 fixes the multi-ink jet recording head 41 and scans the head.

45は被記録媒体である。46は被記録媒体45を搬送
するプラテンである。
45 is a recording medium. 46 is a platen that conveys the recording medium 45.

〔発明の効果〕〔Effect of the invention〕

以上、説明してきた様に、本発明の記録ヘッドの製造法
によれば、天板と基板の同時切断前に基板に溝形成〃n
工がなされているため。
As described above, according to the recording head manufacturing method of the present invention, grooves are formed on the substrate before simultaneously cutting the top plate and the substrate.
Because the work has been done.

同時切断時に切断が容易、かつ、微細なオリフィスを高
精度に開口することが出来、 また、7工イス面の面積を基板内の溝の深さに応じて小
さくすることが出来るため、フェイス面のインク濡れが
少なくなシ、これによる記録液滴の吐出方向のズレが防
止され、記録精度が向上し、また、基板につける溝を基
板作製時に一体成形により作製すれば、加工工数を減ら
すことが出来、コストを下げることが出来るという様な
効果がある。
Cutting is easy during simultaneous cutting, and a minute orifice can be opened with high precision.In addition, the area of the 7-cut chair surface can be reduced according to the depth of the groove in the substrate, so the face surface There is less ink wetting, which prevents deviations in the ejection direction of recording droplets, improving recording accuracy.Furthermore, if the grooves to be attached to the substrate are made by integral molding when manufacturing the substrate, the number of processing steps can be reduced. This has the effect of reducing costs.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を説明する為の分解斜視図。 第2図は実施例の基板と天板が密着された後のヘッド斜
視図。 第3図は実施例の切断除去部が切断された後のヘッド斜
視図。 第4図は実施例のヘッド周辺部の概観図。 11・・・オリフィス部、12・・・圧力昆部、13・
・・インク流路部、14・・・共通液室部、15・・・
基板、16・・・電気機械変換体、17・・・天板、1
8・・・溝。 21・・・切断除去部、41・・・マルチインクジェッ
ト記録ヘッド、42・・・供給チューブ、43・・・イ
ンクタンク、44・・・キャリッジ、45・・・被記録
媒体、46・・・プラテン。 第1図 代理人 弁理士  山 下 穣 平 第 図 第 図 第 図
FIG. 1 is an exploded perspective view for explaining one embodiment of the present invention. FIG. 2 is a perspective view of the head after the substrate and top plate of the embodiment are brought into close contact. FIG. 3 is a perspective view of the head after the cutting and removal portion of the embodiment is cut. FIG. 4 is a general view of the head periphery of the embodiment. 11... Orifice part, 12... Pressure part, 13.
...Ink flow path section, 14...Common liquid chamber section, 15...
Substrate, 16... Electromechanical converter, 17... Top plate, 1
8...Groove. 21... Cutting/removal unit, 41... Multi-ink jet recording head, 42... Supply tube, 43... Ink tank, 44... Carriage, 45... Recording medium, 46... Platen . Figure 1 Agent Patent Attorney Jo Taira Yamashita Figure Figure Figure

Claims (1)

【特許請求の範囲】 画像情報に応じて、複数のオリフィスから記録液滴を被
記録媒体上に吐出して、画像を形成するインクジェット
記録装置の、基板と天板との密着により、これらの界面
にオリフィスが形成される記録ヘッドの製造法において
、 基板と天板とを貼り合わせる工程、及び前記基板の天板
側と反対側の面のオリフィス部対応位置に該オリフィス
の方向と垂直な方向に溝を形成する工程を行ない、しか
る後に該溝の方向に該溝内を通る様に前記基板及び天板
を切断し、オリフィス開口端面を形成することを特徴と
する、 インクジェット記録装置の記録ヘッドの製造法。
[Claims] In an inkjet recording device that forms an image by ejecting recording droplets from a plurality of orifices onto a recording medium according to image information, the interface between the substrate and the top plate is In a method of manufacturing a recording head in which an orifice is formed on the substrate, a step of bonding a substrate and a top plate is performed, and a step of bonding a substrate and a top plate, and a step of bonding a substrate and a top plate, and a step of forming an orifice in a direction perpendicular to the direction of the orifice at a position corresponding to the orifice portion on the surface opposite to the top plate side of the substrate. A recording head for an inkjet recording apparatus, characterized in that a step of forming a groove is performed, and then the substrate and the top plate are cut in the direction of the groove so as to pass through the groove to form an orifice opening end surface. Manufacturing method.
JP23658488A 1988-09-22 1988-09-22 Manufacture of recording head of ink jet recording device Pending JPH0286458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23658488A JPH0286458A (en) 1988-09-22 1988-09-22 Manufacture of recording head of ink jet recording device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23658488A JPH0286458A (en) 1988-09-22 1988-09-22 Manufacture of recording head of ink jet recording device

Publications (1)

Publication Number Publication Date
JPH0286458A true JPH0286458A (en) 1990-03-27

Family

ID=17002799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23658488A Pending JPH0286458A (en) 1988-09-22 1988-09-22 Manufacture of recording head of ink jet recording device

Country Status (1)

Country Link
JP (1) JPH0286458A (en)

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