JPH07227970A - Liquid jet head, liquid jet head cartridge and liquid jet device - Google Patents

Abstract

PURPOSE:To certainly and closely bond an emitting orifice member and a substrate by providing an extending pressure part extended to the back side of the surface on the side having emitting energy generating elements arranged thereto of the substrate to an emitting orifice member and providing an energizing means bringing the emitting orifice member into contact with the surface having the emitting energy generating elements arranged thereto of the substrate so as to allow energizing force to act on the extending pressure part. CONSTITUTION:Heating elements 2 and the wiring driving them are formed on the surface of a substrate 1 and a notch is cut in the side surface of the substrate 1 to form an ink supply passage 3. The central part of an emitting orifice member 4 having a large number of emitting orifices 5 has an extending pressure part 8 extended to the back side of the surface on the side having the heating elements 2 arranged thereto of the substrate 1 so as to pierce the ink supply passage 3 and a hole 7 permitting a leaf spring 6 to pass is provided to the extending pressure part 8. The energizing force of the leaf spring 6 being an energizing means is allowed to act on the extending pressure part 8 of the emitting orifice member 4 to bring the surface having the heating elements 2 arranged thereto of the substrate 1 and the emitting orifice member 4 to a pressure contact state.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid ejecting head, a liquid ejecting head cartridge and a liquid ejecting apparatus for ejecting a liquid for recording, and in particular, an ejection energy generating element for ejecting the liquid is provided. The present invention relates to a liquid ejecting head configured by joining an ejection port member having an ejection port to an element substrate, a liquid ejecting head cartridge using the head, and a liquid ejecting apparatus.

[0002]

2. Description of the Related Art Conventionally, in an ink jet recording head, a piezoelectric element is used as an ejection energy generating element, and a pressure change is generated in the ink flow path by the deformation of the piezoelectric element to eject an ink drop. There are used, for example, a heating element provided in the above, which generates bubbles by rapidly heating ink and ejects the ink. Among them, a so-called bubble jet type recording head that rapidly heats and ejects ink by a heating element has a simple structure, so that a large number of nozzles can be arranged at high density and high-speed and high-definition recording is possible. Has the advantage that

As a method of manufacturing a bubble jet recording head in which a large number of nozzles are integrally formed, a heater board having a thin film heater and its wiring formed on the surface of a plate made of silicon or the like is manufactured and used as a substrate. After sticking a dry film on it, exposing and developing it,
A method of manufacturing by joining a top plate made of glass etc. and cutting the discharge port part, forming a nozzle pattern with a photosensitive resin on the substrate, covering this with resin, cutting the discharge port part, There is a method of manufacturing by removing the photosensitive resin. Further, a method of manufacturing a discharge port member in which a groove-shaped nozzle and a discharge port are formed of resin or the like, and press-contacting this with a substrate is also widely used. According to this method, a nozzle having a complicated shape can be produced at low cost, is suitable for mass production, and is extremely excellent.
This method is described in JP-A-2-192954.

As a structure for supplying ink to a large number of nozzles, in addition to a method of providing an ink supply path in a common liquid chamber formed integrally with the nozzles on the substrate, a through hole is provided in the substrate to form a back surface of the substrate. A method of supplying ink, a method of providing a groove in a substrate and supplying ink from an end portion of the substrate, and the like are known. Actual fair 3-10046, Actual fair 2-2667
7, Japanese Utility Model Laid-Open No. 61-166841 describes these methods.

[0005]

SUMMARY OF THE INVENTION In the method of manufacturing a recording head by manufacturing a discharge port member in which a groove-shaped nozzle is formed from the above-mentioned resin or the like and press-contacting this with a substrate, the discharge port member is surely secured. It is important to adhere to the substrate.
Japanese Unexamined Patent Publication No. 2-192954 discloses that a discharge port member is pressed against a substrate from above using a spring, and according to this method, the discharge port member can be surely brought into close contact. Since it is necessary to provide a spring or the like on the upper surface, the shape of the recording head is restricted.

For example, it is difficult to apply it to a recording head having a shape in which ink is ejected on the surface side of a substrate. If the ejection port member having the wall between the ejection port and the adjacent nozzle is simply placed on the substrate, pressure leakage between the adjacent nozzle will occur, not only the ejection force will be weakened but also an obstacle due to crosstalk will occur. Occur. Bonding with an adhesive is difficult because the nozzle is very small. If a pressure contact means such as a spring is provided on the upper surface of the ejection port member, the distance between the ejection port and the recording material cannot be reduced, so that the quality of the recorded image deteriorates.

The present invention is intended to solve these problems, and it is possible to obtain a reliable close contact between the discharge port member and the substrate, to obtain a degree of freedom in the shape of the head, and to discharge the discharge port and the recording material. A liquid ejecting head that can be closer to the liquid ejecting head.

[0008]

The main constitution of a liquid jet head for achieving the above-mentioned object is to provide an element substrate on which an ejection energy generating element for ejecting a liquid is arranged, A head having a discharge port and a discharge port member forming a plurality of liquid flow paths by being pressed against a surface of the element substrate on which the discharge energy generating element is arranged, the discharge port comprising: The member has an extending portion that extends to the back side of the surface, and is a biasing means that presses the discharge port member against the surface by applying a biasing force to the extending portion. The main components of the liquid ejecting head cartridge are the above-mentioned liquid ejecting head and a liquid container for holding the liquid supplied to the liquid ejecting head. Further, the main components of the liquid jet recording apparatus are the above-mentioned liquid jet head, a recording medium conveying unit for conveying the recording medium, or a drive signal supplying unit for driving this recording head.

By using a leaf spring as a means for pulling the extended portion, it is possible to pull with a stable force. Alternatively, a claw member may be provided in an extended portion of the ejection port member having elasticity, and the elasticity of the claw member may surely urge the ejection port member toward the element substrate.

In a recording head having a shape in which ink is ejected in a direction substantially perpendicular to the surface of the element substrate, the extension portion is passed through an ink supply path provided on the substrate so that the back surface of the element substrate is crossed. It can be extended.

In a recording head having a shape in which ink is ejected in a direction substantially parallel to the surface of the element substrate, the extension portion should be extended to the back surface of the element substrate at the end portion of the substrate in the ink ejection direction. You can

In the liquid recording head, the ejection port member needs to be surely brought into close contact with the substrate, but a portion having a fine structure which is difficult to be brought into close contact with the pressure generating means for generating pressure for ejection. Only the extremely small portion forming the wall of the nozzle adjacent to each other is used, and an adhesive or the like can be used for the other portions as necessary. Therefore, in the present invention, the pressure generating means is arranged at a position close to the ink supply hole or the end portion on the substrate, and a part of the ejection port member is extended to the back surface of the substrate at the ink supply path or the end portion of the substrate. Since it is pulled by the above-mentioned method, it is possible to surely adhere even a portion having a fine structure.

According to the present invention, since the discharge port member can be surely brought into close contact with a simple structure, even when a large number of nozzles are arranged at high density, there is no leakage of pressure between the adjacent nozzles. It will never happen. In addition, it is not necessary to perform a difficult work of adhering to a portion having a fine structure such as a nozzle portion using an adhesive or the like.

[0014]

EXAMPLES The present invention will be described in detail below with reference to the drawings by examples.

Example 1 FIGS. 1 to 5 show an example of a liquid jet head of the present invention.

The element substrate constituting the liquid jet head of this embodiment is an element substrate having a heating element as an ejection energy generating element on its surface. The head of the present embodiment rapidly heats the ink, which is a liquid, by the heat generated by the above-mentioned heating element, causes film boiling in the liquid, and ejects the liquid by the pressure when bubbles are generated. The ejection direction of the liquid ink is substantially the surface direction of the element substrate (direction on the side facing the element substrate).
Is.

In FIG. 1, an element substrate 1 is made of a silicon wafer, and a heating element 2 and wirings for driving the heating element are formed on the surface thereof. In addition, a shift register, a transistor, or the like for driving the heating element according to a signal can be incorporated in the element substrate. The element substrate is cut into a predetermined size, and then a cut (notch) is made from the side surface with a dicing saw to form the ink supply path 3.

It is also possible to form an ink supply path by making a hole in the element substrate.

The discharge port member 4 having a plurality of discharge ports has an extending portion 8 and has a slightly complicated shape, but can be easily manufactured by molding a resin. As resin material, polyether sulfone with excellent ink resistance,
Polysulfone, polyether ether ketone, etc. are suitable and can be molded by injection molding. Since the discharge port is particularly precise and fine,
At the time of injection molding, it is also possible to form a product without a discharge port and form the discharge port by laser processing.

As a method of manufacturing the discharge port member, for example,
Although it is possible to use a method of forming nickel by an electroforming method, there is a problem that the productivity is poor and the cost is high as compared with the above method. It is also possible to form only a part of the discharge port member by an electroforming method, mold the other part with a resin, and bond the two to each other for molding.

The central portion of the ejection port member is extended (extended) to the back side of the surface of the lower element substrate on the side where the ejection energy generating element is arranged so as to penetrate the ink supply path, and at that portion. A hole (through hole) 7 for passing the leaf spring 6 is provided.

The leaf spring 6 is preferably made of stainless steel, resin, rust-prevented phosphor bronze or the like, which has excellent ink resistance.

As another example, it is also possible to mold the leaf spring integrally with the discharge port member with resin. In that case, a hole for passing the leaf spring is not necessary.

The main portion of the ink jet recording head is completed by combining the three members of the ejection port member, the element substrate and the leaf spring. Here, it is desirable to seal with an encapsulant 12 (FIGS. 2 and 3) so that ink does not leak from around the contact portion between the ejection port member and the element substrate.

Ink supply means is attached to the main portion so as to supply ink from the back surface of the element substrate, and electrical mounting is performed to complete a recording head. The discharge port member of this embodiment is also formed with a wall for forming a flow path communicating with the discharge port. However, when the element substrate has this wall, it is necessary to provide a wall on the discharge port member. There is no.

In FIG. 2, a liquid container (ink tank) 9 is integrally provided with the recording head as an ink supply means. Further, the electrical mounting is performed by the TAB and is connected to the printer main body through the contact 11 of the TAB tape 10.

FIG. 3 is a sectional view showing a state where the liquid jet head shown in FIG. 1 is assembled. This figure is a cross-sectional view of the inkjet recording head of FIG. 1 taken along the xz plane.
The distance between the nozzles 13 in each of the left and right nozzle rows is twice the predetermined recording density, and the positions of the left and right nozzle rows are displaced by 1/2 of the nozzle distance. As a result, it is configured so as to satisfy a predetermined recording density as a whole. Figure 3
In the figure, since the cross section of the left nozzle is shown, the cross section of the wall portion between the nozzles is shown at the position of the right nozzle. Also, as you can see in the figure,
It can be seen that the surface of the element substrate on which the elements are arranged and the discharge port member are in pressure contact with each other by applying a biasing force to the extending portion 8 of the discharge port member 4 by the leaf spring 6 as the biasing means. .

FIG. 4 shows a cross-sectional view of the nozzle portion of the liquid jet head of FIG. 1 taken along the yz plane.

In order to ensure the close contact between the discharge port member and the substrate, as shown in the cross section of FIG. 5, the part of the discharge port member 4 excluding the extending member (flow path forming part) is curved in advance. It is also effective to leave it. In this case, the position of a first comes into contact by pulling with a spring, and the position of b comes into contact with more strongly.

When the number of nozzles (the number of ejection ports) is large and the ejection port member is long in the y direction, it is effective to provide a plurality of holes for passing the leaf springs and use a plurality of leaf springs or comb-shaped leaf springs. Is.

Example 2 FIGS. 6 and 7 show an example of an ink jet recording head in which the ejection port member of the present invention is provided with a claw to bring the ejection port member into close contact with the substrate. In this example as well, as in the first embodiment and the recording head, the ink is substantially ejected in the surface direction of the element substrate (the direction facing the surface of the element substrate).

Also in this example, a heater board having a heating element on its surface is used as the substrate, and the heating element as the ejection energy generating element rapidly heats the ink to generate a pressure for ejection.

The element substrate is made of a silicon wafer,
A heating element is formed on the surface, and a driving circuit such as a transistor and a shift register for driving the heating element is built in. The heating elements are arranged side by side on the edge of the substrate, and the ink is supplied from the edge of the substrate.

As shown in FIG. 6- (B), the element substrate is attached to the support frame 14. The discharge port member is formed with a discharge port and a fine structure of the nozzle portion.
As shown in (A), two extending portions 8 are provided so as to sandwich the element substrate. By combining the ejection port member and the element substrate attached to the support frame, the main part of the inkjet recording head is completed. In FIG.
FIG. 6 is a sectional view of the recording head of FIG. In the present embodiment, the discharge port member is fixed by so-called patching. That is, the extension portion of the discharge port member is provided with the element substrate side claw member 15 and the support frame side claw member 16, and each claw is caught in the element substrate and the support frame in the assembled state. The elasticity of the claw member pulls and fixes the ejection port member toward the substrate. As described above, by utilizing the elasticity of the ejection port member, the ink jet recording head can be constructed with a small number of parts by functioning as a biasing means for pulling the ejection port member without separately providing a spring.

It is desirable that the claw member 15 on the substrate side be finely divided so as not to hinder the ink supply.

Ensure the close contact between the discharge port member and the element substrate,
In order to prevent displacement, it is also effective to adhere the central portion of the substrate to the ejection port member with an adhesive. Since the central portion of the substrate does not have a fine structure such as a nozzle, there is no adverse effect even if an adhesive is used.

A filter 17 is provided on the bottom surface of the support frame 14. The main part of the liquid ejecting head is assembled in an ink tank and electrically mounted to complete the liquid ejecting head. In this embodiment, since the drive circuit is built in the substrate, it is possible to drive with a small amount of wiring. Further, the element substrate and the printed circuit board can be connected by wire bonding at the portion where the surface of the substrate end is not covered with the ejection port member.

Embodiment 3 FIGS. 8 and 9 show another example in which the liquid jet head of the present invention ejects ink in an oblique direction with respect to the substrate (substantially along the element substrate). . Also in this example, the use of a heater board having a heating element on its surface as an element substrate is the same as in Examples 1 and 2, except that ink is ejected in the direction along the substrate. In FIG. 8, the ink is supplied from the ink supply port 18 provided in the discharge port member 4 to the nozzle portion near the end of the element substrate, and is discharged from the discharge port 5.

Conventionally, in this type of ink jet recording head, in order to accurately bring the ejection port member into close contact with the element substrate,
It was necessary to press-contact the element substrate from directly above the ejection port member. When the ink jet recording head is arranged close to the recording paper, there is a problem that the spring part comes into contact with the recording paper when it is arranged so that the ink droplets are ejected almost perpendicularly to the recording paper. In order to avoid it, it was necessary to make the ejection direction along the substrate. This is
This has been a constraint on the design of the liquid jet head. Even when the spring is pressed directly above the nozzle portion (flow path portion), the center of the distribution of the pressure contact force is behind the nozzle portion, so the adhesion between the nozzle portion and the element substrate is insufficient. There was a problem that it was easy to become.

However, in this embodiment, as shown in FIG. 9, the front surface of the discharge port member extends below the back surface of the substrate, and the extended portion 8 is pulled by the lower spring 19. The discharge port member is pressed against the element substrate. The upper side of the ejection port member is complementarily pressed by the upper spring 20, so that the entire ejection port member is reliably pressed against the element substrate.

In this example, the lower spring is divided into three as shown in FIG. 8, so that the whole of a large number of nozzle portions are securely pressed against the element substrate. When the width of the liquid ejecting head is small, it is not necessary to divide the spring into a large number, and when the width is large, it is desirable to divide into a larger number.

It is also possible to manufacture the lower spring integrally with the extension portion of the discharge port member by molding it with resin. In that case, even if the width of the liquid ejecting head is large, it is not necessary to divide into a large number.

The element substrate is attached to the support 21 as shown in FIG. In addition, a printed circuit board 22 is mounted on the support 21, and the element substrate and the printed circuit board are connected by wire bonding 23. The liquid jet head is connected to an electric circuit of the printer main body through a contact 11 on a printed circuit board and driven.

In this embodiment, the ink is ejected in the direction of about 30 degrees with respect to the surface of the substrate. Therefore, if the support of the liquid ejecting head is attached to the surface of the recording paper at an angle of 60 degrees, the ink is ejected perpendicularly to the recording paper. When the liquid ejecting head is attached to the apparatus main body in this way, the liquid ejecting head according to the present embodiment has neither the upper spring nor the lower spring protruding beyond the position of the ejection port to the recording paper side, so that the ejection port is sufficiently It is possible to bring the recording paper closer to the recording paper, and high-quality recording can be performed without being affected by disturbances due to variations in the ejection direction, airflow, and the like. In this embodiment, the biasing force of the flow path portion, which requires the most reliable pressure contact of the discharge port member with respect to the element substrate, is generated by pulling the above-mentioned extending portion from the back surface side of the element substrate. Therefore, the spring above the ejection member can be downsized, and the element substrate and the ejection port member can be bonded to each other more reliably.

In each of the above embodiments, the heating element is used as the substrate ejection energy generating element, but another ejection energy generating element such as a piezoelectric element may be used.

As a spring for pulling the discharge port member, a spring made of metal, a resin spring, or the like, or an elastic body such as rubber or sponge can be used. Also, its shape is
Any shape such as a plate shape, a coil shape, and a block shape may be used.

Further, in the above embodiment, the nozzle portion is completed by forming the groove-shaped nozzle in the discharge port member and pressing it against the substrate.
It is also possible to make the part of the wall between adjacent nozzles in another way. For example, a dry film may be used to form a groove-shaped nozzle wall portion on the substrate, and the discharge port member may be pressed against the substrate. It is also possible to form grooves on the surface of the substrate by means of etching or the like.

Further, the liquid that can be ejected in each of the above-mentioned embodiments is not limited to ink, and may be any liquid that can be applied to the liquid jet head of the present invention.

Embodiment 4 FIG. 10 is a schematic view showing a liquid jet head cartridge using the liquid jet head of the present invention. The liquid ejecting head cartridge 50 includes a liquid ejecting head 51 and a liquid container (ink container) 52 for holding ink supplied to the head.

This ink container can be refilled with ink after the ink has been used.

Embodiment 5 FIG. 11 is an external view of an example of an ink jet recording apparatus equipped with the liquid jet head (ink jet recording head) configured as described above. The inkjet recording device IJRA has a lead screw 2040 that rotates via driving force transmission gears 2020 and 2030 in association with forward and reverse rotations of a drive motor 2010. A carriage H on which an inkjet cartridge IJC in which an inkjet recording head and an ink tank are integrated is placed.
C is the carriage shaft 2050 and the lead screw 2
The lead screw 2040 has a pin (not shown) that is supported by the 040 and engages with the linear groove 2041 of the lead screw 2040. Reference numeral 2060 denotes a paper pressing plate, which is a platen roller 2070 that constitutes a conveying unit that conveys the recording medium on the paper P in the carriage movement direction.
Press against. Reference numerals 2080 and 2090 denote photocouplers, which are levers 2 provided on the carriage HC.
It operates as a home position detecting means for confirming the existence of 100 in this area and switching the rotation direction of the motor 2010. Reference numeral 2110 is a member that caps the entire surface of the recording head, and is supported by a support member 2120. Reference numeral 2130 denotes an absorbing means that absorbs the inside of the cap, and performs suction recovery of the recording head through the opening in the cap. The cleaning blade 2140 that cleans the end surface of the recording head is movable in the front-back direction.
150 provided on the main body support plate 2160.
Supported by. Needless to say, the blade 2140 is not limited to this form, and a known cleaning blade can be applied to this example. Further, 2170 is a lever for recovering the suction of the suction recovery, which is moved along with the movement of the cam 2180 engaging with the carriage HC, whereby the driving force from the driving motor 2010 is switched to the clutch. The movement is controlled by known transmission means such as.

The capping, cleaning, and suction recovery are configured so that desired processing can be performed at their corresponding positions by the action of the lead screw 2040 when the carriage HC comes to the home position side area. Any desired operation can be applied to the present example as long as the desired operation is performed.

Further, the ink jet device of the present invention has a drive signal supplying means for giving a signal for driving the ejection energy generating element (heat generating element or the like) of the ink jet head of the present invention to the head.

As described above, in the present embodiment, the case of two electrothermal conversion elements has been described. However, even when there are three or more electrothermal conversion elements in one nozzle, any one of these electrothermal conversion elements is used. It goes without saying that the relational expression described above holds for the relationship between the ejection amount ratio by the element and the area ratio.

[0055]

As described above, according to the present invention, the discharge port member can be surely brought into close contact with the substrate with a simple structure. Therefore, even when a large number of nozzles are arranged in high density, they are adjacent to each other. There is no leakage of pressure between the nozzles. Further, it is not necessary to use an adhesive or the like on a portion having a fine structure such as a nozzle portion. As a result, a small size, high performance, and inexpensive inkjet recording head can be manufactured. Further, since the ejection port of the ink jet recording head and the recording medium can be arranged sufficiently close to each other, a high quality recorded image can be obtained.

[Brief description of drawings]

FIG. 1 is a perspective view illustrating a liquid jet head of the present invention in which a discharge port member and an element substrate are in close contact with each other.

FIG. 2 is a perspective view illustrating a liquid jet head cartridge in which an ink container is provided integrally with a recording head.

3 is a view showing a state where the liquid jet head of FIG.
It is sectional drawing explaining the state cut | disconnected by a plane.

FIG. 4 is a cross-sectional view illustrating a state in which the nozzle portion of the liquid jet head of FIG. 1 is cut along the yz plane.

FIG. 5 is a cross-sectional view illustrating a discharge port member that is curved in advance.

FIG. 6 is a perspective view illustrating a liquid ejecting head in which a discharge port member of the present invention is provided with a claw to bring the discharge port member into close contact with a substrate. FIG. 6A is a perspective view illustrating a discharge port member having a claw. FIG. 6B is a perspective view illustrating a state in which the substrate is attached to the support frame.

FIG. 7 is a cross-sectional view illustrating a state in which the liquid jet head of FIG. 6 is cut along the yz plane.

FIG. 8 is a perspective view illustrating a liquid jet head of the present invention.

9 is a cross-sectional view illustrating a state in which the liquid jet head of FIG. 8 is cut along the yz plane.

FIG. 10 is a schematic view showing a liquid jet head cartridge using the liquid jet head of the present invention.

FIG. 11 is a schematic view showing a liquid ejecting apparatus using the liquid ejecting head of the present invention.

[Explanation of symbols]

 1 Substrate 2 Heating Element 3 Ink Supply Path 4 Discharge Port Member 5 Discharge Port 6 Leaf Spring 7 Hole 8 Discharge Port Member Extension 9 Ink Tank 10 TAB Tape 11 Contact 12 Sealant 13 Nozzle 14 Support Frame 15 Claw on Support Frame Side 16 Board Side Claw 17 Filter 18 Ink Supply Port 19 Lower Spring 20 Upper Spring 21 Support 22 Printed Circuit Board 23 Wire Bonding

Claims (19)

[Claims] 1. An element substrate on which an ejection energy generation element for ejecting liquid from an ejection port is arranged, and a plurality of the ejection ports are arranged on a side of the element substrate on which the ejection energy generation element is arranged. A head having a discharge port member that forms a plurality of liquid flow paths by being pressed against a surface, wherein the discharge port member has an extending portion that extends to the back side of the surface, and A liquid ejecting head comprising: a biasing unit that presses the ejection port member against the surface by applying a biasing force to the existing portion. 2. The liquid jet recording head according to claim 1, wherein the urging means is a claw member provided on the extending portion. 3. The liquid jet recording head according to claim 1, wherein the urging means is a spring. 4. The liquid jet recording head according to claim 1, wherein the extending portion extends to the back side of the surface via a hole or a notch provided in the element substrate. 5. The liquid jet head according to claim 1, wherein the extending portion is provided with a through hole, and the biasing force acts on the ejection port member through the through hole. 6. The liquid according to claim 1, wherein the discharge energy generating element is a heat generating element which causes film boiling by applying heat to the liquid and discharges the liquid from the discharge port by pressure when bubbles are generated. Jet recording head. 7. The liquid jet head according to claim 1, wherein the ejection energy generating element is a piezoelectric element. 8. The liquid jet head according to claim 1, wherein the liquid is ink. 9. The liquid jet head according to claim 1, wherein the ejection ports are arranged substantially in the surface direction of the element substrate. 10. The liquid jet head according to claim 1, wherein the ejection ports are arranged substantially in a direction along the element substrate. 11. A liquid ejecting head cartridge comprising: the liquid ejecting head according to claim 1; and a liquid container for holding the liquid supplied to the liquid ejecting head. 12. The liquid jet head cartridge according to claim 11, wherein the liquid container is refilled with liquid. 13. The biasing means is a spring.
1. The liquid jet head cartridge according to item 1. 14. The liquid jet head cartridge according to claim 11, wherein the extending portion extends to the back side of the surface through a hole or a notch provided in the element substrate. 15. The liquid jet head cartridge according to claim 11, wherein the extending portion is provided with a through hole, and the biasing force acts on the ejection port member through the through hole. 16. The liquid jetting device according to claim 11, wherein the discharge energy generating element is a heat generating element that causes film boiling by applying heat to the liquid and discharges the liquid from the discharge port by pressure when bubbles are generated. Head cartridge. 17. The liquid jet head cartridge according to claim 11, wherein the ejection energy generating element is a piezoelectric element. 18. A liquid ejecting layer device for ejecting ink to perform recording, comprising the liquid ejecting head according to claim 1 and a recording medium conveying means for conveying a recording medium. 19. A liquid ejecting apparatus for ejecting ink to perform recording, comprising the liquid ejecting head according to claim 1 and a drive signal supplying unit for driving the recording head.